Vacuum Gauges

Compiled by Terrence Thompson, Contributing Editor
 
This annual Vacuum Technology & Coating product showcase highlights vacuum gauges used in vacuum-based production, R&D and other applications. When you absolutely depend upon vacuum processes, knowing the precise pressure is essential.
 
Vacuum gauges determine precisely what vacuum pressure exists in specific applications. The many manufacturers and distributors of vacuum gauges, as well as the technical societies and trade associations addressing vacuum technologies, provide very comprehensive reference materials for potential buyers. There are many excellent books on vacuum topics although few are recent since the fundamentals are well understood by the vacuum gauge suppliers and many of their customers. We encourage you to indulge in the detailed technology descriptions that are available, many free direct from the manufacturers.
 
Many Choices
 
Why are there so many types and models of vacuum gauges? Because gauge manufacturers comprehensively respond to market demands. The representative models shown here all are commercially viable instruments, each with solid reasons for being used in appropriate applications. Prices vary, of course, since the intended applications impact the ruggedness required and therefore the cost to build it as well as the selling price. Selecting a vacuum gauge is more challenging than some might think.
 
Visit any vacuum gauge company’s website and you will find either a wealth of information to peruse instantly, download or have sent to you if you prefer hard copy references. And it’s well worth registering at the sites since some of the product and vacuum technology information that is mailed to you will be worth keeping in a prominent place on your bookshelf for years.
 

Product Descriptions

 
In the following product descriptions, vendors make legitimate distinctions to focus on specific intended applications so direct comparisons may be difficult. Visit Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
 
 
CT-100 Active Vacuum Gauge
 
Agilent Technologies, Vacuum Products Division‘s CT-100 Active Vacuum Gauge delivers Pirani gauge performance, at lower cost, in a simple, durable design. Pirani-like rapid response time of 0.2 seconds makes the CT-100 ideal for high productivity applications where process steps are critically time-dependent. Rapid response time enables fast-acting valves to protect turbo pumps from sudden inrush of gas. Two user-defined set points per gauge can trigger multiple process steps, alarms, or other pressure-related conditions. A selectable pressure range offers accurate and repeatable readings precisely where it is most critical to the user. The CT-100 operates over the full rough pressure spectrum, 1 × 10- 4 Torr up to 100 Torr or 20 mTorr to atmosphere. On-board LEDs give quick visual indication of vacuum status. The robust sensing element is three times thicker than typical gauges, minimizing sensitivity to process vibration, shock, and condensables, providing longer life and higher repeatability than traditional Pirani gauges. A single point calibration feature maintains gauge accuracy over time. The CT-100 is ideal for mass spectrometers and surface analysis equipment. For load locks, rapid 0.2 second response time and excellent repeatability make the CT-100 the ideal choice. Vacuum connection is a 1/8-inch NPT threaded pipe (KF adapter may be ordered separately) or a welded-on NW16 KF Flange.
 
Agilent Technologies, Vacuum Products Division
Lexington, MA
www.edwardsvacuum.com
Contact: Walter Stevenson (Steve) Palmer, Manager, Marketing Communications, Americas
Tel: 1-781-860-5426 or toll-free: 1-800-882-7426 Ext. 5426
E-mail:  steve.palmer@agilent.com
 
 
2000 Series Vacuum Gauges
 
The Adixen by Pfeiffer Vacuum brand supplies the Adixen 2000 series of vacuum gauges. These instruments are accurate, affordable, easy to specify, and easy to use. These are intelligent gauges that can be used either standalone or with an Adixen gauge controller. Standalone, they can be supplied with 15 to 30 VDC and return a 0 to 10 V or RS485 signal. In addition, set points are available directly on the gauge head. All sensors in this series use the same pin outs on a D sub 9 pin connector, so the wiring is easy. Alternatively, an AdixenACS2000 single gauge controller or ACM2000 triple gauge controller can be used to display the pressures and power the gauges. These controllers come standard with 2 setpoints per channel, 0 to 10 V outputs, and RS232 communication. Any gauge can be plugged into either controller and the controller will automatically recognize the gauge type and correctly display the pressure. The 2000 series gauges include hot cathode ion gauges, cold cathode ion gauges, Pirani gauges and capacitance manometers. These gauges can cover the range of pressure measurements from atmosphere to 5 × 10-10 mbar. The gauges and controllers can give you more than simple pressure measurements; they can drive a production process or display a pressure trend. These gauges are appropriate for use in vacuum coating, semiconductor manufacture, food packaging, cathode ray tube manufacturing, DVD production, electron microscopes, particle accelerators, semiconductor and almost all high vacuum applications. The Adixen 2000 series vacuum gauges include: the AP 2004 Pirani for 5 × 10-4 Torr to ATM, the ACC 2009 Cold Cathode/Pirani for 5 × 10-9 to ATM, the ACH 2010 Hot Cathode/Crystal for 5 × 10-10 to ATM, the ASD 2000 Capacitance Diaphragm series with 4 pressure ranges from ATM to 0.1 mTorr, the ACS 2000 Single Gauge Controller, and the ACM 2000 Triple Gauge Controller.
 
 
ACC 2010 Hot Cathode/Crystal Gauge
 
The Adixen by Pfeiffer Vacuum brand has developed the ACH 2010 full range Hot Cathode/Crystal vacuum gauge. This gauge operates from 5 × 10-10 mbar to atmospheric pressure, with a single readout to cover the entire range. The automatic range-switching feature practically eliminates burning of the filament due to accidental venting. It is available in 2 versions, with an easy RS-485 protocol or a 0 to 10V dc output. Both versions include two programmable set points on the gauge head. The AHC 2010 gauge is very easy to use, including a push button zero and span adjustment, so there are no potentiometers to ‘tweak’. It can be used standalone, just supply it with 15 to 30VDC and get a 0 to 10V analog output or communicate with the gauge using RS-485. Or, use the gauge with an Adixen ACS2000 single gauge or ACM2000 triple gauge controller to display the pressure.

