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Chillers/Cryogenics Systems and Heaters for Vacuum Processing Applications
Compiled by Terrence Thompson, Contributing Editor
This product showcase describes heaters, chillers and other cryogenic/thermal control products/systems used with vacuum processing, pumps/systems and instrumentation for a wide variety of vacuum-centric process applications.
Vacuum process manufacturing operations need more than just the specified pressure, they typically need precise heating and/or cooling to meet production requirements. Having the precise process temperature in the vacuum chamber and the lines feeding the process may be the difference between high yields or an overflowing rejects bin.
Temperature control is achieved by cooling and/or heating process consumables, the vacuum chamber itself, work surfaces, or supply lines to the process. Preferably, once a determined temperature is established, automatic temperature control is maintained. Temperature control systems are typically used to maintain wafer temperature setpoints in sputtering and plasma etch applications for real-time, dynamic, independent temperature control of the cathode, anode and/or chamber walls.
Proper maintenance is key to trouble-free operation. Therefore, it is important that equipment owners maintain their heater and chiller systems per manufacturer's specifications.
Cryogenic Society of America
The Cryogenic Society of America companies make up a varied cross-section of the cryogenic industry. The CSA is a non-profit technical society serving all those interested in any phase of cryogenics. For specific information about CSA, visit www.cryogenicsociety.org.
Product Descriptions
In the following product descriptions, vendors make distinctions to focus on specific intended applications, therefore, direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements. Product descriptions are based upon information provide to Vacuum Technology & Coating magazine and verified on their websites.
Ultra-Low Vibration UHV Cryostat
Advanced Research Systems has Ultra-Low Vibration UHV Cryostats for material characterization. These systems can achieve temperatures as low as 4K and as high as 800K. The UHV interface has all metal seals and UHV  compatible materials in the construction and is bakeable to 200°C. The low vibration interface allows for vibration dampening as low as 3 to 5nm. Custom flanges and configurations are available. Additionally ARS manufactures closed cycle and helium flow cryostats and probe stations for cryogenic material characterization with operational temperatures ranging from 1.5K to 800K. ARS offers cryostats specifically tailored for many applications including, electron transport, PES, STM, UHV, XPS, and surface science.
Advanced Research Systems Inc.
Macungie, PA
Tel: 1-610-967-2120 Ext. 239
Ultra-reliable Kt1 Re-circulating Chillers Including A New Ultra-compact up to 1000W
The Applied Thermal Control Ltd. Kt1 is an ultra-reliable re-circulating chillers from ATC with cooling powers in the range 480W (including unique low cost versions) to 9kW. ATC has worldwide service and support and a standard 2-year warranty. OEM/VAR programs are also available. ATC Ltd. supplies premium performance recirculating-chillers for demanding applications in high up-time reliability sensitive markets including manufacturers  of scientific instruments, ophthalmic, and semiconductor fab related industries. OEM markets include applications in digital printing and lithography, machine tools, injection molding, and laser equipment cooling. ATC offers products in a variety of mains power configurations, including switch-able dual voltage 50/60 Hz versions. ATC Ltd. is an ISO9002 and RoHS compliant manufacturing company. Many chiller models are TUV certified and UL listed. The Kt1 re-circulating chiller from Applied Thermal Control (ATC), is designed to meet the cooling needs of high-tech machinery and instrumentation with a cooling requirement of up to 1 kW in working environments requiring low noise. The design is ultra-compact and the 1 kW of cooling power is delivered in an ultra-compact 370mm × 450mm footprint. The PID temperature controller allows the temperature to be controlled with a precision of ± 0.1°C over the range 4°C to 35°C. Extended lower and higher temperature ranges and other standard options such as switch-able 50/60 Hz are available. The unit has high/low temperature alarms, fluid level, flow and pressure indicators fitted as standard. The Kt1 is provided with a choice of pumps and accessories to meet all flow requirements and is very quiet (58 dB at 1 m).
Applied Thermal Control Ltd.
