Vacuum Pump Equipment Supplier

Product Descriptions

large conductance for faster pump down time, grease lubricated bearings - allowing the pumps to be operated in any orientation, low rotational speed - providing increased resistance to air inrush and are field maintainable! Pumps are available in pumping speeds ranging from 80 to 900 liters/second for nitrogen, standard, corrosive and high-pressure corrosive versions.

 

 

 

Maglev Hybrid Turbomolecular Pumps

 

The Adixen by Pfeiffer Vacuum brand ATH-M series of Alcatel vacuum pumps are magnetically levitated. There is no mechanical contact; no friction and no wear resulting in no scheduled bearing maintenance and reduced cost of ownership. The pumps are actively controlled, real time, in five axes through an automatic balancing system. Additionally, the pumps are designed for high throughput at high inlet pressure, are resistant against powder and provide a purge to prevent deposition build-up inside the pumps. No external batteries are required for these pumps because the rotor acts as a generator in the event of a power failure. Pumps are available in pumping speeds ranging from 500 to 3200 liters/second in heated or non-heated versions. Controller options include rack or pump mounted versions with discrete I/0, RS232/485, Profibus DP or DeviceNet communicati

 

 

Pascal Series Rotary Vane Pumps

 

The Adixen by Pfeiffer Vacuum Pascal series rotary vane pumps are known for reliability and ease of field maintainability. The Pascal series consists of five versions to meet specific application needs. SD series for general application, I series address-C1 designed for high resistance to corrosive chemistries, C2 series for most aggressive applications such as those found in the semiconductor market and the H1 series (hermetic sealed) for applications which need a high level tightness (exotic or rare gases, recirculation). All versions use a universal motor for worldwide installation. Pumping speeds range from 5m3/hr to 100 m3/hr. Pumps are easily maintainable and easy to rebuild in the field.

 

Adixen by Pfeiffer Vacuum

Hingham, MA

www.adixen-usa.com

Tel. 1-781-331-4200

E-mail:  inquiry@adixen-usa.com

 

Turbo-V 750 and 850 TwisTorr Turbomolecular Pumps

 

The Agilent Technologies Turbo-V 750 TwisTorr pump offers the highest pumping speeds in its category for all gases. Utilizing leading-edge Twistorr technology, the pump achieves the highest compression ratios for light gases in a commercially available turbo molecular pump. Yet despite this exceptional pump performance, average power consumption by this new drag section design is reduced by at least 20% compared with previous designs.

 

 

 

IDP-3 Dry Scroll Vacuum Pump

 

The Agilent Technologies IDP-3 is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m and a very low base pressure of less than 250 milliTorr, the IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package.

 

 

 

 

MS-Series High Capacity Mono Stage Rotary Vane Pumps

 

The Agilent Technologies MS-Series Rotary Vane Pumps deliver smooth continuous operation from atmosphere down to base pressure and high pumping speed, even at low pressure. MS-Series Pumps are robust, easy to install, and are ideal for use in many different applications. Because of their compact size, MS-Series Pumps can easily replace other pumps of equivalent pumping speed. A highly efficient oil circulation system ensures perfect lubrication and sealing in all critical areas of the pump. MS-Series Pumps produce lower noise and vibration than other pumps of similar size, and offer a robust, reliable solution for your industrial vacuum needs.

 

Agilent Technologies

Vacuum Products Division Lexington, MA

www.agilent.com/chem/vacuum

Contact: Walter Stevenson Palmer (Steve), Manager, Marketing Communications, Americas

Tel: 1-781-860-5426 or 1-800-882-7426 Ext. 5426

E-mail:  steve.palmer@agilent.com

 

Three Applications with One Vacuum Pump Through VACUU•LAN® Mini-Network

 

The VACUUBRAND® VACUU•LAN® Mini-Network provides distribution of vacuum from a single diaphragm vacuum pump (not included) to three vacuum ports with independent flow control. Integrated check valves isolate applications from each other to protect them from line fluctuations and resultant crosscontamination. Derived from VACUUBRAND’s innovative VACUU•LAN® custom laboratory vacuum installations, the Mini-Network integrates three VCL01 flow control ports into a single bar suitable for easy installation into existing laboratories. The flow path is made from fluoropolymers and other corrosion resistant materials, making it suitable for use in most standard laboratory applications. The Mini-Network comes with installed support rods for easy mounting on laboratory support frames or stands; alternately it can be wall mounted. Vacuum can be sup- plied via a quiet, oil-free VACUUBRAND® chemistry diaphragm vacuum pump, or any other suitably sized diaphragm pump.

 

BrandTech Scientific Inc.

Essex, CT

www.brandtech.com

Tel: 1-860-767-2562

E-mail:  info@brandtech.com

 

On-Board® IS Cryopump Systems

 

Brooks’ intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.

On-Board IS cryopumps deliver highest uptime, best productivity, and lowest overall cost of ownership of any cryopump systems available today, backed by Brooks’highly responsive global service and support network. Key features include a patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance, delivering exceptional process consistency and the quickest regenerations in single and multi-pump configurations. Low consumption of energy and cooling water ensure no compromise in vacuum performance.

 

 

Cryo-Torr® Cryopumps

 

Brooks’ Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. For added flexibility, you can add your own customized controls and supporting peripherals to meet your specific application needs. Providing low operating costs and fast, easy maintenance, these cryopumps deliver high reliability and bottomline performance backed by responsive service you can count on.

 

Brooks Automation, Inc.

Chelmsford, MA

www.brooks.comContact: Barbara Culhane, Corporate Marketing Manager

Tel: 1-978-262-2400

E-mail:  barbara.culhane@brooks.com

 

 

Dolphin LX B Series Vacuum Pumps

 

Busch’s new Dolphin LX B series liquid ring vacuum pumps are built at our US manufacturing facility in Virginia Beach, VA. Offering improved pumping speeds at deeper vacuum levels, these high-efficiency, single-stage pumps provide end vacuum levels comparable to most two-stage designs. All Dolphin LX series vacuum pumps are of a compact, motor-mounted design – ideal for a wide range of wet or corrosive applications. The standard construction of each includes cast iron housing, a 316 stainless steel impeller, replaceable port plate and mechanical seal. Requiring minimal maintenance, these rugged pumps are an economical alternative to traditional close-coupled, separate-drive or base-mounted liquid ring configurations.

 

 

 

 

COBRA BOB BA/BC Model Vacuum Pumps

 

The Busch COBRA BOB single-stage vacuum pumps use dry screw technology to maximize product uptime and reduce energy consumption. COBRA BOB vacuum pumps have fewer moving parts, longer service intervals and lower nitrogen consumption in comparison to multi-stage pumps. COBRA BOB pumps provide vacuum down to 0.00075 Torr and pumping speeds up to 529 ACFM. They will operate at any pressure from atmospheric down to ultimate pressure. Air-cooled and canned water-cooled models are available. For higher pumping speeds and lower ultimate pressure, Busch offers COBRA/booster systems along with many other custom designed vacuum systems. Standard Equipment on most models includes full PLC control, tool interface box, full enclosure with casters, exhaust pressure switch, nitrogen regulating valve, body temperature sensor, SS discharge silencer and inlet flange adapter, and more.

 

 

Fossa Scroll Vacuum Pumps

 

The Busch Fossa vacuum pumps feature a non-contacting scroll design that reaches high vacuum and suction capacity with lower power consumption requirements. With an oil-free, simple design, Fossa pumps are reliable, efficient and relatively maintenance free. Fossa scroll pumps provide vacuum down to 0.01 Torr and pumping speeds up to 21 CFM. In this simple scroll design, a volume of gas is trapped between the walls and moving from the periphery of the spiral to the center while reducing in volume. The exhaust port of the scroll pump is located in the center of the spiral. Busch Fossa15 is the newest model of the series and boasts additional advantages such as increased suction capacity at lowered power consumption, completely dry design which eliminates contamination risk, tip seal change is fast and easy and transportation is easy due to the light weight and compact design.

 

 

 

Busch USA

Virginia Beach, VA

www.buschusa.comTel: 1-757-63-7800

E-mail:  marketing@buschusa.com

 

 

Turbo-60G Oil-Free Pump Package

 

The DRIVAC Inc. Turbo 60G is a compact, air-cooled, portable turbopump package. This fully integrated 35lb. package includes a 60 L/sec. hybrid turbomolecular pump, an oil-free backing pump, automatic valving, and a control module. Operation is automatic and interlocked, and the TURBO 60E is not adversely affected by operator error or power failure. Vacuum in the user's system remains undisturbed in power failure situations. The footprint is 8” × 11”. Modular construction permits direct mounting of the turbopump to the system flange, and remote mounting of the control module. The rugged, industrialgrade oil-free backing pump has a mean-time-between-failure rating of 25,000 hours for the rotating mechanisms. A wide selection of standard inlet flanges is available.The hybrid turbopump can be directly mounted onto the user's system flange. This results in substantially increasing the net high vacuum pumping speed at the system inlet. The exhaust pressure of the hybrid pump is in the viscous flow range. This permits remote mounting of the backing pump without increasing pumpdown time. The oil-free backing pump used in all Hovac packages eliminates the requirement of venting the turbopump in power-fail situations. When the power goes off, the normally-closed solenoid valve isolates the turbopump from the backing pump. When power resumes, a time-delay relay keeps this valve closed until vacuum is re-established in the foreline. The Vacuum Monitor sensor and circuit incorporated into the TURBO 60 package automatically controls operation of the hybrid turbopump. This prevents extended operation of the turbopump at high pressures. This helps to maintain a lower operating temperature of the turbopump thereby enhancing long-term reliability.

 

DRIVAC Inc.

Furlong, PA

www.drivac.com

Contact: Dave Hoke, President

Tel: 1-215-345-7044

E-mail:  drivac@verizon.net

 

New and Remanufactured Vacuum Pumps

 

Duniway Stockroom Corporation provides high-quality ion, mechanical, diffusion and turbo vacuum pumps, both new and used, at reasonable prices. We take pride in providing comprehensive information about our products and their applications for our customers. This business model has supported growth since our company was founded. Our knowledgeable customer service representatives provide informed assistance to help you meet your requirements. We have a large stock of new vacuum pumps, and in most cases, items are shipped the same day as ordered. Our wide access to used vacuum equipment and rebuilding services provides an additional excellent resource for low-cost solutions.

 

Duniway Stockroom Corp.

Mountain View, CA

www.duniway.com

Tel: 1-650-969-8811

E-mail:  info@duniway.com

 

 

EV-M Series Dry Vacuum Pumps

 

Ebara’s EV-M Series Dry Vacuum Pump designed for medium to harsh process applications with models ranging from 70~2,830 CFM pumping speed. EV-M Series will contribute to product throughput with its stable pumping operation for Middle Harsh & Harsh applications and provides longer-term maintenance cycle. EV-M Series power consumption is the lowest in the industry with up to 50% reduction in power compared to similar harsh application pump. Optimization of the rotor arrangement achieves both of reduction of power consumption and high temperature gas condition for sublimating process gases. High torque motors generate torque as powerful as manually rotated by hand for pump start up. The EV-M resists corrosion with Ni-Resist rotors and casing materials.

 

 

 

 

EBARA Technologies, Inc.

Sacramento, CA

www.ebaratech.com

Tel: 1-916-920-5451

E-mail:  jmakin@ebaratech.com

 

 

New nXDS Range of Dry Scroll Vacuum Pumps

 

Edwards has launched a new range of dry scroll vacuum pumps which give exceptional performance in scientific, laboratory, research and development applications, and sets a high standard for dry pumping. The novel nXDS pump is more reliable and requires less maintenance than alternative pumps, which results in less downtime and a lower cost of ownership. It also has a lower environmental impact, enabling users to reduce their carbon footprint. With exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features, the nXDS is the best performing pump in its class. It is an environmentally-friendly oil-free vacuum pump that has no lubricants in the vacuum. As a dry vacuum pump, it has many advantages to oil-sealed pumps as there is no need for regular oil changes and users can benefit from low maintenance. The advanced scroll design and tip-seal technology mean the pumps have a longer lifetime compared to other products. The tip seals may last up to five years, which significantly increases time in service and lowers cost of ownership. The pumps are also easy to service which results in minimal downtime and makes them economical to run. Tip seals can be replaced in less than 10 minutes in the field using basic workshop tools. The efficient pumps feature intelligent control functions. Control modes include serial, USB, remote parallel and analogue as well as manual operation with simple up/down buttons. Full serial communications mode provides feedback about the state of the pump, enabling scientists to optimise their process and schedule routine maintenance conveniently. It also assists with preventative maintenance regimes, as the nXDS pumps indicates when service is needed via a light indicator on the control panel. The pump is easy to install and run. It is a simple ‘fit and forget’ pump which provides excellent performance for many years. It has low acoustic noise of only 52dB(A).

 

 

T-Station 75 Small Compact Fully Automatic Turbopumping System

 

The Edwards T-Station is a small compact fully automatic pumping system which is suitable for a wide range of vacuum applications. The T-Station can be supplied with either an XDD1 oil free diaphragm pump or an E2M1.5 rotary vane pump, both system variants use an EXT75DX turbomolecular pump. The TStation is controlled by an easy to use touch pad control module. A single gauge input included can be connected to a range of Edwards active gauges allowing for pressure measurement and or control management of the turbomolecular pump. The compact size of the T-Station is ideal for use on bench-tops or suitable mobile platforms. The open system configuration allows easy maintenance of the main pump components. 1.2.2 General description of the T-Station major components The T-Station 75 is Edwards’s new entry level Turbopumping system. It combines our proven EXT75DX with a choice of either an oil sealed E2M1.5 backing pump or an XDD1 diaphragm pump where a totally dry solution is desired.