 

 

 
ACS 2000 Single Channel Controller and ACM 2000 3 Channel Controller
 
The Adixen by Pfeiffer Vacuum brand’s ACS2000 single channel gauge controller and ACM2000 3 channel gauge controllers are extremely easy to specify and use. Either controller can be used with any of the Adixen 2000 series gauges, the controller will automatically recognize the gauge and display the proper pressure. There is no complicated part number to configure as they come standard with all popular features: Torr, mBar or Pascal units, RS-232 interface, 2 set points per channel, 0 to 10 V output per channel, and can be powered by 220 or 110VAC. In addition, all gauges use the same type of cable, a straight through DB-9, so there is no complicated array of cables to wade through. These controllers can even be used with the Adixen 1000 series gauges (or visa versa) with a simple adapter, all at an affordable price. The 3-channel controller is very advanced. It can display any combination of Adixen 2000 series gauges, including capacitance gauges in combination with ion or Pirani gauges, and can also display a graphical trend of the pressure signal over time, a very valuable feature for monitoring system performance, pump down times or troubleshooting leaks or out gassing.
 
 
Adixen by Pfeiffer Vacuum —
Two strong brands consolidated for your success
Hingham, MA
www.adixen.com
Contact: Png Tel. 1-781-331-4200
E-mail:  inquiry@adixen-usa.com
 
 
TIC Instrument Controller with Six-Gauge and Capacitance Manometer Capability
 
The Edwards TIC instrument controller is a compact instrument controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control. It is supplied with a Windows™ PC program which provides a comprehensive data logging ability, and enables full setup and control from a PC using the RS232 interfaces as standard. The controller supports and automatically recognizes vacuum gauges from the Edwards range, with coverage from 2000 to 2 × 10-11 mbar. The TIC is available in three-channel, six-channel and six-channel capacitance manometer capable versions. When combined with the optional external relay box that allows for control of six 250 VAC 5 amp changeover relays, the TIC instrument controller provides for flexible operation of a wide range of vacuum system measurement and control configurations. Additional features include: direct pressure readout of common gasses (N2, He, Ar, CO2, Kr & Ne) without conversion factors: up to six 0 to 10V buffered analogue outputs; user-configurable display options including four-character alphanumeric name for each channel; option to display one, three, or six channels simultaneously; and ability to select gauge order when cycling through the display.
 
 
ADC Active Digital Controller
 
The Edwards Active Digital Controller (ADC) is a compact, single line display gauge controller. It features a bright LED display and simple push-button controls. The ADC automatically recognizes compatible Edwards gauges, loads the appropriate look-up table and displays the pressure in commonly used vacuum units. When combined with a suitable gauge, such as the Edwards APG100 Pirani Gauge, APGX-H Convection Gauge or Wide Range Gauge (WRG), the ADC represents a cost effective means of monitoring and controlling process vacuum in a broad range of applications. An enhanced version of the ADC is also available which can accept two compatible Edwards Gauges allowing control of for example an APG100 and an AIM Gauge from a single low cost controller. It also has two 48VDC relays rated at 1 amp for simple process control, and an RS232 interface for communication with a computer or PLC.

 

 
Edwards Vacuum
Wilmington, MA
www.edwardsvacuum.com
Contact: Debbie Thompson
Tel: 1-800-848-9800
E-mail:  debbie.thompson@edwardsvacuum.com
 
 
All Styles of Ionization, Thermocouple and Convection Gauge Tubes for Various Deposition Applications
 
Fil-Tech, Inc. supplies all styles of ionization, thermocouple and convection gauge tubes for various deposition applications. Twin filament tungsten ion gauge tubes are generally used for ion implantation requirements, broad range ion gauge tubes are used for sputtering applications and burnout resistant thoria coated iridium filaments are used for general vacuum requirements. Thermocouple tubes are used for measuring mechanical pump vacuums in the range of 1000 to 1 micron. Convection tubes are used to measure vacuum from atmosphere to 10-3 with high accuracy. Fil-Tech offers discounted pricing and stocks all gauges. Contact Fil-Tech at 1-800-743-1743 or visit us at www.filtech.com for complete cross reference and pricing information.
 
Fil-Tech, Inc.
Boston, MA
www.filtech.com
Contact: Paul Becker
Tel: 1-617-227-1133 or toll free 1-800-743-1743
E-mail:  paul@filtech.com
 
 
830 Vacuum Quality Monitor (VQM™ )
 
The 830 VQM™ from the IGranville-Phillips® Product Center of Brooks Automation is the next generation in gas analysis. Utilizing an Autoresonant Ion Trap as a mass separator provides an 85msec scan for the entire 1-135 amu range while drawing less than 15 watts of power. The 830 VQM transforms complex measurement data into comprehensive, easily usable information. Other advantages of this technology include simple, single gas calibration, no zero blast, high resolution, and excellent performance at UHV levels. The 830 VQM can be used for contamination detection, leak detection, vacuum integrity, process monitoring and more. For details, e-mail: vqm@brooks.com

 

 

 
Micro-Ion® Vacuum Gauge
 
The Granville-Phillips® Series 390 Micro-Ion® ATM Modules combine time-proven technologies – an all-metal miniature ionization Micro-Ion gauge with state of the art heat loss technology and two piezo resistive diaphragm gauges – to provide a full range vacuum pressure measurement from 1 × 10-9 Torr to Atmosphere. This ensures superior reliability and precise performance in a single compact package to save tool space and costs. The full-range pressure measurement is output as a single analog signal, or available through optional serial RS-485 or DeviceNet™ digital interfaces. Up to three setpoint control relays can be included to simplify process control functions. Granville-Phillips products provide accuracy, stability and dependability and are backed by Brooks Automation’s 24/7 Guaranteed Uptime Support. For details, e-mail:  co-csr@brooks.com
 