Whitwick, Leicestershire, UK
Tel: +44 (0) 1530 83 99 98
Polycold® PFC Fast Cycle Water Vapor Cryopump
This proven, reliable system significantly reduces pumpdown time and improves product quality by quickly removing water vapor from your vacuum process. Brooks Automation, Polycold Systems’ PFC provides high speed, in-chamber  water vapor cryopumping, with speeds up to 200,000 l/s, vacuum levels to the 10-10 Torr range, temperatures of -100°C to -150°C, and heat removal to 3600W. The PFC delivers true fast cycle performance – reaching base pressure faster and defrosting within minutes to return your chamber to action. This means more production cycles per shift, higher throughput and enhanced profitability.
Polycold® PGCL for Wafer and Chamber Cooling
Brooks Automation’s Polycold® PGCL (Closed Loop Gas Chiller) has been tested and qualified on a PVD process for copper/tantalum barrier-seed deposition. By providing a lower chuck temperature (as low as -70°C), higher process thermal loads can be managed while maintaining the wafer at the required temperature. This enables film uniformity, high process yields and high wafer throughput. The closed loop gas chiller provides cooling of wafers and chucks using an inert gas coolant. It also eliminates problems associated with liquid chillers such as leaks into the chamber that lead to significant system down time, cost of replacement fluid, safety concerns, and process contamination. By recycling the chilled inert gas coolant, PGCL also reduces the system's Total Cost of Ownership (TCO) when compared to the operating cost of an open loop gas chiller by eliminating the cost of continuous high-purity gas supply.
Brooks Automation, Inc. — Vacuum Products Division
Chelmsford, MA 01824
Tel: 1-978-262-2400
Qdrive Acoustic Coolers
CFIC Qdrive offers a full range of cryo-condensers for coldtrapping service and gas condensation, including the 2s241K. All Qdrive coolers use the acoustic Stirling cycle. These robust, nearsilent condensers provide cooling to below  50K, with capacities from a few watts to hundreds of watts at 77K rating temperature. Zero scheduled maintenance is achieved by no cold moving parts and no oil anywhere. Operation is by a single on/off switch, with multiple process safeties built in. The Qdrive model 2s241K-LXDE shown here can condense up to 1.5 liquid liters per hour of oxygen, or operate at low gas flow to as low as 45K. This mobile unit operates from 220 VAC, 3-phase, drawing less than 5kW. Custom packages and interfaces are available. CFIC-Qdrive is currently offering the 2s241K with 200W capacity at 77K in closecoupled form. A FAR (remote coldhead) option will be offered soon. The 2s102K is rated at 8 to 10W @ 77K; the 2s132K is rated 25W@77K; and the 2s241K is rated 200W@77K.
CFIC Inc., a subsidiary of Chart Industries, Inc.
Tel: 1-518-272-3565
1000K Cryocooler Interface (patent pending)
ColdEdge Technologies provides < 2K to 1000K temperature range cryostats for materials research, spectroscopy, superconductor studies, UHV, device testing, astronomy, cryogenic detector cooling, magnetic properties, chemistry, bio, electrical experiments and many other applications. Liquid Helium free closed cycle systems with sample in vacuum or cold vapor available. Interface customization are our specialty. Cryocoolers bottom out temperature to 1000K. Wide sample temperature range testing without having to disturb sample by moving it to another heating source is advantageous. The robust design mounts on the cooler’s cold tip and will not be damaged during typical sample change activities. Many standard mount configurations available and customization is available to fit your cold tip and/or sample holder mount configuration. It can be used with many different closed and open cycle cryocooler. High temperature instrumentation and temperature controllers are also available.
ColdEdge Technologies Inc.
Allentown, PA 18103
Tel: 1-610-628-6363
Cold Box
Cryo Technologies is a worldwide supplier of custom engineered cryogenic process equipment including large cold boxes, with a focus on helium systems. Products include cryogenic helium extraction systems for producing crude helium from pipeline  natural gas, cryogenic purifiers for producing pure helium from crude helium, helium refrigerators and liquefiers covering a full range of sizes and applications, nitrogen liquefiers, cryogenic and non-cryogenic gas purification and recycle systems for all gases, and low heat leak vacuum insulated piping and distribution systems. Cryo Technologies’ staff has extensive experience designing and supplying custom engineered cryogenic helium systems to the gas industry and scientific community.