The T-Station comes with our new TAG (Turbo and Active Gauge) controller fitted as standard which enables single button start/stop of the system, the ability to control one of our Active Gauges*, vent valve control*, and delayed start to either time or pressure if a gauge is fitted making the T-Station ideal for general laboratory needs. Note: * Gauges and TAV5 vent valve must be purchased separately.

 

 

Two High Performing GXS Vacuum Pumps for Industrial Applications

 

Edwards has extended its range of GXS dry pumps to meet the demands of high-volume industrial OEMs and end users. The new GXS450 and GXS750 pumps and combinations feature innovative screw technology and a high efficiency drive to deliver high vacuum performance. This enables users to optimize their processes and achieve a low cost of ownership and a reduced footprint. The new GXS pumps have high peak pumping speeds of up to 740m3h-1, and when combined with a booster pump can offer even higher speeds of up to 3360m3h-1, while achieving ultimate vacuum typically down to 5x10-4 mbar without purge. These high performing pumps are ideal for many applications which require rapid pumping of large gas volumes, such as steel degassing and metallurgy processes, glass coating, solar coating, LED manufacture and loadlock applications for vacuum chamber evacuation, but can also maintain a low process pressure for extended periods. The pumps are an extension of the existing GXS range, which is proven to offer reliable operation in harsh applications, and the new variants feature all the same benefits as the smaller versions. Its advanced temperature control, low maintenance and long service intervals of up to five years, make the GXS the most robust and economical vacuum pump for industrial applications. The GXS has a long pump service life and is virtually maintenance free, even in harsh applications. The pump mechanism can be cleaned easily using the high flow purge and solvent flush accessory, which removes the need to partially strip the pump. This also decreases costly downtime associated with using alternative products that require manual cleaning.

 

Edwards Vacuum

Sanborn, NY

www.edwardsvacuum.com

Tel: 1-866-484-5218

E-mail:  info@edwardsvacuum.com

 

Rotary Vane Pumps

 

With a large selection of rotary vane pumps, the Kurt J. Lesker Company® can help you fill almost any need. While the trend towards dry pumps continues, oil sealed rotary vane pumps still remain the true workhorses of the industry in the rough and medium vacuum ranges. With many pumps and pump parts in stock and ready for same day shipment, the Kurt J. Lesker Company can meet the need for single or dual stage rotary vane pumps ranging from 0.5 CFM to over 700 CFM. We also offer chemical series pumps and mechanical booster systems for difficult applications and we carry all the major brands including Adixen, Edwards, Pfeiffer, Varian, Leybold, Welch, and ULVAC.

 

 

 

Vacuum Services Division

 

The Kurt J. Lesker Company’s Vacuum Services Division can help make servicing your current pumps quick and easy. The Kurt J. Lesker Company has knowledgeable OEM trained technicians, an expansive spare parts inventory, and turnaround times of less than a week for most pumps. KJLC® can service a wide variety of pumps including rotary vanes, rotary piston, roots blowers, turbo pumps, diffusion pumps, and diaphragm pumps. We can even make shipping easy by coordinating pump pick up and providing you with special crates for most pumps under 25 CFM. We also offer a large inventory of remanufactured pumps that have been fully serviced and come with a full 12-month warranty. Please visit our website for an up-to-date listing of all our remanufactured pumps.

 

 

Magnetically Levitated Turbomolecular Pumps

 

The Kurt J. Lesker Company offers a full line of magnetically levitated turbomolecular pumps from Shimadzu. Magnetic bearing turbo pumps are ideal for many situations and are used widely in both industry and R&D, from semiconductor to SEMs. Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011 for N2; and for some versions extends the fore-vacuum tolerance up to 30 Torr. Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry. Plus, they can be surprisingly affordable, even when compared to standard bearing turbo pumps.

 

 

 

 

 

Kurt J. Lesker Company

Pittsburgh, PA

www.lesker.com

Contact: Brandon Fridley, Product Manager

Tel: 1-800.245.1656 or 1-412-387- 9101

E-mail:  pumps@lesker.com or vacuumservices@lesker.com

 

 

Dry Compressing Screw Vacuum Pumps

 

 

The new DRYVAC® series dry-compression vacuum pumps by Oerlikon Leybold Vacuum have been designed to meet the special needs of applications in Industrial Coatings, Photovoltaic Production, Heat Treatments and Metallurgy and other Process Industry applications. DRYVAC has evolved from one design platform and is comprised of models 450, 650, 1200 and 5000. Multiple pumping system combinations are also possible for gaining increased pumping speeds and vacuum levels by incorporating the RUVAC® line of vacuum boosters. DRYVAC features include improvements in leak tightness, energy efficiency and physical stature over competitive brands. Single pumps can achieve 7.5 × 10-3 torr vacuum and over 2,900 cfm nominal displacement. The DRYVAC line is an environmentally friendly alternative to oil-sealed rotary piston and vane pump style vacuum pumps. With no lubricating oils contained in the pumps’ compression stage, DRYVAC offers an improved operating environment with no oil emissions, reduced maintenance, with less down-time and disposal steps resulting in lower operating costs for our customers. For more information, visit www.leyboldchampion.com.

 

 

New TURBOVAC MAGiNTEGRA® Turbo-Molecular Pump

 

The new TURBOVAC MAGiNTEGRA® turbo-molecular pump by Oerlikon Leybold Vacuum offers the highest pumping speeds and gas throughputs in their class, providing faster pump downs and improved cycle times. The extremely robust and reliable MAGiNTEGRA is maintenance-free in most industrial processes such as display, solar, and coating as well as many R&D applications. MAGiNTEGRA pumps are resistant to process particles and deposits and feature a high degree of tolerance for process-induced “pressure shocks”. With up to 80,000 hours before any service is required, the MAGiNTEGRA can significantly reduce downtime. Safety features such as IP 54 class protection, self-control functionality, and over-speed protection are included with MAGiNTEGRA. In the case of power disruption, the intelligent controls automatically switch the pump over to a regenerative cycle where the rotor becomes a generator allowing the pump to slowly spin down until power is restored. The pump features a lighter rotor design for a reduction in rotational energy and overall energy consumption. The MAGiNTEGRA maglev design ensures the highest degree of protection against hydrocarbons since no oil or grease lubricated bearings are used.

 

 

 

Oerlikon Leybold Vacuum USA

Export, PA

www.oerlikon.com/leyboldvacuum

Contact: Brett Rock

Tel: 1-724-493-2654

E-mail:  brett.rock@oerlikon.com

 

 

HiPace M Magnetically Levitated Turbopumps

 

The Pfeiffer Vacuum HiPace M series of high performance magnetically levitated turbopumps (300 l/s, 700 l/s and 800 l/s) achieve high pumping speeds and high compression ratios for all gases. These pumps are optimized to run in all orientations with a low vibration signature. An intrinsically low dynamic magnetic field does not interfere with even the most sensitive equipment, making them ideal for use in lab applications. An advanced rotor design provides unlimited rotor service life and dependable operation. HiPace M turbopumps are rated Protection Class IP54 for use in harsh industrial environments. Applications include: analytical, industrial coatings, semiconductor fabrication, as well as a variety of uses in R&D and industry.

 

 

Large HiPace Turbopumps for High Performance and Reliability

 

Pfeiffer Vacuum HiPace turbopumps are available in pumping speeds from 1000 to 2000 l/s. They feature a new rotor design that reduces run-up time by 50% and provides high gas throughput for light (H2, He) and heavy gases (Ar, CF4). The use of aluminum housing and innovative materials makes this turbopump 40% lighter in weight and doubles the service life to five years between bearing changes. Integrated drive electronics reduces the need for bulky and costly cabling. The advanced rotor design and precise sensor technology of HiPace turbopumps offer the highest level of safety in the market, including IP54 and SEMI S2 protection classes. HiPace is available in both standard and corrosive models, making them ideal for use in semiconductor applications where particulate contamination, high gas loads and corrosive gases are common. In addition, HiPace is suitable for photovoltaic coating, industrial applications such as brazing furnaces, general sputter coating, and coating of architectural glass and ophthalmic lenses.

 

 

 

 

PentaLine™ —The New Shape In Rotary Vane Pumps

 

Pfeiffer Vacuum PentaLine• rotary vane pumps, with a new optimized drive system, provides cost effective, environmentally friendly vacuum, for a wide range of applications in the low and medium vacuum range down to 10-3 mbar. Available in pumping speeds up to 35 m3/h, PentaLine• is hermetically sealed for leak-free vacuum, and provides compatible voltage for worldwide use. It’s standby operating mode provides a power savings that can reduce operating costs up to 50% and assures a longer service life. PentaLine• rotary vane pumps run noiselessly with minimum vibration assuring a cooler, quieter work environment. Contact:  pentaline@pfeiffer-vacuum.com

 

Pfeiffer Vacuum, Inc.

Nashua, NH

www.pfeiffer-vacuum.com

Tel: 1-603-578-6500 or 1-800-248-8254

E-mail:  contact@pfeiffer-vacuum.com or  info@pfeiffer-vacuum.de

 

 

Marathon® CP Cryopumps

 

The Sumitomo (SHI) Cryogenics Marathon® CP Cryopumps are an expanding product line available in multiple flange styles, sizes and configurations. With a powerful refrigerator, Marathon CP typically out-performs other cryopumps of the same physical size. Its innovative design assures that users achieve the highest performance possible, while keeping it competitively priced. The CP-20 can be driven by the high-efficiency F-70 compressor. Like all Freedom® series compressors, the F-70 provides refined oil and gas management to the cryopump and offers a unique 30,000-hour service interval. Additionally, the optional Marathon Cryopump Controller (MCC) enables fully automatic operation of the cryopump using commands from a host computer using standard cryopump protocol. The result is greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user’s process. The CP-20’s compact and robust design fits easily onto and existing systems. It can be readily maintained without breaking vacuum or removing the cryopump from the chamber for return or replacement. Like all SHI Cryogenics Group products, it is supported by a worldwide sales and support network. Its easy serviceability maximizes production uptime and lowers the total cost of ownership.

 

 

SICERA Cryopump

 

At only 0.9 kW per pump, Sumitomo (SHI) Cryogenics recently introduced the SICERA cryopump boasts extremely low energy consumption compared with other vacuum products currently available for semiconductor, flat panel display and related processing. The breakthrough multipump system allows up to six 8-inch pumps to run on a single compressor without performance degradation, making it ideal for high-volume semiconductor wafer manufacturing. The complete SICERA cryopump system includes a compressor and remote controller, which have been thoroughly tested to withstand the most demanding vacuum applications. Through continuous control of both the cryocooler and compressor, SHI Cryogenics Group is able to offer a reliable cryopump system with solid performance and temperature and vacuum stability.

 

Sumitomo (SHI) Cryogenics of America, Inc.

Allentown, PA

www.shicryogenics.com

Tel: 1-610-791-6700

E-mail:  sales@shicryogenics.com

 

 

Large Cryo Pumps

 

Since 1981, ULVAC Cryogenics Inc., through a joint venture with Helix Technologies, has been manufacturing cryogenic pumping systems in Japan for the Asian markets. These pumps are now being made available in the North America with support from ULVAC’s network of service locations throughout the U.S., Europe and Asia. The large cryopumps are available in 20, 22 and 30-inch models. ULVAC cryo pumps deliver high reliability, high capacity, high refrigeration power and quick regeneration making them well suited for ion implant, sputtering, evaporation and industrial coatings. For demanding applications, ULVAC offers specialty cryopumps that include UHV, low vibration, corrosion resistant, “flat tops” and “Super Trap”, a high-speed water vapor model.

 

 

 

VS Series Single Stage Rotary Vane Pumps

 

ULVAC’s VS Series of single stage, oil rotary vacuum pump with direct-drive motors are designed for use in a broad range of applications including leak detection, furnace and solar cell production. These lightweight compact pumps feature low noise with minimal vibration levels. The VS series is available in pumping speeds from 3000 l/min [180 m3/hr] to 4800 l/min [288 m3/hr] with an ultimate pressure of 5.3 Pa (4 × 10-2 Torr).

 

 

Turbo Molecular Pumps

 

ULVAC’s Magnetic Levitation and Digital Control Turbo Pump Series are designed for a broad range of applications including solar cell, PVD, OLED, as well as R&D and laboratory environments. The turbo molecular pump series features high speed, high reliability, energy saving performance and improved compression ratio for hydrogen. The UTM-FW series are ideal pumps for middle to hard processes with high gas loads. The UTM-FH series are ideal pumps for light to middle processes. The UTM-FW/FH Series is available in pumping speeds from 350 l/sec to 6300 l/sec.

 

 

 

 

ULVAC Technologies, Inc.

Methuen, MA

www.ulvac.com

Tel: 1-978-686-7550

E-mail:  sales@us.ulvac.com

 

 

Compact Rotary Vane Vacuum Pumps

 

VACUUBRAND® XS-series rotary vane vacuum pumps are extremely compact and light weight, with a footprint one-third that of common belt-drive vacuum pump designs, and half that of competitive direct-drive pumps. The result is a pump that occupies much less bench space in crowded labs, or machine space in OEM applications.Yet these pumps offer comparable vacuum capacity (2 × 10-3 mbar) and higher pumping speed than older designs, making them ideal for those applications that need vacuum performance that is beyond the reach of oil-free pumps. The XS-series vacuum pumps have very low power consumption and generate low levels of waste heat compared with competitive models. They run quiet with low vibration, and deliver high flow rates even at vacuum levels approaching ultimate vacuum. Internal pump surfaces are nitrogen plasma treated for chemical resistance and mechanical hardness, and internal components have been designed to reduce wearing forces, enhance performance and simplify maintenance. Innovative lubrication system extends oil change and service intervals, and protects the pumps at startup. Pumps are vacuum-tight at switch-off, protecting your application form undesired venting and oil back flow.