 
Convectron® Vacuum Gauge Controller
 
The new Granville-Phillips® Series 475 Convectron® Gauge Controller is a third generation controller from the original manufacturer of the industry standard Convectron gauge. The 475 Controller and Series 275 Convectron Gauge provide accurate and repeatable vacuum pressure measurements over 7 decades from 1 × 10-4 Torr to Atmosphere. This new design builds on the proven ruggedness and reliability of the earlier Series 375 controller and adds improved features for ease of use and system integration. These include self diagnostics, multiple built in gas curves, and built in Convectron simulation to provide increased productivity. In addition, push-button controls, easy-to-use analog signals, and a serial communication interface simplify use of the new controller. The Series 475 is RoHS/CE Compliant. Granville-Phillips products provide accuracy, stability and dependability and are backed by Brooks Automation’s 24/7 Guaranteed Uptime Support. For details, e-mail: co-csr@brooks.com
 
Granville-Phillips
A Division of Brooks Automation
Longmont, CO
www.brooks.com
Tel: 1-303-652-4400
 
 
Bayard-Alpert Pirani CDG Triplegauge® For Industrial Coating and Semiconductor Applications
 
The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge, BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5 × 10- 10 to 1500 mbar (3.75 × 10 -10 to 1125 Torr). The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.
 
INFICON
East Syracuse, NY
www.inficon.com
Tel: 1-315-434-1100
E-mail:  reachus@inficon.com
 
 
The New CCM501 Double Inverted Magnetron Cold Cathode Miniature Ionization Vacuum Gauge
 
InstruTech has announced the release if its new Cold cathode Ionization vacuum gauge module, the CCM501, dubbed the “Hornet™ ”. The CCM501 is a rugged Cold Cathode gauge based on the double inverted magnetron technology. The CCM501 is capable of measuring pressures from 1 × 10- 8 to 1 × 10 -2 Torr. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The sensor assembly can be easily disassembled and cleaned allowing long-term use with minimal down time. The standard CCM501 model provides an extremely bright crisp OLED display, one analog output, one setpoint relay and RS485 serial communications. This provides great flexibility for various process control schemes. The display menu provides the user the choice to select from 16 common gases without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Anode voltage and ion current can be monitored in real time on the research screen.

 

 
 
 
CVM201 “Super Bee™ ” Convection Vacuum Gauge Module
 
InstruTech’s CVM-201 series vacuum gauge module with on-board electronics/controller dubbed the “Super Bee™ ”, is based on the convection vacuum gauge principle, and measures pressures from 1000 to 10-4 Torr. The Super Bee is powered by 11-30VDC and provides standard linear, non-linear or log-linear analog outputs, as well as RS232 and RS485 interfaces. Two process setpoint relays are included for controlling vacuum system pumpdown and venting. The Super Bee module also includes a very easy and intuitive user-friendly interface with a built-in 4-digit LCD display, for readout of pressure, and for setup, calibration, and operation of the unit. The Super Bee module is also a drop-in plug-compatible replacement for the Granville-Phillips® Mini-Convectron® gauge modules. Granville-Phillips® and Mini- Convectron® are registered trademarks of Brooks Automation, Inc.
 
 
GM401 “Hornet™ ” Miniature Ionization Vacuum Gauge Module
 
InstruTech’s miniature hot filament Ionization vacuum gauge module, the IGM401, is capable of measuring pressures from 1 × 10-9 to 5 × 10-2 Torr. The IGM401 is a rugged metal Ionization gauge with dual hot filaments. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The standard IGM401 model provides an extremely bright crisp OLED display, one log-linear analog output, one setpoint relay and an RS485 serial communications. The display menu provides the user the choice to select from 16 common gases without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. The IGM401 is also the first direct drop-in plug-compatible replacement for the Granville-Phillips® Micro-Ion® gauge. Granville-Phillips® and Micro-Ion® are registered trademarks of Brooks Automation, Inc.

 

 
 
IGM402 “Hornet™ ” Miniature Ionization Vacuum Gauge with Dual Convection
 
InstruTech’s miniature Ionization vacuum gauge module, the IGM402, is capable of operating two external convection gauges. The IGM402 is a rugged metal Ionization gauge with hot dual filaments. It is the first modular Ionization gauge of its kind with an on-board Controller capable of operating two convection gauges simultaneously. The IGM-402 can combine the vacuum measurement from the Ionization gauge and one of the convection gauges to provide a full range vacuum measurement from 1 × 10-9 to atmosphere, or simply operate the Ion gauge and two convection gauges as individual gauges. User has the choice to display all three measurements in one screen or auto scroll display from one gauge to the next. The IGM402 incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The standard IGM402 model provides an extremely bright crisp OLED display, three log-linear analog outputs, three setpoint relays and an RS485 serial communications. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen.
 
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Tel: 1-303-651-0551
E-mail:  info@instrutechinc.com
 
 
DV-Series Thermocouple Instrumentation
 
MDC’s DV-Series Thermocouple Instrumentation provides power to, and accurate readings from our line of TGT vacuum gauge tubes. These instruments feature a precision analog-todigital converter circuitry. This circuitry combined with the unit’s microchip, measures the output from the vacuum gauge tube and displays it as a digital reading on the front of the unit. The Digital Vacuum Meter (DVM) instrument includes two convenient front panel controls. The first is an adjustment pot that can be used to set the zero of the instrument. The second is a simple push button which is used at atmospheric pressure to set span. However, the instrument comes calibrated from the factory and adjustments on new units are rarely necessary. The Digital Vacuum Controller (DVC) Instrument features the same convenient front panel controls as the DVM. Additionally, the DVC has set point adjustments with LED indicators for each and an override button that allows for set point pressure to be displayed. Both the DVM & DVC models are offered as either the 4000 Series (0 to 20 Torr) or the 6000 Series (0 to 1000 mTorr) models. Both are designed to provide exceptional stability, accuracy, and reliability under the most demanding conditions for years of trouble-free service and minimal maintenance.
 