Cryo Technologies
Allentown, PA
Tel: 1-610-530-7288
Integrated Cryo Chamber Treatment
Integrated Cryogenic Systems Inc. is a deep cryogenic treatment company which provides deep-cycle cryogenic material tempering to -300°F. It is affiliated with Integrated Metallurgical Services Ltd., specializing in post weld heat treatment. The  company uses a deep cryogenic treating chamber, interior dimensions 96-inches L × 36-inches W × 36-inches D with multi point N2 injection, stainless steel constructed, capable of maximum load mass of 10,000 lb. The cryogenic processing control is a PC-based OPTO 22 system with a PID ramp cycle control, ± 0.25°F/min., multiple thermocouple data acquisition and auxiliary instrumentation penetrations for resistivity, conductivity and optical pyrometry instrumentation.
Integrated Cryogenic Systems Inc.
Calgary, Alberta, Canada
Tel: 1-403-279-2666
UHV Heater Modules
In addition to the complete sample heating solutions offered within the EpiCentre product family, Lesker has a range of individual heater modules for end users to incorporate within their own heater stage designs. The range provides end users with a  cost-effective solution to sample heating, while benefiting from a proven heater technology. The heater module product range is available for sample sizes from 25mm OD to 300mm OD with two different element materials. Heating elements are constructed from high quality, high-density graphite, coated with pyrolytic graphite or pyrolytic boron nitride. By virtue of the exceptional thermal coupling of the heat to the substrate and the large radiating surface area (an effect of the high element surface to gap ratio), these elements run at considerably lower temperatures than conventional metal heaters. The typical ratio of element surface to meander gap is 5:1 resulting in excellent substrate heating uniformity, even without rotation. These heater modules are used in vacuum applications for radiantly heating semiconductor wafers, holder supported samples or various other substrates to high temperatures. The modules have CVD processed heating elements packaged in refractory metal cases. The immediate hot zone holding the element is constructed from refractory metals such as molybdenum and tantalum and does not include any ceramics or other materials to compromise performance at high temperature. These modules are therefore particularly suitable for ultra high vacuum applications. The heater modules provide: High uniformity heating to 1000°C (1200°C for certain applications) and a refractory metal hot zone. Heater modules are available with type ‘C’ or ‘K’ thermocouples and can be supplied with semiconductor grade ‘quartz guards’ to protect the heater element. There are high performance Pg or PBN coated graphite elements and a quartz guard option for element protection.
Stab-In Heaters
The Lesker Stab-In (also known as Insertion) bakeout heaters are mounted on 2.75-inch OD ConFlat flanges and work as outgassing units for stainless steel chambers. They heat a vacuum system efficiently from the inside, a method which produces a  faster heating response than that produced by external heaters, resulting in a low heating effect outside the chamber. The bulb and thermocouple extend into the chamber about 5-1/8 -inches. The bulb produces 1000W of power and is available in both 115V or 220V versions. The atmosphere side connection is made via a Mil-Spec connector.
Quartz Lamp Heaters
The Lesker Quartz Lamp Heaters act as both bakeout heaters and sample heaters. Able to operate safely in an oxygen backfill, they mount inside a vacuum chamber to raise the temperature of substrates. Because they produce both infrared radiation  and ultraviolet light, they clean nearly all molecules adhering to the substrate's surface through electron excitation and molecular vibration. Used in place of blanket heaters or panel ovens, lamp heaters save both time and power since the heat radiates directly to the critical surfaces. Lesker offers single lamp assemblies, approximately 4 -inches in length, each using a 500W lamp mounted in an electro-polished stainless steel ‘V’ reflector with a hightemperature, fabric-covered power cable. The 500W quartz lamp's 'color temperature' is 3000K, with its maximum energy emission at a wavelength of ~900nm. Arrays of multiple lamps are also available in triangular and other configurations. Power supplies up to 4kW are available. The average lamp life is 2000 hours.