 

Vacuubrand, Inc.

Essex, CT

www.vacuubrand.net

Tel: 1-860-767-5341 or toll free 1-888-882-6730

E-mail:  info@vacuubrand.net

 

Model 800-28 and 200-7 Soft Start and Pressure Control for Rotary Vane Pumps

 

To minimize turbulence and particles during evacuation, you may “Soft Start” your pump down and then switch to maximum speed to give the ultimate vacuum you need. When your system pressure reaches the required vacuum, you may want to slow the pump again to perhaps 20% of capacity.

For pressure control, just determine the vacuum level that is best for your process and adjust the set point on your vacuum gauge accordingly. The pump will then run at maximum speed until that pressure is reached and will then slow its speed to maintain the vacuum you have selected. Adjust the dead band, or hysteresis, on your gauge to give the control range that you need. For roughing with either cryo or ion pumps, you can operate your mechanical pump at maximum speed, or use a Soft Start Program. When the high vacuum pump takes over, slow the mechanical pump to about 20% of capacity and keep it running slowly so it will be warmed up and ready for the next pump down cycle. Or if the high vacuum cycle is very long you may want to turn the mechanical pump off when roughing is complete. Backing of Turbo and Diffusion Pumps Use a single mechanical pump for roughing and backing for turbo or diffusion pumps. For roughing, ramp the pump speed up slowly to minimize turbulence in the chamber. After crossover slow the mechanical pump to perhaps 25% of capacity. If your foreline gauge has a process control relay an unexpected increase in pressure will switch the pump to full speed until the pressure recovers.

 

Vacuum Research Corporation

Pittsburgh, PA

www.vacuumresearch.com

Tel: 1-800-426-9340 or 1-412-261-7630

E-mail:  vrc@vacuumresearch.com

 

DRYFAST® Collegiate Model 2014 Laboratory Vacuum Pump

 

The Welch-Ilmvac DRYFAST® Collegiate Model 2014 Laboratory Vacuum Pump is well suited for harsh chemical fume applications. It is a small, lightweight, oil-free and low maintenance pump with a precision vacuum adjustment feature. He chemical resistant Collegiate Model 2014 pump is perfect for MeCl2 and other volatile solvent rotary evaporations. Achieve precise vacuum control down to 40 Torr using convenient adjustment knob. 25 lpm flow enables multi-user use for organic solvent filtrations and other routine chemistry lab operations – while enabling fume discharge to your hood. The modern, compact design weighs only 15 lbs. Applications include: rotary evaporations @ 35AC for volatile solvents; vacuum filtrations up to 3 funnels; and vacuum ovens up to 1 Cu. Ft.

 

 

 

 

Welch-Ilmvac

Niles, IL

www.welchvacuum.com

Tel: 1-847-676-8800

E-mail:  welch-ilmvac.us@gardnerdenver.com

 

New Cryogen-Free Probe Stations

 

Lake Shore Cryotronics, Inc., manufacturers of scientific sensors, instruments, and systems for precise measurement and control, introduced the new model CRX-VF and model CRX-EM-HF cryogen-free probe stations. These two new platforms add vertical and horizontal depth to Lake Shore’s growing family of closed cycle refrigerator (CCR) probe stations. The new CCR probe stations are ideal for non-destructive measurement of the electrical, magneto-transport, electro-optical, parametric, high-Z, DC, RF and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, spintronic (TMR, GMR) devices and semiconductors are the typical materials measured. The new probe stations are simple to operate and control temperature efficiently using two stage CCR cooling engines that cut ongoing usage costs by eliminating the challenges of sourcing and handling liquid cryogens. Cooling automation allows one-switch startup and unattended cool-down. The CCR probe stations provide full temperature instrumentation for accurate temperature measurement, stable control and optimized warm up for sample exchange that translates to research productivity. Depending on probe station and configuration, temperature ranges span from 8 K to 500 K, providing excellent temperature stability (10 mK to 20 mK). The Model CRX-VF and CRX-EM-HF provide field strengths of 2.5 T and 0.6 T, respectively. Sample stage vibration is limited to less than 1 micron throughout the full-scale temperature range so as not to affect measurement performance. These new cryogen-free models expand Lake Shore’s overall line of probe stations to nine distinct models. With the increasing costs of liquid helium, and the growing difficulty in obtaining it, more customers are investing in cryogen-free measurement systems. Our globally installed base of CCR probes stations is growing rapidly. CCR probe stations also simplify processes and reduce scheduling conflicts related to operating with cryogens – personnel trained in cryogen transfers and monitoring of cryogen are no longer necessary.

 

Lake Shore Cryotronics

Westerville, OH

www.lakeshore.com

Contact: Keith Ramsey, Marketing Manager

Tel: 1-614-212-1492

E-mail:  keith.ramsey@lakeshore.com or  info@lakeshore.com

 

Gas Analytical Systems

Compiled by Terrence Thompson, Contributing Editor

Product Descriptions

 

This product showcase addresses gas analytical instrumentation that is applicable in various production, R&D, and numerous other vacuum applications. Systems often require sophisticated gas analytical systems and subsystems/components including mass spectrometers, gas chromatography systems and RGAs to verify process or test integrity.

 

Leak Detector Accessories

 

A&N’s leak detector accessories provide a wide variety of helpful products for your helium mass spectrometer including: Port adapters and test port reducer kits; calibrated leaks; and helium probes and hoses. Test port adapters change the interface of your leak detector’s test port. For example, test ports with an ISO-QF25 or QF40 flange port can be converted to a 1-1/8-inch quick disconnect compression fitting. Conversely, leak detectors with a 1-1/8-inch or 2-inch quick disconnect compression fitting can be converted to any of our standard ISO-QF sizes QF16 through QF50. A&N’s test port reducer kit quickly converts a standard test port inlet to any one of ten tube sizes and back again. The ten tube sizes range between 1/8-inch and 1-inch and are designed to fit leak detectors from Veeco, Varian, VIC,Alcatel, Leybold, and DuPont. Helium calibrated leaks are used to calibrate helium mass spectrometer leak detectors and are available per NIST certified standards – MIL Spec 45662A. A&N leaks are made of all 304 stainless steel and utilize a stainless steel shut- off valve and come with a certified calibration report. Recalibration and custom styles are also available. Contact the factory directly for assistance. The helium probe is a high precision device that provides repeatable metering of a desired helium flow rate. Our probe helps eliminate lost time due to helium saturation and saves on helium usage.

 

A&N Corporation

Williston, FL

www.ancorp.com

Contact: Joshua LeBeau Phone: 1-352-528-4100

E-mail:  jlebeau@ancorp.com

 

ME2 Leak Testing Under Vacuum

 

The Advanced Test Concepts Inc. (ATC Inc.) ME2 leak testing under vacuum instrument handles slip and viscous flow regime (2 psia to barometric pressure); leak tightness from 1 ×10-5 sccs at 2 psia (1 µm defect size); or hard vacuum - molecular flow (less than 0.1 psia). Leak tightness is measured to 5 × 10-7 sccs at 0.02 psia (0.1 µm defect size). Applications include mass extraction tests and clean room or industrial applications. Available Options include the Micro-Flow Sensor, The Intelligent Gas Leak Sensor (IGLS); or Molecular Flow Sensor - The Intelligent Molecular Leak Sensor (IMFS). An automated vacuum test circuit is uniquely designed for ultra-tight leak specifications.

 

Advanced Test Concepts Inc.

Indianapolis, IN

www.atcinc.net

Tel: 1-317-328-8492

E-mail:  atc@atcinc.net

 

EXTRIMA® Hydrogen Leak Detector for Hazardous Environments

 

The Adixen by Pfeiffer Vacuum Sensistor is an intrinsically safe leak detector. The equipment meets the ATEX directive for leak testing in explosive environments, such as aircraft fuel systems. The Extrima® is intended for leak detection with diluted hydrogen as trace gas in explosive environments, where the safety requirements are extremely high. The detector is intrinsically safe which means that it under no circumstances can ignite the explosive gas. Extrima has the European EEx ia IIC T4 classification equivalent to US Class 1,Div. 1, groups A, B, C,D which means that it meets the requirements for use in zone 0 according to the ATEX directive (ATmosphere EXplosible) of the European Commission. This detector can therefore be applied in the chemical and petrochemical industry as well as in the aviation and oil processing industries. A typical application is leak detection during maintenance of aircraft fuel systems. Since there is always some fuel left in the system, the equipment must meet specific requirements. Extrima quickly detects and locates the smallest possible fluid fuel leaks thereby ensuring 100% integrity of the test object. The Extrima has a unique Auto-Ranging function, which automatically tunes the instrument’s sensitivity for precise leak location. After a leak is located and the search for additional leaks continues, the sensitivity automatically readjusts to the highest level. With seven hours of continuous operation from rechargeable batteries and an IP67 waterproof rating, the Extrima meets all the requirements of the aviation, chemical, petrochemical and oil process industries for leak detection.

 

Sensistor ILS500 Leak Detection Test System

 

The Sensistor ILS500 Leak Detection System from Alcatel Vacuum Products, Inc. contains 3 modules housed in one compact unit. These modules are configured for optimal testing conditions, short cycle times and operator convenience for specific test environments. The controller module has a central processing unit, a gas-filling unit, and machine and tooling interfaces. The detector module is the Sensistor H2000 Hydrogen leak detector that uses a safe hydrogen mixture as a trace gas. The third module is the operator touch screen interface for set-up as well as production test monitoring and operation. This plug-and- play leak detection system is for demanding industrial leak testing applications.

 

 

 

Leak Detectors and Mass Spectrometers

 

Adixen by Pfeiffer Vacuum manufactures a complete range of Adixen leak detectors with a choice between a N2/H2 Gas-FET (GAS field effect transistor) leak detection that is lightweight, portable with middle range sensitivity and a helium detection technique with high sensitivity. These leak detectors address HVAC, aerospace, and automotive, general engineering to semiconductor applications. Alcatel Adixen leak detectors and systems can be configured to test the overall leak rate of a component or system or to accurately and easily pinpoint a leak using a manual probe. Using helium or N2/H2 trace gas, methods are up to 1000 × more sensitive than pressure decay or mass flow testing. Other advantages of trace gas leak testing are (a) the test is unaffected by temperature changes (b) the test is unaffected by component creep (c) the test is a direct measurement of the actual leakage from the component or system. Helium Mass Spectrometer systems can detect leaks as small as 1×10-10 cc/sec in vacuum while the Gas-FET detectors will detect leaks as small as 1 × 10-6 cc/sec at atmospheric conditions. For automatic testing of components and systems that require high-sensitivity leak testing (< 5 × 10-6 cc/sec) or need to be tested under vacuum, then a helium leak detector is the right choice. Adixen Mass Spectrometer Helium leak detectors detect leaks as small as 1 × 10-10 cc/sec under vacuum. For applications that are not as critical in terms of leak rate sensitivity (> 1 × 10-6 cc/sec) or require lightweight, portable equipment, use an Adixen N2/H2 (Gas-FET) leak detection systems. Gas-FET leak detectors will detect leaks as small as 1 × 10-6 cc/sec at atmospheric conditions in a manual portable sniffing mode or as small as 5 × 10-5 cc/sec in an automatic accumulation chamber.

 

Adixen by Pfeiffer Vacuum

Hingham, MA

www.adixen-usa.com

Tel. 1-781-331-4200

E-mail:  inquiry@adixen-usa.com

 

MCV Mass Flow Controller

 

For vacuum coating and sputtering processes, Alicat Scientific’s MCV mass flow controller provides the tight shut-off parameters required to maintain product integrity. Its integrated pneumatic shut-off valve is normally closed, affording positive shut-off of 1 × 10-9 atm sccm/sec Helium max. The Alicat MCV accurately controls gas flow rates as low as 0.5 sccm or as high as 20 slpm with response times of 50 to 100 milliseconds. Fast response times can greatly improve vacuum coating end products and help eliminate target poisoning. Pre-programmed with calibrations for 30 gases, the MCV displays mass flow, volumetric flow, absolute pressure and temperature. The unit may be programmed directly through the instrument’s keypad or remotely via RS-232 (RS-485 also available). The MCV uses the same patented laminar flow differential pressure (DP) technology as all Alicat Scientific flow instruments, is supplied with NIST traceable certification and carries the CE mark.

 

 

 

MC/MCR Series Mass Flow Controllers

 

Alicat Scientific’s MC/MCR series mass flow controllers provide a few key features that are a benefit to vacuum coating OEMs and end users alike. OEMs who are interested in cost saving features and end users who focus on performance will both enjoy the rich feature set of the Alicat MFC. With a 200:1 turndown OEMs can cover a very wide flow range with only one instrument instead of several and with 30 on board selectable gas calibration and incredible accuracy end users have a reduced spare part inventory and minimized target poisoning. Alicat uses a patented laminar flow differential pressure technology which is inherently faster and more linear than the competing thermal technology. The result is faster response and greater stability from the mass flow controller.