 
 
TGT Thermocouple Gauge and RT Calibration Reference Tubes
 
MDC’s Thermocouple Gauge Tubes (TGT) are designed to offer fast and reliable vacuum measurement and are extremely reliable vacuum measuring sensors. These devices are built with advanced precision fabrication techniques to deliver unsurpassed tube-to-tube repeatability. Rugged all-metal enclosures are compatible with a wide range of environments. TC gauge tubes are offered in a variety of end connections to accommodate easy installation. MDC Reference Tubes (RT) are also available to provide electrically equivalent output to accurately calibrate MDC thermocouple measuring instruments. The user can quickly and accurately verify the performance of any DV-Series instruments by simply plugging in the reference tube and adjusting the potentiometer if necessary.
 
 
MDC Vacuum Products, LLC
Hayward, CA
www.mdcvacuum.com
Contact: Tom Bogdan
Tel: 1-510-265-3500 or toll free 1-800-443-8817
E-mail:  TBogdan@mdcvacuum.com
 
 
Series 901 Plus MicroPirani/Piezo Loadlock Transducer
 
Designed specifically for the loadlock environment, the HPS Series 901 Plus (901P) loadlock transducer (LLT) combines Piezo and MicroPirani sensor technologies. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. Functionality of three sensors in a single transducer provides space savings and a wide measurement range. Accurate absolute pressure measurement is from 1,000 to 10-5 Torr. Gas independent absolute pressure measurement is from 50 to 1,000 Torr. It has accurate atmospheric pressure reading, independent of gas type and barometric pressure changes. Fast, accurate and repeatable pressure measurements reduce process cycle times. Ease of operation is possible with analog output and digital communication. It is mountable in any position for easy installation. The MicroPirani solid-state sensor is resistant to damage from air inrush or vibration and has three setpoints with fast response time for reliable process control. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides a patented, gas independent absolute pressure measurement from 50 to 1,000 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the element in the MicroPirani is made of a one-millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 901P can read pressures down to 10-5 Torr — two decades below a standard Pirani sensor. The design minimizes the effects of convection, therefore operation is possible in any position without compromising accuracy, for simplified installation.
 
 
Series 902 Absolute Piezo Transducer Compact Pressure Sensor
 
The MKS HPS® Low-cost sensor alternative Compact system design has integrated electronics and sensor in one unit. Reduced process cycle time is due to the sensors’ fast, accurate and repeatable pressure measurements. Sensor is suitable for harsh processes due to clean, robust design and stainless steel construction Ease of operation with both analog output and digital communication Process control from setpoint relay with fast response time CE marked, compliant with EMC Directive 89/336/EEC The Series 902 has a simple modular design, high reliability, and low cost, making it attractive for a number of industries. These sectors and processes include semiconductor manufacturing, thin film coatings, freeze drying, lamps and light bulb production, medical devices, automotive and aerospace. Functions for the Series 902 include atmospheric and vacuum sensing, measuring fore and roughing pressures, warning alarm, monitoring backfill and venting and a system control relay for multi-sensor systems or system remote the control computer. The HPS Series 902 Piezo transducer combines the pressure measurement technology of a Piezo sensor with an integrated electronic control circuit. The 902 Piezo is an absolute direct reading sensor, allowing the measurement to be gas independent. The sensor includes unique temperature compensation, allowing for high accuracy over a wide measurement range (10-1 to 1,000 Torr.) The robust sensor is constructed from stainless steel and aluminum, with only stainless steel exposed to the process. The construction materials and over- pressure capability allow the Series 902 to be used in demanding environments. The digital communication allow for all adjustments and monitoring to be delivered real-time, via a host computer. The 902 includes RS485 communication as a standard feature. Analog output is also standard with a choice of 0 to 10 or 0 to 5 VDC linear output or logarithmic output. The analog output format is selectable via the digital communication lines.
 
MKS Instruments, Inc.
Andover, MA
Tel: 1-800-227-8766 (USA only) or 1-978-284-4000 (Worldwide)
 
 
KJLC510TC – Portable Vacuum Gauge
 
Kurt J. Lesker Company’s battery powered thermocouple gauge is used to monitor the (vacuum) pressures of different applications at different locations, for example, banks of heat treat furnaces, a series of crystal growers, or LN2 storage tanks. This gauging package is tested under real vacuum against a NIST traceable standard before it leaves the factory to insure the highest level of accuracy and quality. The KJL510TC can be ordered programmed to operate Varian’s 531 gauge tube or our KJLC6000 gauge tube, and selectable units between mTorr, mBar and kPa add to the 510TC’s versatility.

 

 
Hot Filament Ion Gauge Tubes
 
Kurt J. Lesker Company stocks a comprehensive selection of replacement ion gauge tubes in tubulated envelope and nude designs that match both our controllers and those sold by competitors. We have tubes: in Pyrex, Nonex, and 7052 glasses; a range of envelope sizes; single or dual tungsten and thoriated iridium filaments; terminated in glass or metal tubes; or with various CF or KF flanges. We can cross reference almost any standard ion gauge tube and can provide custom or modified ion gauge tubes when required.