Button Heaters
The Lesker Button heaters work as thermionic cathodes to deliver temperatures of up to 1,200ºC to samples in UHV conditions. For non-specific and quick turnaround applications, we offer a simple package design consisting of an all molybdenum  can with a resistive heater 'potted' into it. For cathode applications, a porous tungsten matrix, making up the top, holds the oxides that allow thermionic emission. Some applications benefit from thin molybdenum or molyrhenium sleeves into which the button heater fits. The sleeves provide thermal isolation as well as thermal shielding. Sleeves of any length with or without holes and/or slots are available. When the application demands, Lesker can mount sleeves onto base flanges including mounting holes or weld flanges. Also offered is a cathode, called a spiral heater, for ion lasers. Available in any size, number of turns and leg configuration, spiral heaters offer high-emission currents at a low cost where beam focusing is not critical.
Epicentre Heater Stages
The Lesker EpiCentre is a combined wafer heater and rotational stage designed for critical thin film deposition, wafer processing, substrate modifi- cation, surface science and MBE processes. The modular construction lets the user combine exactly  the components to match the desired requirements for: substrate rotation, automatic substrate removal, axial positioning of the substrate, and substrate temperature. EpiCentres, bakeable to 250ºC, can accept substrate biasing. Their minimum outgassing qualities make them compatible for UHV, high vacuum and reactive gas environments. The standard heater element for each EpiCentre is made from pyrolytic graphite (pyrolytic silicon carbide, or pyrolytic boron-nitride coated graphite available on request). It has a meander design with slotted resistive material (along chords of a circle) to give a long, uniform cross-section track. This efficient, black-bodied heater rests in a refractory metal reflector assembly giving consistent high-temperature heating with exceptional temperature uniformity across the wafer or substrate. The excellent thermal coupling between the heater element and the wafer, positioned close to the element surface in its support cradle, allows the element to run at considerably lower surface temperatures than a metal heater while able to raise the wafer temperature to 1,200ºC. The refractory metal enclosure and insulator-free mounting of the heater module make this design exceptionally clean with little particle generation. Heater modules of various sizes accommodate diameters from 25mm to 300mm.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contacts: Steve Cheesman
Tel: 1-412-387-9200 or 1-800-245-1656
Cryostats and Cryo Chambers
MTM provides cryogenic equipment in support of basic energy research, high-energy physics and nuclear physics facilities that explore the fundamentals of matter. MTM also provides cryogenic equipment to OEM’s for industrial applications. Cryogenic  products include custom cryogenic systems, cryostats, custom Dewars, helium refrigerator/liquefier equipment, coil wound and custom heat exchangers and cryogenic transfer lines. Custom designed to a performance specification or build-to-print, MTM will provide the cryogenic products to meet or exceed your needs. Products include custom cryostats and cryogenic storage Dewar’s, cold box fabrication, coil wound heat exchangers, vacuum chambers for all applications, including UHV, ASME pressure vessels, precision machining of parts and welded assemblies, as well as custom fabrication applications, and abrasive water jet cutting services.
Meyer Tool & Manufacturing, Inc.
Oak Lawn, IL
Tel: 1-708-425-9080
HPS Series 46 Heaters
The MKS Instruments HPS Products’ Series 46 heaters offer tighter temperature control, enabled by a microprocessor-controlled thermocouple. Reliability of the heater control system is improved by a no-arc relay circuit with an improved design of  thermal fuse, eliminating failures that could be caused by transient thermal spikes. Enhanced heater safety means the outside temperature of heater (45-65°C), is safe to touch. The heaters are UL listed and CE tested and marked for both electrical and ther- mal safety and passes the SEMI S9-95 strain relief test of 35 pounds. Greater thermal performance results in reduced power consumption and improved temperature uniformity while preventing cold zones. The patented design retains heat and improves thermal safety. The heaters may be used in forelines or exhaust lines. LEDs are sued on the local controller to confirm that heater is operating properly. A low temperature alert (LTA) option provides remote warning when heater is cold. The series 46 heater jackets are for stainless steel tubing. The heater design provides improved temperature control and uniformity. The preset temperature setpoint is microprocessor controlled through an integral electronic controller within the power cord. This new control method allows users to heat longer sections of tubing with fewer heaters.