 

 

 

Mass Flow Controllers for Coating and Sputtering

 

Alicat Scientific’s Mass Flow Controllers provide a number of advantages in the coating and sputtering fields. Fast control and response times (10 ms read, 50-100 ms control times) make Alicat Mass Flow Controllers a choice for reactive sputtering and applications that require fast and automated regulation of flow rates and partial pressures in vacuum chambers. In the downstream valve configuration, Alicat Mass Flow Controllers are immune to the effects of even the strongest vacuum pump, ensuring that mass flow into your chamber is accurate. Every unit is capable of switching between 20 pure gasses and 10 gas mixes on the fly, no matter what media the coating process may use. Alicat provides versatile mass flow controllers for all applicable gasses and projects. MFC devices use a communications package and accessories that will make integration into your system seamless and user friendly.

 

 

 

Alicat Scientific Inc.

Tucson, AZ

www.alicatscientific.com

Tel: 1-520-290-6060

E-mail:  info@alicatscientific.com

 

Model 5100HD Gas Analyzer

 

AMETEK Process Instruments expanded its line of Model 5100 Series gas analyzers based on tunable diode laser absorption spectroscopy (TDLAS) with the introduction of the Model 5100HD gas analyzer that hosts a dual laser platform. Two separate lasers are installed in the instrument, sharing a common optical path through the sample, allowing the instrument to measure two analytes simultaneously, resulting in significant cost savings for users. Where the required concentrations of the analytes differ considerably such that different path lengths are required, two sample cells are used. The Model 5100HD is capable of dual stream analysis and can measure any two combinations of water vapor, methane, hydrogen sulfide, carbon dioxide, and oxygen in process or flue gas. Another key feature is the use of sealed reference cells that contain known amounts of analyte gases measured for referencing the emission wavelengths of the lasers. This allows users to both line lock the lasers and continuously verify the instrument’s calibration. It is designed to handle sample gases with high dew points. The standard version has its sample cell heated to a maximum of 100°C. A version is also available for 150°C. The instrument is set up to perform all-digital implementation of wavelength modulation spectroscopy (WMS). It employs digital signal-processing methods that allow for the successful implementation of multivariate calibration and help to accurately measure two separate species with completely overlapped spectral responses.

 

Thermox Remote Calibration Unit Maximizes Accuracy While Minimizing Costs

 

The AMETEK Thermox® Remote Calibration Unit (RCU) ensures maximum confidence in the accuracy and stability of all Thermox WDG-IV/C/M, HP II, C/M, WDG-Insitu/2000 and WDG-Insitu/IQ oxygen and combustibles analyzers, and it allows for unattended, automatic calibration to minimize labor costs. The unit’s rugged stainless steel enclosure is fully weatherproof and corrosion-resistant for long life and minimal maintenance. Class 1, Div 2 certification for use in hazardous areas is available. The unit easily replaces existing remote calibration units and is compatible with all and existing Thermox WDG oxygen and combustibles analyzers. Oxygen span calibration uses instrument air, while an alternative cal gas input option allows for the use of certified calibration gas. Based on a field-proven design pioneered by AMETEK, Thermox analyzers offer fast response, accuracy and ease of maintenance in a wide range of com- bustion efficiency applications. In addition, AMETEK offers a comprehensive range of LAND combustion efficiency and environmental monitoring instruments. Along with Thermox and LAND instruments, AMETEK Process Instruments also manufactures non-combustion analyzers, including trace oxygen and moisture analyzers, photometric and laser analyzers, and Dycor quadrupole mass spectrometers. AMETEK instruments are fully supported by a global network of sales representatives and technical support.

 

 

 

TA7000R Reduction Gas Analyzers Provide Reliable Measurement of Trace H2 and CO at Extremely Low Concentrations

 

The ta7000R Series gas chromatographs from AMETEK Process Instruments are designed to monitor the purity of gas distributed to clean rooms and production tools in the latest semiconductor fabs. The units provide rapid and reproducible results at extremely low concentrations. The monitor incorporates many advanced features for the reliable detection of H2 and CO in the parts per trillion (ppt) range. The ta7000R platform includes a dedicated sample processing system, a single high sensitivity detector and on-board data analysis electronics. It is equipped with a Reduction Gas Detector for H2 and CO detection. The unit has a detection limit below 500 parts per trillion and is available for use on nitrogen, oxygen, helium and argon sample streams. The ta7000R series is part of a family of trace analyzers from AMETEK for process instrumentation.

 

AMETEK Process Instruments

Newark, DE

www.ametekpi.com

Tel: 1-800-222-6789

E-mail:  Jim.McKinley@ametek.com

 

New MultiFlo™ Capable GF40 and GF80 Thermal Mass Flow Controllers and Meters

 

Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, introduces the GF40 and GF80 thermal mass flow controllers (MFCs). These MFCs provide outstanding performance, reliability and flexibility in many gas flow measurement and control applications. The GF40/GF80 offers a highly configurable platform based on modular architecture, enabling drop-in replacement for quick and easy upgrades. These MFCs give users an opportunity to standardize on one MFC over a broad range of applications providing reduced inventory and operational costs. These MFCs operate with Brooks' patented MultiFlo™ technology enables superior actual process gas accuracy. MultiFlo also gives users the ability to reconfigure the MFC for a new gas and range without the time and cost of removing the device from the gas line. The MFCs are also equipped with an independent diagnostic/service port to troubleshoot or change flow conditions without removing the MFC from service. Brooks GF40/GF80 MFCs features fast sub one second settleing times and corrosion-resistant Hastalloy sensor tube for long-term stability. The superior valve technology provides minimum leak-by, maximum turndown and fast response which reduces overall gas panel cost and increases throughput. Additionally, the measurement accuracy of every device is verified using traceable primary calibration standards.

 

 

Expanded Digital Communications Capabilities in the 4800 Series Mass Flow Controllers/Meters

 

Brooks Instrument, a world-leading provider of advanced flow measurement, control, and level solutions, enhanced digital communications capabilities on the 4800 Series mass flow meters and mass flow controllers. In addition to the analog and RS232 communications, customers can now choose Profibus or RS485 that is delivered in a small field installable module that mounts directly on top of the 4800 Series device. The 4800 Series with Profibus supports both DPV0 cyclic and DPV1 acyclic data communication. It has a standard 9 pin female D-connector for signal and an M5 connector for power. Baud rates from 9600 up to 12M are supported, which are automatically detected. The 4800 Series with RS485 has a physical layer with proprietary "SProtocol" based on HART® command set. It has a standard 15 pin male D-connector for signal and power. Baud rates from 1200 to 38.4K are supported with a top accessible rotary switch for baud rate selection

 

Flow Rate Expanded on the GF Series Mass Flow Controller

 

Brooks Instrument has released new product enhancements to the GF Series ultra-high purity mass flow controllers. The GF Series is a highly modular, user-programmable, metal-sealed mass flow controller that delivers a new level of performance and flexibility. Brooks has increased the range of flow rates available on the GF Series from the current 3 sccm to 30 slpm to a new fullscale flow rate of 55 slpm. At the heart of the GF Series is Brooks MultiFlo™ technology, a powerful feature that enables simple reprogramming of the gas and full-scale range in less than 30 seconds without removing the mass flow controller from the gas line. A major advancement over traditional single point gas conversion factors, MultiFlo™ mass flow controllers can deliver up to a three-times improvement in accuracy through the application of advanced gas modeling and compensation for non-ideal/nonlinear gases. Selecting a new gas automatically establishes optimized PID settings for dynamic control, compensates for gas density effects and ensures smooth overshoot-free transitions between flow rates with excellent steady state stability. GF Series flow settling time ranges from market-leading ultra-fast 300 ms (GF125) to one-second (GF100/120). For applications requiring a slower flow response, a user-programmable ramp function linearly transitions the flow between set points over a period of up to one hour with a resolution of 2 ms. All of these features are easily accessible through the independent service and diagnostic port. The all-metal flow path ensures compatibility with all gas media, while the GF’s minimal internal surface area and fully swept flow path ensures rapid purge and clean up, enabling customers to change between gases for maximum flexibility. Offered in full-scale ranges from 3 sccm to 55 slpm with normally open or normally closed valves and multiple communication protocols, including Analog 0-5 VDC, RS485 and DeviceNet, the GF Series is a state of the art upgrade for most thermal mass flow controllers.

 

Brooks Instrument

Hatfield, PA

www.brooksinstrument.com

Tel: 1- 888-554-FLOW

E-mail:  BrooksAM@BrooksInstrument.com

 

LC Mass Spectrometers

 

For most LC-MS applications, successful implementation demands the best integration of large scale automation and/or chromatographic separation in liquid phase. Bruker provides access to the widest variety of HPLC systems through Compass. Compass is Bruker’s LC-MS acquisition and processing software incorporating full software control for the most popular HPLC systems ranging from nano scale to analytical UHPLC. All other LC systems can normally be linked via remote control.

Using the capabilities of Compass, our customers have the freedom to choose their preferred HPLC vendor and their preferred configuration while preserving the greatest flexibility with our one-stop support experience. Our new ionBooster™ high-temperature electrospray ion source boosts the sensitivity of Bruker mass spectrometers for environmental analysis, food testing and forensics. Sensitivity gains for many compounds of 5 × to 100 × greatly extend the quantitative capabilities of modern accurate-mass mass spectrometers, such as Bruker's unique maXis™ ultra-high resolution Qq-TOF systems. Inside the ionBooster, an electrospray is maintained at elevated vaporizing temperature to enable enhanced desolvation of analyte ions, even at high flow rates in UHPLC separations. Delivering more efficient ionization, the ionBooster enhances sensitivity and lowers detection limits.

 

Bruker Daltonics Inc., Bruker AXS Inc.

Billerica, MA

www.bdal.com

Contact: Mrs. Sandy Fortunato

Tel: 1-978-663-3660 Ext 1043

E-mail:  sandy.fortunato@bruker-axs.com

 

Sentinel I28 Advanced Multi-Functional Leak Test Instrument

 

The Cincinnati Test Systems’ Sentinel I 28 is an advanced multi-functional test instrument on the market that features a standard manifold design tested with over 40,000,000 cycles. CTS pairs this manifold with a new high performance transducer that reduces test cycle and improves accuracy and repeatability. CTS pairs this manifold with a new high performance transducer that reduces test cycle and improves accuracy and repeatability.A high contrast 24 bit color TFT display provides XY Graphing (pressure, loss, or flow).

 

 

 

Sentinel Blackbelt Precision Leak Test Instrument

 

The Blackbelt is a precision benchtop leak test instrument designed for maximum performance and minimal space requirements. Cincinnati Test Systems’ Blackbelt instrument utilizes advanced algorithms derived from over 30 years of proven leak test experience to produce the fast and accurate results required by the most demanding customers. Blackbelt is perfect for clean room applications in medical device and electronics assembly. It is designed to be operator friendly, featuring a large vivid color display, and can handle a wide range of test types while offering outstanding data tracking capability. The Sentinel Blackbelt advanced features and capabilities come in a compact user friendly bench top package and features pressure or vacuum mode decay, drop, rate of change, occlusion, and burst test types. It also has a vivid, state of the art color graphic screen for easy navigation and viewing. The unique test port light ring allows for positive operator feedback. A language neutral keypad and multi-language software along with automatic part setup permits easy programming of up to 99 part programs. Auto calibration ensures accurate results and easy operation. The Quik test for reduces test time and analyzing test results in real time. Flexible communication formats include Ethernet, USB and RS232. The last 5000 tests stored in on-board memory, expandable through USB port. The Sentinel Blackbelt joins the Sentinel C-20 which features four part programs including timer, pressure, leak rate and part change, the C-28, which shares many of the Blackbelt capabilities in a wall mounted enclosure. The Sentinel M-24 features expanded capabilities that offer control of up to four independent stations and the most advanced leak tester on the market the Sentinel I-24, which features USB mass data storage, multi test type capability, 99 part programs and control of up to five tooling motions.

 

NIST Traceable Gas Flow Calibrated Leak Standards

 

Cincinnati Test Systems, Inc. (CTS) offers a wide range of calibrated leak standards, vacuum hardware, and custom assemblies for laboratories, universities, research facilities, testing facilities, manufacturers of ultra high purity gas delivery systems, and semi-conductor manufacturers. The calibrated leak standards are all manufactured on site and are calibrated in CTS’s world class A2LA accredited gas flow calibration laboratory. Calibrated leak standards are supplied with N.I.S.T. traceable documentation for calibration in compliance to ISO/IEC 17025. These flow standards are available for most gases ranging from 10-5 to 10-1 atm-cc/s. For helium they are available ranging from 10- 10 to 10-1 atm-cc/s. CTS is a leader in the manufacture of leak test instruments as well as fully automated leak detection systems. Known in the industry for quality, performance consistency and accuracy, CTS offers solutions that optimize leak testing sensitivity and signature analysis monitoring as well as analyzing and communicating the data. CTS is a TASI Group company. For more information on CTS, visit www.cincinnati-test.com.

 

Cincinnati Test Systems, Inc.

Cleves, OH

www.cincinnati-test.com

Contact: Richard L. Grady, VP Marketing

Tel: 1-513-367-6699

E-mail:  sales@cincinnati-test.com or  rgrady@cincinnati-test.com

 

Leak Detector Parts, Calibrated Helium Leaks and Accessories

 

Duniway Stockroom Corp carries a wide variety of leak detector parts for Varian and Veeco; filaments and ion sources forAlcatel, CEC/DuPont, Varian and Veeco; calibrated helium leaks; and leak detector accessories including helium leak probes. Duniway also has rebuilt leak detectors.

 

Duniway Stockroom Corp.