 

 
Pirani Gauge Tubes & Controls for 20 Torr to 10-3 Torr
 
The Kurt J. Lesker Company Pirani gauges have many operational advantages over thermocouple gauges and competitive Piranis. The platinum alloy element operates at approximately 100°C vs. 300°C of a thermocouple gauge’s filament, significantly reducing instabilities induced by carbonized oil vapors. The lower operating temperature increases the thermal stability, allowing the operator to use a unique temperature compensation circuit that reduces thermal drift to a very low level. The compensation circuit and factory-matched sensors/cables allow any gauge controller to operate any gauge tube without recalibration. Since gold is not used in the sensor, it is unaffected by hydrocarbon or mercury vapors. Response time is 0.3 seconds, or approximately 10 times faster than T/C gauges. Dynamic range approaches 10,000 for pressure measurement (compared to 1,000 for thermocouples). In fact, the pressure range covered by our Piranis is 20 Torr to 1 × 10-5 Torr, which is well beyond the capabilities of any T/C gauge.
 
 
 
KJLC™ 902 Series
 
The Kurt J. Lesker Company 902 series of pressure transducers combine the accuracy and gas independence of a Piezo transducer with Digital communications. The transducer features a unique temperature compensator allowing high accuracy over a wide measurement from 1 to 1000 Torr. The CE marked unit features RS232 or RS485 and analog outputs. An optional LED on-board display is also available.

 

 

 

 
KJLC BDG Series
 
The Kurt J. Lesker Company Bourdon gauges are liquid-filled industrial dial gauges suitable for pressures from atmosphere down to 1 Torr. Available in 3 different pressure models — Torr, mbar, or in Hg — they feature corrosion and impact resistant, Zytel nylon case with removable bezel for easy calibration. The large dial face measures 2-½ inches across the dial and the clear glycerin fill provides stable readability in spite of vibration. The internal “breathing diaphragm” virtually eliminates the air bubble in the mid range of the gauge for improved readability, prevents freezing, clogging and corrosion and compensates for temperature fluctuations.

 

 

 
 
KJLC™ Convectron® Equivalent Series
 
The Kurt J. Lesker Company Convectron Equivalent series of pressure transducers and sensors are direct “drop in” replacements for the Granville-Phillips Convectron gauges. All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers.

 

 

 
 
KJLC™ DV-6M Equivalent Thermocouple Sensors
 
The Kurt J. Lesker Company KJL-6000 thermocouple tube is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an allmetal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company has a 30-day money-back guarantee on this product, with no questions asked.

 

 

 
 
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Aaron Bryan
Tel: 1-800-245-1656 or 1-412-387-9200
E-Mail:  pressure@lesker.com
 
 
GT-430 Thermistor Digital Display Gauge with Trend Sensing™ technology
 
The Myers Vacuum GT-430 Thermistor Type Gauge operates from atmosphere to 1 × 10-3 Torr while displaying the direction of p r e s s u r e change. Trend sensing™ is a unique feature of the gauge that provides real time display of the direction of vacuum pressure change. This monitoring of pump down cycles provides the operator with data to quickly determine if there is a problem. Plus Trend sensing™ provides vacuum leak detection with solvents for the entire range of the gauge. Features of the GT 430 include two adjustable independent relay outputs, RS 232 serial interface, and Analogue output for remote display, monitoring or recording of the pressure reading. It uses the industry standard GT 034 thermistor sensor with encapsulated resistor bead. This design has proven more rugged than a standard thermocouple sensor making it ideal for applications measuring in harsh environments.

 

 
GTC-390 Thermocouple Vacuum Gauge
 
The Myers Vacuum GTC-390 Thermocouple Vacuum Gauge is a dual station controller housed in a DIN-style case. It is usable for panel mount or standalone. The two 40-segment bar graphs display both stations pressure simultaneously, providing a comparison of the sensor readings. Operating range is 1 mTorr to 5000 mTorr. Each station has an isolated relay with front panel adjustable trip points and status display, useful for controlling other devises or interlocking. It uses the industry standard GTC-036 Thermocouple sensor.

 

 
 
GTC-395 Thermocouple Vacuum Gauge
 
The Myers Vacuum GTC-395 Thermocouple Vacuum Gauge is a single station microprocessor controller, with easy to read display, housed in a DIN-style case. It is usable as panel mount or standalone. It uses the industry standard GTC-036 Thermocouple sensor. It reads pressure from 1 mTorr to 3000 mTorr with an atm atmosphere indication. The gauge features two independent relays, with front panel status indicators, adjustable within the full measurement range. Each relay has two trip points, one for when vacuum is decreasing and one for when vacuum is increasing. This eliminates any relay chatter that may occur when the pressure is cross over. Other features of the GTC 395 include RS 232 serial interface, and Analogue output for remote display, monitoring or recording of the pressure reading
 
 
AVC-485 Automatic Valve Controller
 
The Myers Vacuum AVC-485 Automatic Valve Controller provides automatic operation of diffusion, turbo, or cryo pumped high vacuum pumping systems. Control of the four basic vacuum valves (roughing, foreline, high vacuum and vent) to perform chamber pump down, vent and regeneration (for cryo pumps) is accomplished with single button operation. Two thermistor gauges monitor/display the vacuum of the chamber and fore line. The cross over point from Rough to high vacuum is adjustable allowing operator to adjust for application. Safety features include automatic closing of all valves for system protection in the case of a sudden pressure rise or power failure. It uses the industry standard GT 034 thermistor sensor.
 
 
 
GPH-001A Cold Cathode Ionization Sensor
 
The Myers Vacuum GPH 001A high vacuum gauge tube is ideal for heavy industrial applications such as vacuum furnaces and evaporators, providing pressure measurement from 2.5 × 10-2 to 2 × 10-8 Torr. Its unique design produces quick and stable starting, while providing stable reliable measurement. Features include easy disassembly for cleaning or repair, replaceable anode, ring magnet, and all stainless steel construction.
 