HPS Series 48 Heaters
The MKS Instruments HPS Products’ Series 48 heaters are designed for safety, flexibility, power conservation, and advanced communications. The new design provides greater temperature control, improved thermal uniformity, increased performance, and  further decreases system downtime. The heaters are UL listed and CE marked for thermal and electrical safety. The heaters’ molded shapes conform to the tubing, minimizing gaps and subsequent heat loss. Using a patented process, silicone foam insulation is bonded to the outside of a reinforced silicone heater mat, resulting in external temperatures that are safe for human contact and meet OSHA safety requirements. The Series 48 heaters feature an Integrated Temperature Controller that provides unsurpassed thermal control. The controller has three optional plug and play display and communications modules that provide a user-friendly interface for adjusting control parameters. The controller features two microprocessor controlled relays, a safety relay for over-temperature protection and a no-arc relay for power switching. The high-limit safety circuitry eliminates the need for a thermal fuse, thereby eliminating the need for heater replacement due to a single over-temperature event. This significantly reduces downtime potential and the need to stock replacement heaters.
MKS Instruments, Inc.
Andover, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-645-5500 (worldwide)
E-mail: mks@mksinst.com
Models 3300 and 3500 Point-of-Use (POU)Thermoelectric Temperature Control for Plasma Etch Chiller
Two important considerations for selecting temperature control systems for plasma etch are the ability to respond to changes in wafer chuck temperatures in real time and low cost of ownership. Dynamic temperature control lets etch engineers control  the temperature of the process fluid to the wafer chuck at a level of ~0.1º C, which is essential at < 130nm technology nodes. The ability to synchronize the process chamber cathode/electrode/ anode temperature in real time without temperature drift is essential to reducing first wafer effects and improving lot-to lot CD uniformity. Noah Precision pioneered the first dynamic temperature control chillers by inte- grating thermoelectric devices into point-of-use chillers. The chillers have been qualified on Lam Research, Tel and Applied Materials etch tools giving Noah one of the largest installed base of chillers for semiconductor applications, incorporating thermoelectric devices. The POU 3300 (-15°C to 90°C) and POU 3500 (-20°C to 90°C) are available dynamic temperature control chillers. The Noah POU system achieves savings in power consumption, perfluorinated fluid usage, preventive maintenance and space. Other advantages include advanced temperature control features for direct chuck control and programmable temperature control that provides real-time temperature control without temperature drift and improves wafer-to-wafer and lot-to-lot CD bias uniformity. Reliable operation improves tool uptime and reduces productivity losses due to unscheduled down time and power consumption is reduced by up to 80% versus refrigerant chillers. Its smallest footprint in the industry enables sub-floor tile mount capability; multi-platform interfacing capability and uses only one gallon of perfluorinated coolant is required per loop.
Noah Precision, LLC
Vancouver, WA
Tel: 1-360-993-1395
Helium Refrigerators
PHPK offers standard equipment and systems for the supply of refrigeration and/or liquefaction of Helium and its distribution. These standardized packages can supply refrigeration from 60K to 4.5K across a wide load range. Standard units with high  thermal efficiencies and reliability are available from 3 liters/h through 16 liters/h without the need of LN2. Larger capacities can be achieved with LN2 precooling. Cold compression equipment for test applications requiring lower temperatures is also available. PHPK designs all units for remote monitoring and automatic control. PHPK standard products include vacuum jacketed piping, CVI TorrMaster® Cryopumps/Cryocoolers (from 8 to 48 inches), cryogenic globe valves ( 1/2-inch OD tube size through 14-inch NPS pipe size), and a series of standard bayonet connectors, seal-off valves, and numerous other products and equipment suitable for the transport and control of cryogenic fluids through the 4K range. This line of standard products is incorporated into custom engineered and turnkey systems as well as being sold as stand-alone products. PHPK manufactures vessels, vacuum chambers, compressor systems, helium refrigerators and other major engineered systems.