Mountain View, CA

www.duniway.com

Tel: 1-650-969-8811

E-mail:  info@duniway.com

 

GasCheck G3 leak Detector [Edwards D14132000 GasCheck G3.jpg]

 

Introduced as an enhanced replacement for the popular GasCheck B4, the Edwards GasCheck 3000 incorporates a new backlit dot matrix LCD for improving viewing in poor lighting and leak rate indication by both flashing LED and sounder, for easier use in all environments. In addition the GasCheck3000 has a new tactile keyboard with fewer keys and improved temperature stability for better performance in uncontrolled areas. Applications include quality assurance testing on manufactured component seals; laboratory applications, such as the detection of leaks from gas chromatographs, from mass spectrometers, from gas cylinders and fittings; and industrial applications, such as the detection of leaks from gas installations, in cylinder receiving rooms, from pipeline assemblies, the detection of leaks from stored gases and the detection of vapours released from stored chemicals. The G3 has a new, simple to interpret graphical icon display menu with a choice of readings in cc/sec, mg/m3 or ppm. It rapidly detects almost any known gas mixture – particularly sensitive to ammonia, argon, butane, helium and has a data logging facility – 10 data points with date and time stamp

 

 

TIC Instrument Controller with Six-Gauge and Capacitance Manometer Capability

 

The Edwards TIC instrument controller is a compact instrument controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control. It is supplied with a WindowsTM PC program that provides a comprehensive data logging ability, and enables full setup and control from a PC using the RS232 interfaces as standard. The controller supports and automatically recognizes up to three gauges from the BOC Edwards range, with coverage from 2000 to 6.6 × 10-10 mbar. The TIC is available in three-channel, six-channel and sixchannel capacitance manometer capable versions. When combined with the optional external relay box that allows for control of three 250 VAC, 3 A changeover relays, the TIC instrument controller provides for flexible operation of a wide range of vacuum system measurement and control configurations. Additional features include: direct pressure readout of common gasses (N2, He, Ar, CO2, Kr and Ne) without conversion factors and up to six 0 to 10 V buffered analogue outputs. User-configurable display options include a four-character alphanumeric name for each channel, the option to display one, three, or six channels simultaneously, and an ability to select gauge order when cycling through the display.

 

 

 

ADC Active Digital Controllers

 

The Edwards Active Digital Controller (ADC) is a compact single gauge controller and display. It features a bright LED display and simple push-button controls. The ADC automatically recognizes compatible Edwards gauges, loads the appropriate look-up table and displays the pressure in commonly used vacuum units. The ADC is available in standard and enhanced versions. The standard controller displays the pressure measured by a single active gauge. The enhanced controller supports two similar gauges, is equipped with two variable hysteresis set-points which are linked to 48V dc 1A changeover relays, and two 0-10 Vdc analog outputs. An RS232 interface is also available on the enhanced version.

 

Edwards Vacuum

Sanborn, NY

www.edwardsvacuum.com

Tel: 1-800-848-9800

E-mail:  info@edwardsvacuum.com

 

Residual Gas Analyzers: Pirani, Ion Gauge, Quadrupole Included

 

The Extorr XT residual gas analyzer is a quadrupole mass spectrometer complete with a built-in Pirani gauge and Ion gauge. It is an essential measuring device that may be used in any vacuum system. The Extorr XT residual gas analyzer (RGA) models come in 100, 200 and 300 amu packages. All RGA models attach to a single 2 3/4 inch flange. Each package has automatic start-up and shut down and will constantly monitor from atmospheric pressure to ultra high vacuum. The built-in Pirani gauge and ion gauge constantly monitor total pressure and regulate and protect the RGA. These functions are seamlessly integrated into the Extorr software package.

 

Extorr Inc.

New Kensington, PA

www.extorr.com

Contact: Lutz Kurzweg

Tel: 1-724-337-3000

E-mail:  info@extorr.com

 

MAX300-IG™ Industrial Gas Analyzer

 

The Extrel® MAX300-IG™ Industrial Gas Analyzer represents the latest in mass spectrometer and data system technology. This seventh generation on-line process mass spectrometer was designed to meet the analysis needs of customers worldwide. The MAX300-IG provides reliable, continuous analysis in humid, hot, and tough industrial environments, including hazardous locations. Demonstrated uptime of greater than 98% ensures that our customers realize the benefits of fast on-line analysis and process optimization. Continuous background diagnostics alert the user of analyzer issues, and action is taken to maximize the quality of the data being delivered. Speed, sensitivity, stability, and precision are the four cornerstones of successful process optimization and the means for maximizing ROI. The MAX300-IG offers a typical analysis time of less than 400ms per component with the capability to analyze an unlimited number of components and sample streams. The analysis time can be longer or shorter, depending on the process requirements. Sensitivity. Detection ranges are 100% to 10 ppm (parts per million) using a Faraday Detector or 100% to 10 ppb (parts per billion) using the optional Dual Faraday/Electron Multiplier detector. Stability. The MAX300-IG has a 30 day stability of 0.5% RSD (Relative Standard Deviation), based on a 1% Argon concentration. Precision. The MAX300-IG has a precision of ± 0.0025 absolute, based on a 1% Argon concentration.

 

Extrel CMS LLC

Pittsburgh, PA

www.extrel.com

Tel: 1-412-963-7530

E-mail:  info@extrel.com

 

Quality Crystals® in 6MHz and 5MHz styles

 

Fil-Tech, Inc. manufactures Quality Crystals® in 6MHz and 5MHz styles with Gold, Longer Life Gold® , Stress Relieving Alloy®, and Advanced Adhesion Alloy™ coatings. Choose the electrode material that best fits your deposition process. Gold offers low contact resistance and high chemical stability. Longer Life Gold offers low contact resistance and stress relieving qualities of alloy. Stress Relieving Alloy dissipates the stress from deposited dielectric materials to offer longer, steadier, jump free oscillation. Advanced Adhesion Alloy promotes greater film adhesion of deposited material on the crystal surface and works with alloy to dissipate stresses from dielectric materials. Fil-Tech also supplies a complete line of sensor head hardware for thin film deposition, including single and dual feedthroughs, single and dual sensor heads, and sputter heads. Fil-Tech single and dual feedthroughs can be mounted on a 1” bolt or 2-3/4” conflat flange. Fil-Tech also supplies from stock, complete electron beam emitter assemblies and replacement parts for Temescal and Telemark electron beam guns, including filaments, insulators, beam formers, anodes, electromagnetic coils, and OFHC copper crucibles and covers. Fil-Tech also supplies replacement parts for Veeco Commonwealth, Veeco Ion Tech, and Satisloh ion sources, including tungsten filaments, insulators, gas distributors in graphite, stainless steel and titanium, anodes, and cathode tips. Fil-Tech supplies Bayard Alpert and nude ionization gauges, convection and thermocouple gauges, and Alcatel replacement leak detector filaments. Contact Fil-Tech at 800-743-1743 or visit us at www.filtech.com for Delivery from Stock.

 

LD10 Replacement Filaments for Alcatel Leak Detectors and Calibrated Leaks

 

Fil-Tech, Inc. supplies replacement filaments for Alcatel leak detectors, the LD10s. The Fil-Tech LD10 is a drop in replacement for Alcatel's original equipment part. The filament is welded to the slotted posts for greater reliability and longer life. Fil-Tech also supplies new Varian leak detector filaments and can rebuild your Varian filaments on a repair exchange basis. Fil-Tech also supplies new calibrated helium leaks to the 10-7 and 10-8 range. We can recalibrate your existing leak with NIST traceable certification. In addition, Fil-Tech supplies DC704 and FT704 silicone based fluids, and Santovac 5. For a complete listing of our parts, contact Fil-Tech at 1-800-743-1743 or visit www.filtech.com.

 

Fil-Tech, Inc.

Boston, MA

www.filtech.com

Contact: G. Paul Becker

Tel: 1-617-227-1133

E-mail:  paul@filtech.com

 

Thermal Conductivity Binary Gas Analyzers

 

GOW-MAC® Thermal Conductivity GasAnalyzers are used to measure and monitor binary gas streams. Our analyzers can also monitor one component in a more complex gas mixture when the background gases have the same ratio to each other, or have similar thermal conductivity values. These gas analyzers find use in measuring the composition of binary mixtures and gas purity in many industrial applications on a continuous (50 Series) or intermittent (20 Series) basis. Typical applications include Gas Manufacturing Facilities: monitoring Pressure Swing Adsorption (PSA) Systems; Gas Distributors: testing welding mixes; Gas Blending Equipment; Air Liquification Plants: monitoring purity of Ar, O2, H2, N2, He, CO2, or Ne; Steel Mills: CO2 in off-gas from gas generators; Chemical Plants: H2 purity, monitoring purging operations, contamination control; Petroleum Refineries: H2 purity in C1 - C6 hydrocarbons; heat treating: H2 in N2 and other annealing gases; Power Generation Plants: H2 cooling gas in turbine generator housings; CO2 in turbine generator housing; checking H2 purity;Ammonia Plants; and Refrigeration Facilities.

 

 

 

Trace Nitrogen in Argon Analyzer for Specialty Gases

 

The GOW-MAC® Series 1200 Gas Analyzer employs an argon plasma emissions detector to measure trace amounts of nitrogen in argon with a guaranteed sensitivity of 10 ppb for nitrogen. Three configurations encompass varying analytical ranges: 0-2/0-20 ppm, 0-20/0-200 ppm, and 0-10/0-100 ppm. Engineered as a rugged, low cost, low maintenance instrument, the Series 1200 is easy to operate. Features: non-depleting cell for extended operation providing 24/7 reliability and a long, maintenance-free life; On-line, continuous trending of nitrogen concentration with no sample injection or separation columns; Exposure to atmosphere or high impurity concentrations does not result in damage to the analytical cell; Fast response of <15 seconds and rapid recovery are enhanced by the unique detector design (utilizes electro-optical modulation — eliminates unwanted noise and drift, and generates a modulated signal without a mechanical chopper); Over-range protection eliminates possibility of false readings. Applications include air separation plants, argon purification plants, cryogenic truck loading stations, specialty gas laboratories, process control, new line certification, steel manufacturing, chemical plants, gas management/monitoring systems, quality control for truck fills & gas cylinders, and more.

 

Series 110TCD Gas Chromatograph

 

The GOW-MAC® Series 110TCD Gas Chromatograph is optimized expressly for non-corrosive and corrosive gas analysis. The analyzer offers application-specific system configurations for the analysis of industrial and specialty gases used in a wide array of applications: gas laboratories, process control, gas management/monitoring systems, quality control for truck fills & gas cylinders, welding gas management, semiconductor manufacturing, and many more. The GC is either 19” rack or bench top mountable. Its flow system consists of pneumatically controlled, automatic gas sampling valves for sample introduction; independent flow controls for each column; and laminar flow design. Two column ovens utilize independent, solid state, proportioning temperature controls with direct dial setting; digital readout; and can handle micro-packed, capillary or 1/8” packed columns. The single detector oven can house one of three styles of GOW-MAC flowthrough, thermal conductivity. The analyzer communicates using commercially available chromatography software and has, as standard, 4-20 mA output. Additional features include built-in signal amplification and a filament protection circuit.

 

GOW-MAC Instrument Company

Bethlehem, PA 18017

www.gow-mac.com

Tel: 1-610-954-9000

E-mail:  sales@gow-mac.com

 

835 Vacuum Quality Monitor (VQM™ )

 

The new 835 VQMTM from the Granville-Phillips® Product Center of Brooks Automation is the next generation in gas analysis. Utilizing an Autoresonant Ion Trap as a mass separator provides an 85ms scan for the entire 1-145 amu range (or 120ms for 1-300 amu) while drawing less than 15 watts of power. The 835 VQM transforms complex measurement data into comprehensive, easily usable information. Other advantages of this technology include simple, single gas calibration, no zero blast, high resolution, and excellent performance at UHV levels. And, because the controller is separate from the sensor, system cost can be greatly reduced by using one controller for multiple sensors by simply moving the cable. The 835 VQM can be used for contamination detection, leak detection, vacuum integrity, process monitoring and more. For operating at process pressures, a differential pumping system is also available.

 

Granville-Phillips

A Division of Brooks Automation Longmont, CO

www.brooks.com/vqm

Tel: 1-303-652-4400

E-mail:  vqm@brooks.com

 

QGA Gas Analyser for Thermal Analysis Systems

 

The importance of identification and measurement of the gases evolved and consumed in thermal reaction studies is increasingly recognized as a critical element in the performance quantification of a very wide range of materials engineered for thermal processing. The new Hiden QGA mass spectrometer evolved to address the need for a fast-response, multirole gas analysis system readily adaptable to monitor and/or control a diverse range of thermal reaction systems and processes. The QGA Compact Benchtop Mass Spectrometer Typical application areas include reaction kinetics, catalyst characterization, thermo-gravimetric studies and temperature programmed desorption, reduction and oxidation. The system measures all gas and vapor species with molecular weights up to 300 amu and includes external inputs enabling integration and display of process parameters such as temperature, weight and pressure with the measurements. A family of dedicated process interfaces, together with a custom design service for specialized applications, provide direct and optimized coupling to the majority of process systems. System operation, calibration, data acquisition and display are fully automated with full manual control selectable when required for the researcher. For multistream applications the expanded range of inlet systems enable monitoring of from 4 up to 80 gas streams automatically and sequentially in any user selected sequence.