 
 
GT 034 Thermistor Sensor
 
The Myers Vacuum GT 034 Thermistor Sensor is ideal for use in both rugged and ultra High vacuum environments. It is capable of reading from atmosphere to 1 × 10-3 Torr. The single element glass encapsulated thermistor bead has leads 10 times the size or the standard Thermocouple sensor, making it more durable when operating and less susceptible to damage. It is constructed from nickel-plated steel with all welded seams and glass feedthrough’s providing leak free to 1 × 10-8 Torr range. The standard 1 /8 NPT and smooth tube surface for compression fittings makes it and easy replacement for existing Thermocouple Sensors.
 
 
 
Explosion Proof Enclosure for Thermocouple & Thermistor Sensors
 
Myers Vacuum has developed an enclosure for explosion proof /resistance applications. This lightweight explosion proof housing can be easily used with standard thermocouple or thermistor sensors. The footprint is • 8-inches tall by 5.5-inches wide. It meets requirements for NEMA 4X; M standard 3615 Class I, groups B, C and D and Class II, Groups E, F, G; CSA Standard C22.2 No. 30 CLASS III; and L Standard 1203.

 

 
GPH 320 Penning (Cold Cathode) Vacuum Gauge
 
The Myers Vacuum GPH-320 Penning Type Vacuum Gauge operates from 10-3 to 1 × 10-7 Torr using the proven, rugged and reliable GPH-001A sensor accessory. The voltage regulation of this unit is designed to provide years of stabile operation. The high-voltage regulated transformer is checked for freedom from corona. Conservative design throughout assures long troublefree life, and close voltage regulation makes the GPH-320C insensitive to line voltage variations. The GPH-320C gauge is a single station gauge that indicates pressures on a three-range scale calibrated in units of dry air pressure. The basic gauge is available in 115VAC, 60 Hz. A solid-state alarm or control circuit, GPH-010A, is available as an accessory. This circuit provides a set of relay contacts that can be preset (using a screwdriver adjustment on the rear panel) to open or close at any pressure throughout the range of the gauge. The trip point is independent of the position of the range selector switch. The control circuit plus into a connector on the printed circuit board inside of the gauge card and is easily installed on-site. Contacts for alarm or control functions are connected to a 3-pin plug that mounts on the real panel of the gauge.
 
 
Myers Vacuum Repair Services, Inc.
Kittanning, PA
www.myers-vacuum.com
T: 1-724-545-8331
E-mail:  dmyers@myers-vacuum.com
 
 
OLV Broad Portfolio Of Vacuum Sensors
 
The Oerlikon Leybold Vacuum line of vacuum sensors and displays were specifically developed for vacuum system integration in all applications where the user desires the following attributes: direct data transfer to PLC / computer through analog interface; long transmission distances between measurement location and processing station; multiple measurement locations which need constant monitoring; increased requirements regarding electromagnetic compatibility; and pace saving installation. The comprehensive array of OLV vacuum sensors supports a measurement range from above atmosphere to 1 × 10- 12 mbar vacuum. Sensors include CERAVAC, IONIVAC, THERMOVAC and PENNINGVAC and are based upon various measurement principles – capacitive pressure measurement, hot cathode Bayard-Alpert ionization, Pirani thermal conductivity and Penning cold cathode ionization. Displays and controllers are available in both single and multiple channel versions.Adjustable switching thresholds, vacuum indication in Mbar, Torr, Micron and Pascal units, chart recorder outputs and RS232 C interfaces and hand-held vacuum sensors are also available.
 
Oerlikon Leybold Vacuum USA
Export, PA
www.oerlikon.com/leyboldvacuum
Contact: Mr. Walt See
Tel: 1-800-764-5369
E-mail:  walter.see@oerlikon.com
 
 
CMR/CCR Vacuum Gauges
 
Pfeiffer Vacuum ActiveLine CMR/CCR capacitive transmitters offer compact and rugged vacuum measurement to cover applications from 10-5 to 1100 mbar. The CMR/ CCR vacuum gauges feature a new ceramic technology sensor, which prevents memory effect, provides greater resistance to corrosive gases, excellent temperature compensation and better wear properties. These transmitters operate independently of the type of gas that is being employed. The output signal, which ranges from 0 to 10 volts, features an integral error signal, which guarantees secure and reliable measurement. The robust ceramic diaphragm design is less sensitive to process induced effects and can withstand millions of atmosphere cycles and bursts. Innovative signal processing produces an optimized measurement limit down to the smallest possible measured value of 10-5 mbar with high stability of the measured values. The CMR/CCR gauges can be operated with any Pfeiffer Vacuum ActiveLine controller and can be used as dropin replacement for older gauges.

 

 
 
ActiveLine™ Analog Vacuum Gauges
 
Pfeiffer Vacuum, Inc. offers an extensive line of analog vacuum gauges to meet the most demanding pressure measurement and process control requirements. The ActiveLine™ gauges contain integrated electronics and feature an easy to use interface that allows for operation with or without a controller. The ActiveLine™ gauge transducers are also designed so that they can be controlled directly through other Pfeiffer Vacuum products such as leak detectors and turbo pump controllers. By combining rough and high vacuum gauge technologies into single, compact packages, Pfeiffer Vacuum offers the unique ability to easily measure a wide range of pressures from atmosphere to 5E-10 mbar with a single transducer. For additional control flexibility, Pfeiffer Vacuum offers a line of controllers, providing an analog output voltage representing pressure, plus control relays, simple calibration, and a digital readout of the vacuum level. ActiveLine is available in Piezo, Capacitance Diaphragm, Pirani, Cold Cathode, Process Ion, Full Range Cold Cathode and Full Range BA gauges.
 