PHPK Technologies
Columbus, OH
Tel: 1-614-486-4750
Cryo Cooler To Cool Ge Detectors
Ricor Cryogenic & Vacuum Systems’ cryogenic product is specifically designed for the application of Ge detector cooling in the homeland security market place. It uses the K535 Stirling Cryo Cooler derivative, specifically designed for harsh  stationary outdoors operating condition. As countries awareness of the problem of illegal nuclear material trafficking is increasing, the need for a reliable "bullet proof" system is clear. Out of the available detection technologies, Ge detectors can detect nuclear material precisely, whether it is hidden or masked behind adsorbing materials. These detectors, in order to distinguish between the signal to noise ratio (small band gap) needed to be cooled to cryogenic temperature. The requirement for operation in outdoor condition dictates the utilization of long life and powerful cooler. Ricor K-535, being small compact and efficient, is targeted at this application. The cooler is available with cooling water or fans and fins that allow flexible system design. In a separate project targeting the exact same market, Ricor has utilized its rotary high power Stirling cooler, for nuclear material hand held detector. This type of de- tector, while maintaining the preciseness of the stationary unit, is compact and light and designed to be hand carried.
RICOR - Cryogenic & Vacuum Systems
En Harod Ihud, Israel
Tel: 972-4-6530800
ThermoCube 300 or 400-Watt Thermoelectric Recirculating Chiller
Solid State Cooling Systems’ ThermoCube 300 or 400W thermoelectric recirculating chillers are a compact 1 ft3 and can run at a whisper-quiet 49 dBA. Because electrons transfer heat, the ThermoCube responds instantaneously  to changes in load. The digital PID temperature controller holds to ±0.05°C, even near ambient. ThermoCube is also energy-efficient, as it was designed to operate in the most energy-efficient range of the core thermoelectric modules. The variable voltage power supply only provides as much power to the modules as is required to meet a setpoint, so ThermoCube only draws as much power as needed. When equipped with the optional smooth-flow gear or centrifugal pumps, it is also virtually vibration-free. The ThermoCube chiller is used for cooling analytical and laboratory equipment, small condensers, mobile equipment, electron microscopes, and lasers. The ThermoCube will maintain • 0°C oil trap temperatures eliminating the need for liquid nitrogen cold traps for a variety of vacuum applications. Solid State Cooling Systems designs and manufactures compact, reliable, energy-saving temperaturecontrol systems. The key product area is thermoelectric temperature control systems, including chillers and heat exchangers. Also available are patented cold plates and power supplies optimized to power the thermoelectric products.
Solid State Cooling Systems
Wappingers Falls, NY
Tel: 1-845-296-1300
Marathon® CP Series Cryopumps
Marathon® CP Series Cryopumps from SHI Cryogenics Group are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools. Manufacturers  of semiconductor devices, flat panel displays, test equipment, solar manufacturing and a wide variety of coating and thermal vacuum systems appreciate the efficiency, reliability and robustness of Marathon CP Cryopumps. A variety of standard and low profile enclosures, ANSI, ISO and CF flanges, as well as manual and fully automatic features, ensure that users have modularity and flexibility when designing their systems. The full line ranges from 8 in. (200mm) to 20 in. (500mm). All cryopumps are driven by highly-efficient and reliable helium compressors, which boast an industry leading 30,000 hour maintenance interval. In addition, the optional Marathon Cryopump Controller enables fully automatic operation of the cryopump. The result is greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user’s process. All Marathon CP Series Cryopumps are supported by a worldwide sales and support network. They can be readily maintained without breaking vacuum or removing the cryopump from the chamber for re- turn or replacement. As a result, serviceability maximizes production uptime and lowers the total cost of ownership.
Sumitomo (SHI) Cryogenics of America Inc.