 

Residual Gas Analyser Range

 

The Hiden Analytical family of residual gas analyzers features three system types optimised to accommodate applications from basic HV vacuum diagnostics through to precision gas analysis and fast-event UHV/XHV studies. The HALO system, a multipurpose spectrometer for HV/UHV vacuum applications, features partial pressure measurement to 10E-13 mbar together with exceptional low mass performance for high-sensitivity leak detection. Mass range options are 200 amu and 300 amu. Interchangeable gauge heads and control modules reduce operational costs and simplify post-sales service and maintenance. The 3F series with sophisticated triple mass filter technology offers precise analytical capability with superior contamination resistance, high abundance sensitivity and detection capability to 5 part-per-billion, together with mass range options of 300 amu and 500 amu. Application-specific ionization sources are available to enable system configurations for precision gas analysis, molecular beam and laser interaction studies, and UHV/XHV applications. The 3F PIC is the ideal instrument for fast event studies. It is compatible with the full range of ionization sources in the 3F series and extends performance with a fast pulse counting detector capable of continuous measurement at rates to 500 samples per second and with a dynamic range from 1c/s to 10E7c/s. All three systems offer Hiden Analytical’s Lifetime Service Support and are backed by a 3-year warranty.

 

Quadrupole Mass Spectrometers for UHV/XHV Studies

 

Hiden Analytical introduce a family of quadrupole mass spectrometers designed specifically for UHV/XHV performance, evolved from the Hiden 3F-series concept and incorporating the proven triple-stage mass filter technology for optimum mass separation, ion transmission efficiency and contamination resistance. Pulse ion counting detection is common throughout this series for highest sensitivity and fastest response times, with choice of positive ion only or combined positive and negative ion detection. Quadrupole mean energy scanning is featured for systems configured for analysis of externally generated ions, enabling ion energy distribution measurement and optimization for neutrals analysis. All systems feature the Windows-MASsoft Pro control program with multi-parameter scanning for optimization of operating parameters for each individual mass channel. Ion detection is by fast pulse counting with continuous 7-decade scaling from 1 c/s to 10E+7 c/s. Sampling rates exceed 500 measurements per second, with partial pressure detection down to 5 × 10E-15 mbar and trace level detection to 5 ppb. A choice of ionization sources enables system optimization for varied applications including molecular beam, laser ablation, thermal desorption and general neutrals studies. All ion source parameters are software controlled with modes for ion attachment, ‘soft’ ionization and appearance potential measurement.

 

Hiden Analytical Inc.

Livonia, MI

www.hidenanalytical.com

Contact: Mark Buckley, Vice President

Tel: 1-734-542-6666

E-mail:  info@hiden.co.uk

 

Micropole™ Residual Gas Analyzer

 

The HORIBA Instruments’ Micropole™ Residual Gas Analyzer is one of the smallest complete mass spectrometer systems available. The compact size is achieved by the patented design of miniature array of quadrupole mass filters. The array offers similar or greater sensitivity than conventional mass spectrometers but in a fraction of the volume. The system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is reduced. The sensors are factory pre-tuned and calibrated against transfer standards which allows direct interchangeability of the sensor by the user without the need for technical expertise to calibrate. It is possible to take data without a PC when you use the Monitor Controller with 3.5” LCD. Up to eight Micropole systems can be networked and controlled using RS-485 or Ethernet communication. The extremely compact size and lightweight is 1/20th size when compared to conventional residual gas analyzers makes it easy to integrate to your system. A mini array of 9 quadrupoles gives excellent sensitivity at a fraction of the volume of traditional quadrupoles. It can be used at up to 0.9Pa (7mTorr, 9 × 10-3 mbar) and in many applications the need for expensive vacuum pumping is reduced or eliminated.

 

HORIBA Instruments Inc, Residual Gas Analyzer

Austin, TX

www.horiba.com/us/en/semiconductor/

Contact: Stephanie English

Tel: 1-512-836-9560

E-mail:  stephanie.english@horiba.com

 

Transpector XPR3L Gas Analysis System

 

Solar Cell and LCD process yield optimization is mde possible by monitoring gas pressures, detecting contaminants, and locating leaks. Monitoring process gases and base vacuum conditions is affordable and efficient with the Inficon Transpector® XPR3L Gas Analysis System RGA. PVD process monitoring with the XPR3L provides real-time data on process gas pressures, gas ratios, contamination levels, impurities, and leaks. This information can be used to maximize both process yield and product quality. Background monitoring with the XPR3L can make preventive maintenance programs more efficient and effective by quickly detecting and diagnosing leaks and contaminants. Some key features include economical dual-purpose functionality, process monitoring and base vacuum assurance, by operating from UHV up to 10mTorr (20mTorr optional); affordable cost-effective process monitor that enables implementation in scaleable production designs; improves process yield, reduces scrap and improves product quality through continuous automatic monitoring of process gas pressures, ratios and possible contaminants or impurities; speeds up PM recovery and increases productivity by verifying base vacuum conditions, locating leaks and identifying contaminants with high sensitivity and low minimum detectable partial pressure; operates across a 1 to 100 amu mass range, protecting your investment and reducing risk by having the ability to detect a broad range of materials, contaminants or byproducts and it is compatible with the FabGuard monitoring and analysis system to provide reliable advanced diagnostics and process control.

 

T-Guard Leak Detection Sensor

 

The INFICON T-Guard Leak Detection Sensor combines the sensitivity and speed of helium leak detection with the cost of pressure decay systems. Its unique design works with simple chambers at atmospheric pressure, eliminating the need for costly and complex high-vacuum chambers and pumps. T-Guard leak Detection Sensor is a reliable alternative to pressure decay and water bath leak detection, providing up to 100 times the sensitivity with low cost of ownership and high ease of use.

 

 

 

Ecotec E3000 Multi-Gas Leak Detector

 

The INFICON Ecotec E3000 Multi-gas Leak Detector brings levels of productivity to demanding fab environments. Easy to use, the Ecotec E3000 is more immune to careless sniffing operation and can minimize operator error, so the accuracy and reliability of the testing operation is improved. It can detect leaks at a great distance from the leak location, and the sniffer tip can be moved faster without missing leaks. This high-performance, gas specific leak detector provides sniffer leak checking of both helium and process gases to sensitivities greater than 5e-7 atm × cc/s. At pressurized gas cylinders or gas lines, equivalent inboard leak rates greater than 1e-9 atm × cc/s can be checked.

 

 

 

INFICON

East Syracuse, NY

www.inficon.com

Tel: 1-315-434-1100

E-mail:  reachus@inficon.com

 

B-RAX 3000 Rack-Mount Vacuum Gauge Controller

 

InstruTech’s rack-mount vacuum gauge Controller dubbed the B-RAX 3000 is capable of operating one InstruTech Ionization gauge and two convection gauges providing a measurement range from 1 × 10-9 Torr to atmosphere. The B-RAX vacuum gauge controller uses a different approach to traditional full range vacuum measurement practices. This results in significant cost savings for the user. The Electrometer for the Ionization gauge is built in to the InstruTech’s IGM-400 Ionization gauge module instead of the controller itself. This allows the B-RAX to be offered as a compact, low heat generating and low cost multi-gauge vacuum gauge controller. The B-RAX is offered with three independent front panel pressure measurement displays as well as three set point relays for process control. The Controller can also accept and display pressures using alternate analog inputs from other types of vacuum gauges such as a capacitance diaphragm. The setup and programming is provided via a front panel setup screen and push buttons. The B-RAX is offered as a space saving half rack design, bench top or instrument panel. It can also be mounted as a full rack or dual rack using rack panels.

 

IGM-401 “Hornet” Miniature Ionization Vacuum Gauge Module

 

InstruTech’s miniature hot filament Ionization vacuum gauge module the IGM401, dubbed the “Hornet” is for measuring pressures from 1 × 10-9 to 5 × 10-2 Torr. The IGM401 is a rugged metal Ionization gauge with Dual Filaments. It incorporates numerous features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings do not experience temperature drift. The IGM-401 is offered with a extremely bright, crisp OLED display, one loglinear analog output, one setpoint relay and an RS485 interface. The display menu provides the user the choice to select from 16 common gases without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. In addition to high vacuum measurements, an option now available with the Hornet allows for connection of two convection vacuum gauges to the Hornet. It will operate and provide measurements from two external convection gauges without the need of another controller.

 

 

CVM211 “Stinger” Convection Vacuum Gauge Module

 

InstruTech’s CVM-211 series vacuum gauge module with onboard electronics/controller dubbed the “Stinger,” is based on the convection vacuum gauge principle, and measures pressures from 1000 to 10-4 Torr. Requiring minimal installation space this miniature convection vacuum gauge module offers one of the smallest form-fit designs available in a vacuum gauge. The Stinger is powered by 11 to 30 VDC and provides a non-linear analog output as well as one process setpoint relay for controlling vacuum system pumpdown and venting. The Stinger module also includes an extremely simple user interface with a built-in 3-digit LED display, for readout of pressure, and for setup, calibration, and operation of the unit.

 

InstruTech, Inc.

Longmont, CO

www.instrutechinc.com

Tel: 1-303-651-0551

E-mail:  info@instrutechinc.com

 

Mass Spectrometers

 

Mass Spectrometry (MS) is one of the fastest-growing areas in analytical instrumentation. JEOL magnetic sector and time-offlight mass spectrometers have very high stability, sensitivity, and resolution. These instruments are used in both quantitative and qualitative analysis, including high-resolution accurate mass measurements for the determination of elemental compositions. The use of mass spectrometry in support of synthetic, organic, and pharmaceutical chemistry is well established. However, mass spectrometry is also used in materials science, environmental research, and forensic chemistry. It has also evolved into one of the core methods used in biotechnology. JEOL manufactures a wide range of magnetic sector mass spectrometers ranging from small bench top double-focusing magnetic sector mass spectrometers to larger tandem and hybrid mass spectrometers. JEOL also offers the new cost-effective high-performance AccuTOF™ API-TOF LC/MS system for qualitative and quantitative analysis.

 

JEOL USA Inc.

Peabody, MA

www.jeol.com

Contact: Robert A. DiPasquale

Tel: 1-978-536-2310

E-mail:  dipas@jeol.com

 

Ultra-High Purity Gas Delivery Systems

 

MDC manufacturers complex ultra-high purity gas delivery systems. Core capabilities include UPH orbital welding, hand welding, tube bending, assembly and system integration. Gas cabinet systems can include 1 to 4 cylinder gas cabinets; multi-gas cylinders with single controller interface; 1 to 14 stick VMB configurations; manual/automatic/semiautomatic gas cabinets and life safety & SCADA interfaces. Interior wetted surfaces are electropolished to 10 to 15 ra; and have auto switchover; vacuum purging; powder coated 11 gauge steel enclosures; a pressure range 5 to 3000 PSI. Wetted parts are 316L stainless steel with filtration to 0.003 µm. A 4’exhaust stack with monitoring sensor; seismic restraint standard color touch screen or two line display; quality standards include UL-508 listed controller, leak tested to 1 × 10-9 cc/sec atm, moisture, oxygen, particle, testing to the ppb level and SEMI F-15 tracer gas testing is available. Gas Panels can include traditional VCR, 1-1/8” C-seal and Wseal, and 1-1/2” C-seal and W-seals. Wetted parts are 316L stainless steel with filtration to 0.001 µm. The interior surface is electropolished to 10 to 15 ra with anodized or powder coated back panels; a pressure range of 5 to 3000 PSI; leak tested to 1 × 10-9 cc/sec atm. Also, particle, moisture, oxygen, testing to the PPB level with functional testing to customer specifications is available. Calibration is included for MFCs, transducers and valves made of stainless steel. High purity diaphragm valves are standard with optional lockout valves, pressure rated 3000 psig with compact valve clusters for purging and optional proximity switches for air operated valves. Facilities Connection Box and Adapter Plates may include a facilities connection box and adapter plates to reduce the time and cost associated with process equipment installation.

 

MDC Vacuum Products, LLC

Hayward, CA

www.mdcvacuum.com

Contact: Maarten Kramer, VP Sales and Marketing

Tel: 1-510-265-3500

E-mail:  mkramer@mdcvacuum.com

 

Hot Filament Ion Gauge Tubes

 

Kurt J. Lesker Company stocks a comprehensive selection of replacement ion gauge tubes in tubulated envelope and nude designs that match both our controllers and those sold by competitors. We have tubes: in Pyrex, Nonex, and 7052 glasses; a range of envelope sizes; single or dual tungsten and thoriated iridium filaments; terminated in glass or metal tubes; or with various CF or KF flanges. We can cross reference almost any standard ion gauge tube and can provide custom or modified ion gauge tubes when required.

 

 

KJLC™ Convectron® Equivalent Series

 

The Kurt J. Lesker Company Convectron Equivalent series of pressure transducers and sensors are direct “drop in” replacements for the Granville-Phillips Convectron gauges. All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers.

 

 

 

 

KJLC™ DV-6M Equivalent Thermocouple Sensors

 

The Kurt J. Lesker Company KJL-6000 thermocouple tube is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company has a 30-day money-back guarantee on this product, with no questions asked.

 

 

 

 

Kurt J. Lesker Company

Clairton, PA

www.lesker.com

Contact: Aaron Bryan

Tel: 1-800-245-1656 or 1-412-387-9200

E-mail:  pressure@lesker.com

 

GT-430 Thermistor Digital Display Gauge with Trend Sensing™ Technology

 

The Myers Vacuum GT-430 Thermistor Type Gauge with Trend sensing™ provides vacuum leak detection with solvents for the entire operating range of the gauge (atmosphere to 1 × 10-3 Torr). Trend sensing™ is a unique feature of the gauge that provides real time display of the direction and speed of vacuum pressure change. This monitoring of pump down cycles provides the operator with data to quickly determine if there is a problem and a tool to assist with troubleshooting. Features of the GT 430 include display of pressure from atmosphere to 1 × 10-3 Torr, two adjustable independent relay outputs, RS 232 serial interface, and Analogue output for remote display, monitoring or recording of the pressure reading. It uses the GT 034 thermistor sensor with encapsulated resistor bead (proven more rugged than a standard thermocouple sensor) making it ideal for applications measuring in harsh environments.