 
Radioactive and Electromagnetic Compatible Vacuum Gauges
 
Pfeiffer Vacuum’s ModulLine vacuum gauges are tolerant of electromagnetic fields and radioactivity making them ideal for use in accelerators, UHV, high temperature and areas with radiation. They feature a rugged, proven design with automatic switchover from Pirani to cold cathode sensor. ModulLine is available with metal-sealed sensors for UHV applications. Designed for exceptional interface and control flexibility, ModulLine™ permits operation with remote electronics from the gauge head and has four different interface options including RS232, RS485, and Profibus.

 

 

 
DigiLine™ Digital Vacuum Gauges
 
Pfeiffer Vacuum offers a complete line of digital vacuum gauges to meet the most demanding pressure measurement and process control requirements. The DigiLine digital gauge line features the most inclusive connectivity capabilities including RS 232, RS 485, Profibus, and Device Net compatibility. By combining rough and high vacuum gauge technologies into single, compact packages, Pfeiffer Vacuum offers the unique ability to easily measure a wide range of pressures from atmosphere to 1.0E-9 Torr. DigiLine gauges contain integrated electronics, presenting the ability to monitor vacuum pressure without the use of a controller. For additional control flexibility, Pfeiffer also offers a line of DigiLine controllers, providing control relays, simple calibration, and a digital readout of the vacuum level. DigiLine is available in Piezo, Pirani, Piezo/Pirani, Pirani/Cold Cathode and Pirani/Bayard-Alpert digital gauges.

 

 

 
Compact Pirani Gauge
 
Pfeiffer Vacuum’s Compact Pirani Gauge features a rugged sensor design with easy push button calibration and fast reaction time in a compact and corrosion resistant housing. Compact, robust and potential-free, the Pirani gauge provides optimum temperature compensation, with stable and fast measuring. In addition, it offers absolute pressure measurement with excellent long-term stability and the smallest zero drift. The Compact Pirani Gauge measures pressure from atmosphere to 5E-4 mbar.

 

 

 

 
 
Pfeiffer Vacuum Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-mail:  gauges@pfeiffer-vacuum.com
 
 
New G-TRAN Wide Range Pirani Gauge
 
The ULVAC SW1 series is a compact wide range digital Pirani vacuum gauge that measures rough vacuum levels accurately from atmospheric pressure down to 5 × 10-4 mbar (3.75 × 10-4 Torr). The thermally compensated sensor provides linear and repeatable measurements over the entire measuring range. This wide range gauge is also gas species independent, and unlike capacitance manometers, it is orientation insensitive, permitting mounting in any position. The SW1 features 24V operation with serial (RS232C/ RS485) communications or digital control with two set points and analog outputs. A platinum filament provides corrosion resistance making this gauge ideally suited for OEMs to use in semiconductor vacuum equipment as a low vacuum process control gauge. Sensor tubes are easily exchanged, and the unit is CE Marked and RoHS compliant.

 

 

 
Extreme High Vacuum Gauge
 
The ULVAC AxTRAN is an extremely high vacuum gauge (XHV) that uses an energy analyzer to completely separate the ion source and ion collector. This structure permits AxTRAN to separate and measure noise current generated inside/outside the gauge, and gas ion current dependent on the pressure generated in the ion source. It enables highly quantifiable pressure measurements in a wide pressure range (10-2 to 10-1 1 Pa). The AxTRAN can be used for pressure measurements for high-energy accelerators, ultra-high and extreme high vacuum systems. Features include two independent set points, an easy-to-read 3-digit mantissa LED display and a wide pressure measuring range.

 

 
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail:  sales@ulvac.com
 
 
Chemical-Resistant Pirani Gauge
 
The new VACUUBRAND® DCP 3000 is a wide-range electronic vacuum gauge (10-3 mbar- 1000 mbar) with a large, illuminated display. It can accept inputs from up to 4 capacitive gauge heads (0.1 mbar to 1080 mbar) and 4 Pirani gauge heads (10-3 mbar to 1080 mbar). Gauge heads communicate with the DCP 3000 via the VACUU•BUS™ that automatically recognizes sensors and configures the gauge. Use the jogwheel for set-up and to step between sensors. The instrument data-logger can record up to 32,000 measurements. The RS232 port allows process validation for GLP/GMP/ISO conformance. For corrosive applications and vacuum to 10-3 mbar, choose our VSP3000 gauge head. Constructed of rugged plastics and ceramics, it is the world’s first corrosion resistant Pirani gauge head. Designed mainly for applications in chemistry and process engineering, it is splash-proof and resists pressure shocks and mechanical vibration. Range from atmospheric pressure down to 10-3 mbar. For applications down to 0.1 mbar, choose our corrosionresistant capacitive gauge head, the VSK3000.
 
VACUUBRAND, Inc.
Essex, CT
Tel: 1-860-767-5341
 
 
Pirani, Thermocouple and Diaphragm Indicators and Dual Set Point Control Instruments
 
Vacuum Research’s Pirani, thermocouple, and diaphragm indicators and dual set point control instruments for pressures from 10-5 to 1500 Torr. Gauges can be provided with displays and analog outputs reading directly in Pascal or mBar. Inexpensive vacuum switch instruments are also available with Diaphragm or Pirani sensors with any style and size of flange. The Wide Range Diaphragm Manometer has a fast response sensor provides high accuracy measurements that are unaffected by gas composition. The Diaphragm Manometers for 0.5 to 1200 Torr and 1 to 1500 Torr measurements have stainless steel or pure silicon diaphragms. Response time is less than 400 milliseconds full scale. The High Vacuum Pirani Gauges in ranges from 10–5 to 20 Torr. Easy to read backlit displays. Linear 0 to 2.0 VDC output, 4 to 20 mA output optional. The Convection Gauges have digital and analog display models for 1 mTorr to atmosphere. Single sensor covers entire range. The Thermocouple Gauges are Varian 531 and Hastings DV-6 replacements. No Plastic is used. Stainless steel is standard. Indicators and controllers for 1 to 2000 mTorr and 1 to 1000 mTorr.
 