Allentown, PA
www.shicryogenics.com
Tel: 1-610-791-6700
E-mail: sales@shicryogenics.com
Brayton-Cycle Cryocoolers
Technology Applications, Inc. (TAI) specializes in advanced technology development of cryogenic and thermal management systems for DOD/NASA agencies, aerospace prime contractors, and commercial firms. Expertise and specialty products include cryocooler  integration and interfaces involving vibration isolation, remote (distributed) cooling, high-conductance thermal straps; thermal management of electronic components and enclosures; lightweight insulation systems and high-performance Dewars; and vapor compression cycle refrigeration. TAI offers unique capabilities for prototype development and custom manufacturing. Currently, the company is developing products in the areas of microsphere insulation, thermal acoustic panels, gas liquefaction systems, and portable hydration cooler units.
Technology Applications, Inc. (TAI)
Boulder, CO
Tel: 1-303-443-2262 Ext. 125
Single and Multi-Channel Cooling Systems
Tek-Temp Instruments’recirculating chillers are quality products in the heat transfer equipment field. The first models, the MM-1500 and MM-2500, were readily accepted as world-class recirculating chillers. Tek-Temp Inc. makes precision temperature  control liquid chillers, water chillers and heating/cooling systems. Equipment manufacturing abilities include chillers for medical cooling, semiconductor coolers, process fluid, precision liquid cooling, recirculating air cooling, production coolers/ chillers and industrial process systems. Additionally Tek-Temp manufactures laser chillers, fiber chillers, and optic refrigerated chillers. Tek-Temp specializes in heat exchangers, precision coolers, precision chillers, TCU, computerized advanced temperature control, heat exchangers, prototypes and OEM applications. Tek-Temp handles heating and cooling for medical, industrial, multi loop, independent and control, channel fab, plus; clean room, equipment, RS-232, GPIB, Plasma Etch, CVD, PVD, air, cooled, water, evaporator, condenser type exchangers and devices.
Tek-Temp Instruments, Inc.
Croydon, PA
Tel: 1-215-788-5528
Improved Water Vapor Cryotraps
Telemark Cryogenics supplies improved water vapor cryotraps in capacities from 1000 to 3500 watts of heat load and 50,000 to 220,000 liters per second of vapor trapping. Fully digitized for easy integration into a broad range of system masters/controllers  with a wide array of user adjustable controls built in as standard. It is available in single and dual circuit models and CE mark options. CFC-free blends are used to comply with all international environmental standards. It has a smaller footprint and improved access and usability.
Telemark Cryogenics
Battle Ground, WA
www.telemark.com
Tel: 1-630-723-5360
E-mail: sales@telemark.com
4K Cryocooler
The ULVAC closed cycle cryocooler replaces the need for liquid helium in many laboratory sample, cryostat and superconducting magnet cooling applications. This closed-cycle system offers cooling powers of 0.3W @ 4.2K on the 2nd stage, and 9W@65K on the 1st stage; while drawing only 1.7kW of power at 60Hz. Since 1981, ULVAC has been making highly reliable Gifford-McMahon, cryocoolers for use in their cryopump product line. That wealth of ex¬perience has been leveraged to develop this highly reliable, high performance UR4K03 4K cryocooler. This compact unit features excellent thermal stability, good refrigeration output power, and features a low input power compressor with optional air-cooled compressor.
1W at 4K Cryocooler for Superconducting Magnet Applications
The new ULVAC UR4K10 cryocooler has increased cooling capacity making it well suited for medical MRI, NMR and other large superconducting magnet cooling applications. This compact unit eliminates the need for liquid helium and features excellent thermal  stability. It delivers a first stage refrigeration capacity of 20W at 40K with a second stage capacity of 1.0 W at 4.2K, and an ultimate second stage temperature of 3.0K. For 30 years ULVAC has manufactured thousands of cryopump systems for demanding requirements in the semiconductor, LCD and related vacuum industries. This experience has enabled ULVAC to develop highly reliable and powerful two-stage Gifford-McMahon refrigerators for today’s 4K cooling market.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@us.ulvac.com
© Copyright 2011-10-18 by Terrence Thompson
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