 

Myers Vacuum Repair Services, Inc.

Kittanning, PA

www.myers-vacuum.com

Tel: 1-724-545-8331

E-mail:  dmyers@myers-vacuum.com

 

DELTA™ Flow Ratio Control for Process Optimization

 

Optimizing process performance just became easier with the MKS DELTA™ Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA™ Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to two different zones in a process chamber. Send the DELTA™ Flow Ratio Controller (FRC) a gas—or any mixture—and a ratio set point and the DELTA™ Flow Ratio Controller (FRC) will divide the gas into two separate output channels automatically. Integration of the DELTA™ Flow Ratio Controller (FRC) into new and existing process tools is easy. With a variety of flow ranges to choose from, a DELTA™ Flow Ratio Controller (FRC) exists to meet your needs. With copyrighted calculators our applications engineers are ready to help choose the right model for your application. MKS will send you the electronic files of the mechanical and electrical details to get you started on integration. Since the DELTA™ Flow Ratio Controller (FRC) maintains sub-atmospheric line pressure during operations, special containment is not usually needed.

 

 

Tru-Flo® Mass Flow Verifier for In Situ Verification

 

The MKS Tru-Flo® Mass Flow Verifier (MFV) is a fully integrated diagnostic instrument that provides in situ verification of mass flow controller (MFC) performance on semiconductor process tools. The Tru-Flo® MFV mass flow verifier measures a pressure rate-of-rise into a known volume at a known temperature to determine mass flow to within ± 1% of reading. It consists of a small gas volume, an MKS Baratron® pressure sensor, shut off valves, and control electronics combined into a single compact package. Tru-Flo® mass flow verifier can be easily incorporated into a process tool gas panel and communicates with a tool host computer via an RS-232 interface.

 

 

 

MultiGas™ 2030 FTIR Gas Analyzer

 

The MKS MultiGas 2030 is an FTIR-based analyzer capable of ppb to ppm sensitivity for multiple gas species in a variety of applications, such as stack emissions monitoring, process monitoring, ambient air monitoring, purity monitoring, and selective catalytic reduction performance monitoring. The MultiGas 2030 can perform analysis in gas streams that contain up to 30% water, and can simultaneously analyze and display more than 30 gases. With permanently stored calibration spectra, the need for costly gas cylinders is reduced. In addition, operators will find the robust, fully automated MultiGas 2030 easy to operate and maintain. The MultiGas 2030 Analyzer is composed of a process FTIR spectrometer, MKS’ patented high-optical-throughput sampling cell, applications-specific analysis software, and an instrument-independent quantitative spectral library. The MultiGas 2030 collects high-resolution infrared spectra that are analyzed using the quantitative spectral library. This provides accurate, highly sensitive measurement of most gases and vapors.

 

 

MKS Instruments Inc.

Wilmington, MA

www.mksinst.com

Contact: MKS Applications

Tel: 1-978-284-4000

E-mail:  mks@mksinst.com

 

Intellisys Pressure Control

 

Nor-Cal Products offers unequalled performance with the Intellisys downstream pressure control system, providing measurable process benefits through higher resolution, speed and reliability. The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during pressure transition. A Digital Signal Processor (DSP) enables DeviceNet™ communications protocol and programming flexibility for customer or process specific requirements. Intellisys motor control technology eliminates belts, gears and position switches, improving reliability, while increasing speed by at least a factor of twenty. High-torque geared drives are also available as an option. Standard sizes range from one to twelve inches. Substantial cost and space savings can be realized with the IQ-Series butterfly valves. All the control electronics are incorporated on to the valve motor drive, resulting in a compact size that is easy to integrate on any system. Nor-Cal Capacitance Diaphragm Gauges (CDG) feature a ceramic diaphragm designed to help stabilize output noise due to thermally induced variations found in other metal diaphragm designs. Heated, non-heated and DeviceNet compatible gauges are available with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. Our Universal Valve Drive (UVD) easily replaces older drive technology found on other manufacturers’pressure control valves. When used with our APC, the universal valve drive can upgrade a competitive valve to approach Intellisys performance levels.

 

Capacitance Diaphragm Gauge with Vacuum Pressure Measurements

 

Nor-Cal Capacitance Diaphragm Gauges complement the Intellisys™ throttle valves and adaptive pressure controllers with vacuum pressure measurements of superior accuracy and repeatability. Cost effective unheated miniature gauges using analog circuitry meet many monitoring and control applications in the 10 to 1000 Torr range. In addition, for critical process control and exacting accuracy and stability requirements, Nor-Cal is pleased to be able to offer a line of digitally enabled ceramic-based sensor capacitance diaphragm gauges. These gauges are available in full scale ranges from 100 mTorr to 1000 Torr in unheated as well as self regulated temperatures of 45°C, 100°C and 160°C. Nor-Cal’s CDGs are 100% electrically and mechanically compatible with competitive gauges for easy replacement installations. The gauges are also CE, SEMI, UL and RoHS compliant.

 

 

 

Deposition Monitors and Crystal Sensors

 

Nor-Cal Products’ Deposition Monitors and Crystal Sensors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency. Monitors independently monitor 2 or 6 crystals. Included Windows software allows the user to change the monitor parameters, save process readings in Excel formatted files and operate the monitor remotely. Monitors are Class 1 Equipment CE approved. Crystal Sensors are available in single and dual crystal versions. Typically single crystal sensors are used for short runs, with dual crystal sensors being used for longer runs. Dual crystal sensors operate with a pneumatically actuated shutter; only one crystal is used at a time. Both versions are available with liquid cooling. Nor-Cal Products offers a wide range of Crystal Feedthroughs designed to accommodate a variety of deposition systems. These feedthoughs provide the atmosphere to vacuum connection between the crystal sensor and oscillator. Various flange configurations and bolt style baseplate feedthroughs are available.

 

Nor-Cal Products, Inc.

Yreka, CA

www.n-c.com

Tel: 1-800-824-4166

E-mail:  ncsales@n-c.com

 

PhoeniXL 300 Helium Leak Detector

 

The PhoeniXL 300 Helium Leak Detector from Oerlikon Leybold Vacuum is a mobile helium leak detector suited for use in quality control labs, series production and service. The PhoeniXL 300 is qualified in industry and research applications where high vacuum engineering leak testing including clean-room compatibility is required. An optional sniffer probe allows for PhoeniXL 300 to be used as a sniffer leak detector. PhoeniXL 300 is available with oilsealed or oil-free vacuum pumps. Customer may also use their existing external backing pumps. The PhoeniXL 300 is easy to handle offering reliable measurement results, quick readiness for operation, fast response time and automatic calibration. The available LCD Display shows a trend mode, bar mode, universal display, vacuum diagrams and status information. Primary features include: lowest detectable leak rate for helium is < 5 × 10-12 mbar L/Sec; ready for operation in < 2 minutes after start-up; Helium pumping speed is 2.5 liters / second; counter flow design principle extends the service life for cathodes; normal operation at 15 mbar vacuum inlet pressure; ability to detect hydrogen in addition to helium and our exclusive 36 month warranty for the ion source. The PhoeniXL 300 offers an ergonomic and compact design that is maintenance-friendly.

 

 

 

COMBIVAC® CM52 Controller

 

The new Oerlikon Leybold Vacuum COMBIVAC® CM52 Controller for use with multiple passive vacuum sensors is now available from Oerlikon Leybold Vacuum. The CM52 operates in a broad vacuum measurement range from atmosphere down to 1 × 10-12 mbar vacuum. The CM52 Controller operates three channels including Pirani sensors on channel one and either Bayard Alpert or Extractor type sensors on channel 3. Ideally suited for a wide measurement range, the CM52 can be used in UHV and XHV applications and in radiation areas. The CM52 Controller is compact and offers the latest technology such as menu driven logic and Profibus interface and may be operated in a wide power supply range from 100 to 240V, 50/60Hz.

 

 

 

 

THERMOVAC® TTR101 Combination Pirani – Capacitance Diaphragm Sensor

 

The new Oerlikon Leybold Vacuum THERMOVAC® TTR101 Combination Pirani - Capacitance Diaphragm Sensor for use in general vacuum measurement provides reliable and accurate measurement from above atmosphere down to 3.75 × 10-4 Torr vacuum. The TTR101 provides an improved performance, life-cycle and user flexibility due to a newly designed sensor construction. The sensor module can be easily replaced by the user and the integrated calibration chip stores parameter settings thereby eliminating the need to re-program the TTR101 after sensor module exchange. The TTR101 has the ability to detect a change in pressure in only 70 milliseconds, faster than predecessor model TTR100. An on-board digital display option avoids the need for a separate display unit. Optional display units for use in remote mounting are also available if desired. Two built-in relays are included for remote switching function output. The TTR101 has remote pressure signal monitoring output capability, 0 to 10 VDC logarithmic. The required supply voltage is 15 to 30 VDC.

 

 

 

Oerlikon Leybold Vacuum USA

Export, PA

www.oerlikon.com/leyboldvacuum

Contact: Mr. Brett Rock

Tel: 1-800-764-5369

E-mail:  brett.rock@oerlikon.com

 

Portable Gas Leak Detector

 

The new PerkinElmer compact handheld electronic gas leak detector is the ideal solution for detecting gas leaks in your Gas Chromatography systems. Leaks in your system waste gas and can cause detector noise, baseline instability, and shorter column life. This portable unit detects minute leaks of any gas with thermal conductivity different from reference air. The reference gas inlet draws in ambient air for comparison to air drawn into the sample probe. A leak is detected by both LED bar graph display and an audible alarm. Detectable gases include helium, nitrogen, argon, carbon dioxide, and hydrogen. The battery is a rechargeable Ni-MH internal battery pack (6 hours normal operation) and it has an universal power adapter set (US, UK, European, Australian plugs included). The operating temperature range is 32 to 120°F (0-48°C), humidity range is 0-97%. The warranty is one year. Certifications include CE, Japan Compliance and WEEE, RoHS. The device has sleek ergonomic, hand-held design, rugged side grips for added durability, automatic shut-off capabilities, convenient carrying and storage case, optimized sample flow path, a universal power adaptor set, and a LED readout and audible alarm.

 

PerkinElmer, Inc., Instruments Headquarters

Shelton, CT

www.perkinelmer.com

Tel: 1-203-925-4600

 

OmniStar™ Gas Analysis System

 

The Pfeiffer Vacuum OmniStar™ gas analysis system is a high performance, flexible quadrupole mass spectrometer in a compact bench top package. OmniStar is capable of simultaneously monitoring up to 128 gasses from 100% to below 10 ppb with available mass ranges of 1 to 100, 1 to 200 and 1 to 300 amu. Dual filaments are standard with the OmniStar for maximum uptime as well as a secondary electron multiplier detector for fast, low level measurements. Pressure is constantly monitored via a Pfeiffer Vacuum Full Range gauge and the filaments and detector are interlocked based on a user defined trip level. Integral bake-out and inlet heaters are included to reduce backgrounds and prevent condensation. The OmniStar allows for monitoring of gas purity at point-of-use or for accurate quantitative gas mixture measurements. Process control software is standard offering many options for interfacing to the gas handling system. In addition, it is available with protection for corrosive and explosive gas mixtures and can be used over a wide range of gas pressures with many inlet options. Powerful Quadera™ software running on the latest Windows platforms, handles the analysis, operation and data collection. Quadera features matrix-inversion routines for quantitative analysis of gas mixtures even with overlapping masses as well as a Visual Studio™ module for script creation and programming of custom user interfaces. Ethernet LAN communication allows access to multiple units with high data transfer rates over standard networks.

 

PrismaPlus™ The RGA with Sensitivity, Stability and Intelligent Operation

 

PrismaPlus™, the mass spectrometer for qualitative and quantitative gas analysis and leak detection, is based on Pfeiffer Vacuum’s proven track record in the field of mass spectrometry over the last 40 years. The combination of high sensitivity, stability and intelligent operation is the added “Plus” in the PrismaPlus mass spectrometer. The PrismaPlus delivers precise and stable results in three different mass ranges (1 to 100, 1 to 200 and 1 to 300 amu) down to a detection limit of 1×10-14 mbar. With available Faraday and electron multiplier detectors, even low-level contamination can be quickly identified. In addition to displaying scan data and selectable partial pressures, direct attachment of a pressure gauge enables the PrismaPlus to also accurately monitor total pressure. The Quadera® software is not only easy to operate, it also offers an easy-to-read platform for capturing and visualizing all measured data and parameter records. Together with a wide selection of interfaces such as Ethernet, digital and analog inputs and outputs, integration into any system is easily achieved. A simple click of the mouse activates the preprogrammed functions. Custom application-specific routines may be created via a Visual Studio™ macroprogramming module. With the ability to select mass ranges, detectors, ion sources and interface options, this mass spectrometer can be employed in many areas, such as: industrial and analytical environments, R&D, leak detection and semiconductor production, as well as in coating technology. The PrismaPlus is the optimum solution for applications ranging from quality assurance and residual gas analysis through to complex, quantitative tasks.

 

Pfeiffer Vacuum, Inc.