Vacuum Research Corp.
Pittsburgh, PA
www.vacuumresearch.com
Contact: Tom Monroe
Tel:1-800-426-9340 or 1-412-261-7630
E-mail:  VRC@vacuumresearch.com
 
 
Servometer Releases Design Steps for Metal Bellows Assemblies
 
Cedar Grove, NJ…In order to assist engineers with the design requirements of bellows assemblies, Servometer has released a brief twelve step process as a guide. With many variables impacting the movement of a bellows, understanding all variables creates the opportunity to produce the optimal end product design.
 
Stress modes and flexing include the variables that could bend, torque, extend, compress, or move the bellows in different directions. While a bellows can handle multiple types of stress, the combination of the variables can affect the cycle life of the unit. Shock and vibration can also influence the design of a bellows, depending on its frequency.
 
Internal and external pressure and the differential pressure between them are also critical to the design of the bellows. Because bellows are pressure responsive devices, the amount of pressure can impact variables such as the wall thickness, stroke length, and cycle life. Along with pressure, comes temperature and media. The ambient temperature and operating temperature are critical to the survivability of the bellows. The liquid or gas being measured should also be specified to ensure media compatibility with the bellows.
 
Rigid stops can be added to a bellows assembly in order to limit the compression or extension to increase cycle life and overall capability. Defining the spring rate, or amount of force to flex the bellows, will assist with the expected life cycle, which can be one-time use to infinite life.
 
The size and constraints should be defined by customers. The geometric constraints can limit the size of the assembly at the sacrifice of other performance specifications. The ends can be prepared for welding, soldering, open or closed in order to integrate the bellows into the system.
 
Formulas are available to calculate the different variables on the Servometer website.
 
For more information, visit: http://www.servometer.com/products/electrodeposited-bellows/12-key-factors/
 
Servometer®
www.servometer.com

New Products

 
XEI Scientific Launches Evactron® CombiClean™ at M&M 2011
 
Redwood City, CA…XEI Scientific Inc, manufacturers of EVACTRON® De-Contaminator Plasma Cleaning Systems for electron microscopes and other vacuum chambers, announces the release of their new Evactron® CombiClean™ system which simplifies the control and operation of plasma radical sources for both column and desktop cleaning of specimens for electron columns used in SEMs, TEMs and FIBs.
With over 1,100 Evactron De-Contamination systems in use primarily on electron columns (SEMs, TEMs and FIBs), XEI Scientific is expanding applications of their effective downstream plasma cleaning technology. Earlier this year XEI introduced the Evactron® SoftClean™ Chamber which allows users to mount Evactron Plasma Radical Sources (PRS's) onto a desktop vacuum chamber to provide the same effective removal of problematic hydrocarbon contamination from samples, holders and other parts before they are placed in the electron column.
Using RF and a patented hollow cathode electrode, Evactron systems produce a plasma that is contained in the PRS module. Reactive gas radicals are generated and drawn into the sample chamber where they chemically break down unwanted hydrocarbon molecules into smaller constituents which are then easily removed by the instrument's vacuum system.
At the Microscopy and Microanalysis meeting in Nashville, TN, August 7-11, XEI Scientific introduced the Evactron CombiClean™ System to simplify the control and operation of multiple PRS modules on columns and desktops. With a new integrated controller and vacuum chamber, operators can easily select which PRS is active via the system front panel and seamlessly switch between column cleaning and desktop de-contamination of parts destined for use in the microscopes.
Other benefits include multiple insertion ports for cleaning TEM sample holders. The cleaning chamber may function as a secure, long-term storage container for decontaminated samples. It has a large circular lid for convenient access to insert samples, while dry nitrogen purging prevents back streaming after plasma cleaning and during sample storage to allow the use of rotary vane pumps. Attractively priced and with a small footprint, this new cleaning solution continues the nearly 20 year tradition established by XEI of providing cost effective and innovative solutions to improve the performance of electron and ion imaging tools.
For more information on how to improve the image quality in electron or ion microscopes, please visit the company's website
 
XEI Scientific Inc
www.Evactron.com
 
 
Brooks Offers Stable, Rugged Capacitance Manometers for Process Vacuum Measurement
 
HATFIELD, PA … Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, provides the CMC and XacTorr™ Series digital capacitance manometers. These devices incorporate industry-leading features to improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects in vacuum measurement applications. The CMC and XacTorr Series are the vacuum gauges of choice for thin-film processes.
Brooks’ CMC Series manometers are compact, unheated gauges featuring robust all-welded construction and Inconel® sensing diaphragm. The combination of precision components and a wide temperature compensated operating range allows the CMC Series to deliver best-in-class zero and span temperature coefficients for optimum measurement stability. They are available in full-scale ranges from 10 to 1,000 Torr, making them an ideal upgrade for small form-factor capacitance manometers and an economical alternative to full-sized unheated gauges.
Brooks’ XacTorr digital capacitance manometers are premium, heated gauges that use patented dual-zone heating to ensure 0.1 degree Celsius temperature uniformity. These compact gauges provide superior reliability by combining Brooks’ patented Mark-IV shielded sensor technology and patent pending digital temperature control, which reduce the buildup of condensable products that lead to process drift and premature gauge failure. The XacTorr capacitance manometers are offered in three operating temperatures (45, 100 and 160 degrees Celsius) with full-scale measurement ranges from 100 milliTorr to 1,000 Torr.
XacTorr capacitance manometers include an RS-485 dataport, enabling in-situ monitoring and troubleshooting without disturbing communication with the vacuum chamber control system. They also offer RS-485, DeviceNet or analog 0 to 10 VDC communications.
For more information about Brooks CMC and Xac-Torr capacitance manometers, visit our website.
 
Brooks Instrument, LLC
www.brooksinstrument.com