Nashua, NH

www.pfeiffer-vacuum.com

Contact: Steve Foster, Product Manager

Tel: 1-603-578-6500

E-mail:  prismaplus@pfeiffer-vacuum.com

 

Low Cost Gas Purification

 

The R.D. Mathis Company GP100 model gas purifier has been designed to fill the needs of R & D engineers and scientists as well as production staff to provide a lightweight, compact, low cost inert gas purification system. This unit operates off of standard cylinder gas to purify inert gases to ultra high purity levels and avoids the problem of cylinder walls outgassing during storage. This unit can be placed in operation in less than 1 hour, simply by connecting the inlet and outlet fittings and a 110 VAC (or 220 VAC) electrical connection. The GP100 has been shown to purify 99.8% argon gas to 99.9991% purity as part of a worst-case test. Available literature indicates that starting with a high purity gas and using all stainless steel fittings, impurity levels as low as 10 ppm in oxygen can be obtained. While the unit was designed primarily for argon gas, it may be used for helium, xenon and neon. Applications for the unit include purification of gases for sputtering modules, crystal growth furnaces and glove boxes.

 

 

R.D. Mathis Company

Long Beach, CA

www.rdmathis.com

Tel: 1-562-426-7049

E-mail:  rlumley@rdmathis.com

 

High Performance GC/MS

 

Shimadzu Scientific Instruments’ GCMS-QP2010 sets an industry standard for speed and sensitivity. This instrument has a scan sensitivity over 60/1 for 1 pg of octafluoronaphthalene (OFN) and provides acquisition speeds to 50 scans per second. Coupled with the capability to use virtually any type of column, in EI, CI or NCI mode with a variety of inert reproducible injection systems, the GCMS-QP2010 is the most versatile, accurate, and dependable GC/MS system for any analysis. The GCMS-QP2010 features an extended mass range to 1024 Daltons (amu). Design innovations include post quadrupole focusing lenses, redesigned ion optics and front access for easy maintenance. GC-2010 features include 20 temperature ranges and patented constant linear velocity to achieve optimum separations. A range of accessories includes Shimadzu's AOC-20i Auto Injector, AOC-5000 Injection System, and PY2020 D Pyrolyzer.

 

 

 

AXIMA Resonance™ Mass Spectrometer

 

Shimadzu Scientific Instruments’AXIMA Resonance™ mass spectrometer is for the structural characterization and sequencing of biomolecules. The AXIMA Resonance ensures confident, high-quality results with high mass resolution and mass accuracy across MS and MSn analyses, variable energy CID control on the fly, high-resolution precursor ion selection up to 1000 FWHM, and highly efficient trapping functionality.

 

Multi-Dimensional Gas Chromatography System for Structure and Quality Control Analysis

 

Shimadzu Scientific Instruments’ Multi-Dimensional Gas Chromatography system (MDGC) expands the capabilities of chemists who perform target compound analyses in complex sample matrices, including natural product extracts, food and flavor components, and biological extracts. Traditionally, a singlecolumn approach to these analyses has proven to be problematic because the complex nature of the matrices makes the separation of the target analytes from matrix interference extremely difficult. This multidimensional heart-cutting system, incorporating a “multi-Deans switch,” greatly increases separation power by combining two capillary columns of different selectivity for a more efficient separation of the target analytes from a complex sample matrix. The improved separation of the analytes from the matrix interferences allows more positive identification and improved quantitative analysis of the target analytes. The key hardware component of the MDGC system is a capillary-optimized pressure-switching device (“multi-Deans switch”) that directs flow from the first column directly to a monitor detector or to the second column and detector. This device has no moving parts, but is based on the use of an advanced electronic flow controller to balance the pressure on both sides of the transfer line between columns. Multiple heart-cuts can be made from the first column without shifting the retention times of compounds eluting after the cuts, greatly simplifying method development. A fully integrated software package, which can be used with either GCsolution or GCMSsolution software, simplifies the method development and operation of the system. Column and restrictor dimensions are simply input into the wizard and the software calculates the proper pressure and column flow set points for 100 percent sample transfer through the switch. The software then displays the uncut first dimensional chromatogram in a window. A heart-cutting program is built by simply moving the mouse over the chromatogram and clicking the beginning and end of the cut times for the analytes of interest.

 

Shimadzu Scientific Instruments, Inc.

Columbia, MD

www.ssi.shimadzu.com

Contact: Kevin McLaughlin, Marketing Communications Coordinator

Tel: 1-800-477-1227

E-mail:  kgmclaughlin@shimadzu.com

 

860 Auto-Trak™ Premium Mass Flow Controllers

 

For precise mass flow control of any clean dry gas including mixtures, toxics, corrosives, and combustibles, consider the Model 860 Auto-Trak™ MFC. Sierra’s Model 860 has proven to be one of the most dependable flow controllers in the world over the last 20 years. Our Model 860 is widely used in process control, leak detection, gas distribution and scientific research applications among many others. The integrated electro magnetic control valve provides precise, instantaneous control of gas delivery over the full range of the product. The Model 860 uses Sierra’s patented sensor design with access ports to facilitate easy sensor cleaning. In addition, Sierra’s Platinum Sensor Technology eliminates zerodrift and creates excellent long-term reliability. Unique product features include accuracy of ± 1% of full scale, 316 stainless steel construction, flow ranges from 0-10 sccm to 0-5600 slpm, direct monitoring of mass flow rate, fast-response (1 second) control valve, “Primary Standard” calibration for best accuracy & NIST traceability, and it is CE approved.

 

 

 

Sierra Instruments Inc.

Monterey, CA

www.sierrainstruments.com

Contact: Matt Olin Phone: 1-800-866-0200

Email:  m_olin@sierrainstruments.com

 

Low Cost RGA

 

The ULVAC Qulee BGM Quadrupole mass spectrometer is your answer to cost effective leak detection, RGA and process gas monitoring in vacuum systems. It features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Torr, mbar, or Pascal of He, H2O, N2, O2, O2/N2 ratio with a mass range of 1 to 100 and 200 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. Qulee BGM features built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software. The minimum detectable partial pressure is 1 × 10-14 Torr. Optional differential pumping is available for applications that require it.

 

Quadrupole Mass Spectrometer

 

The compact ULVAC Qulee quadrupole mass spectrometer features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass ranges of 1 to 50 amu. A removable frontend electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. The built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 15 mTorr can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-12 Torr.

 

 

High Sensitivity RGA

 

Featuring the highest sensitivity and largest mass range of the series, ULVAC has introduced two new members to the Qulee family of Residual Gas Analyzers. The HGM 202 and HGM 302 units have measurable mass ranges of 1 to 200 and 1 to 300 amu respectively, with a minimum partial pressure measurement detection range of an amazing 10-15 Torr. Outstanding for use in research experiments such as thermal desorption gas analysis, the Qulee units are as easy to use as they are sensitive. Onetouch operation of the measurement display and control electronics eliminates the need for a PC to operate the unit. However, the included QCS software package enables a host of additional functionality to this high end RGA, such as auto filament shut-off in the event the analyzer comes in contact with unacceptably high levels of corrosive gasses, such as HF, CL, NF2, HBR, CF3, SiH2Cl2 and others that the user is able to program. Maximum sensor operating temperature is 250°C and the HGM can be baked up to 300°C. Delivery is from stock.

 

ULVAC Technologies, Inc.

Methuen, MA 01844

www.ulvac.com

Tel: 1-978-686-7550

E-mail:  sales@ulvac.com

 

SMARTSTATION Family of Leak Detection Systems

 

The SMARTSTATION family of Leak Detection Systems from VTI combines the latest in digital sensor technology, system networking and proven industry-tested design to provide leading edge solutions to the production leak testing market. The detectors take the latest developments in sensor technology and data communications and integrate these in systems that are built on years of production line and stand-alone installation experience. VTI understands that production requirements, irrespective of the industry of application, focus on meeting a specific test specification, repetitively, reliably, and with a high confidence factor while maximizing production through-put and ease of use. With this in mind, VTI designs SMART to simplify operational and maintenance tasks. Operation is a breeze with built in diagnostics and automatic calibration routines to insure correct operation. Maintenance is equally straightforward with systems constructed from standard non- proprietary components with easy access. They can operate ‘stand-alone’, in sequence with other SMARTSTATIONS or as automated Custom Systems, with each unit providing a key function in a step-by-step component leak detection process. The SMARTSTATION system line covers all aspects of component leak detection ranging from Pressure Decay techniques to cover relatively large leaks, through Helium or Refrigerant “sniffing” for locating small leaks. Production facilities often utilize a combination of these techniques to leak test products with progressively higher sensitivity along the production line. As volume increases, an automated Custom Systems to fulfill production needs is often the next logical step. In application, these systems are desired to operate complimentarily and integrate the flow of information such that the test facility can operate as a whole unit.

 

Calibrated Leaks and Calibration Services

 

VTI is recognized as a world leader in manufacturing calibrated leaks. The ACCU-FLOW brand of calibrated leaks includes every style of leak to address the many applications and leak testing techniques available. The ACCU-FLOW products include high precision helium leaks, general purpose helium leaks, capillary leaks for all gases, refrigerant leaks, open-style (or orifice) leaks, mixed-gas leaks for RGA calibration, positive shut-off leaks for “dead space” sensitive applications, sniffer leaks, variable leaks, and leaks made into test parts. VTI also specializes in the R&D leaks for the unique or difficult gases that may be required for very specific applica- tions. For calibration services, VTI offers A2LA accredited and NIST-traceable recalibration and repair services for all brands, all gases, and all leak rates. Accredited for leak rates from 1 × 10-10 atm-cc/sec to 100 atm-cc/sec, with measurement capabilities exceeding this range. Vacuum gauge calibration provides accredited calibration of all vacuum/pressure gauges from 1 × 10-7 Torr to 3000 psig. Volume calibration also is accredited for calibrations of volumes from 10 cc to 25 L.

 

 

Custom Leak Test Systems

 

With many years of custom system design and fabrication as a backdrop, a staff with many man-years of knowledge and experience in vacuum, leak detection, system design and production management, VTI offers an unparalleled capability to customers requiring custom leak detection system packages. Product quality, reliability and consistently high standards of service and support are all elements of the core company philosophy demonstrated by the NIST and A2LA accreditation standards the company maintains. All this is set in a 60,000 square foot facility in Oak Ridge, TN where state-of-the-art tools from CAD to CNC machining are used to produce leading-edge systems. VTI has long been known for offering quality system design with attention to detail. Today, this is taken to the next level with the implementation of the most advanced 3D mechanical design software available. The ability to design the system and display the ‘assembly’in full color 3D format as shown here greatly facilities communication of the design and design issues to the customer. This both saves time and provides the customer with a clear picture every step of the way. VTI meets customer requirement at the lowest cost, often less than the cost of an ‘off-the-shelf’ solution that may not even fit the application, is addressed with this software. CAD techniques enable VTI to reduce its concept-to-manufacturing time, visualize and ‘tweak’designs quickly and inexpensively before any metal is cut and achieve faster delivery times due to less shop rework/fitting.

 

Vacuum Technology Inc.

Oak Ridge, TN

www.vacuumtechnology.com

Contact: Danielle P. Westcott, Sales and Marketing Coordinator

Phone: 1-865-481-3342

E-mail:  sales@vacuumtechnology.com

 

MD-490S Portable Leak Detector

 

VIC’s MD-490S Leak Detector is a portable helium sniffer leak detectors. With a response time less than 0.5 seconds, sensitivity of 10-8 atm-cc/sec, and the ability to compensate for background variation, VIC's MD-490S portable leak detector is an affordable mass spectrometer features a dry, maintenance-free pump, continuous operator feedback, and comes complete with standard probe (includes built-in calibrated leak and automatic calibration sequence traceable to N.I.S.T. with certificate of calibration that meets ISO 9000 quality standards) that some manufactures sell as an extra-cost option. The MD-490S even has a remote display and vibrating probe for noisy work environments.

 

 

 

MS-60 Portable Dual Sector Mass Spectrometer Helium Leak Detector

 

The MS-60 series quickly and accurately detects leaks for a broad range of applications and is the most advanced portable helium leak detector in the industry, offering highest sensitivity and fastest test-time. The MS series utilizes VIC’s own state-of-theart dual magnetic sector helium mass spectrometer for error-free operation in a complete range of industrial, dry, and clean room models. The Touch-Screen GUI allows for greater system control and monitoring during system startup and operation. Displays include system status, accept/reject status, system health, setup, calibration and other diagnostic functions. The standard 7 cfm direct drive foreline/roughing pump permits faster cycle times with an optional 10.6 cfm available. Internal or external calibration is included for flexibility. It has Digital Input/Digital Output, is fully automatic with a dual magnetic sector high resolution mass spectrometer with three modes of operation.

 

 

 

Vacuum Instrument Corporation

Ronkonkoma, NY

www.vicleakdetection.com

Tel: 1-631-737-0900

E-mail:  sales@VicLeakDetection.com

 

YTI Cryogenics Offers 24/7 Polycold and Telemark Field Service

 

YTI Cryogenics, a division of Yeagle Technology Inc. (YTI), provides field service and 24-hour/7-days a week emergency service for Polycold™ and Telemark™ Cryogenic Refrigeration Systems. Service vehicles are outfitted with a complete array of test equipment, permitting diagnosis of any vacuum system or electronics problem. YTI is the premier East Coast service center. YTI cryogenic technicians are certified and licensed to meet all EPA mandates for proper handling of refrigerants and use EPA-approved recovery equipment.YTI has been providing field service for over 25 years, giving them the experience to handle all Polycold and Telemark service needs. YTI stocks a full line of spare parts and replacement charges for Polycold, Telemark and other systems. In addition to emergency service,YTI has complete preventative maintenance programs to keep cryogenic refrigeration equipment operating.YTI also offers rental systems, complete system rebuilds, low temperature conversions, high capacity conversions, circuit conversions and oil control upgrades.

YTI offers new and rebuilt vacuum systems customized to specific applications and variety of vacuum components, including feedthroughs, vacuum pumps, power supplies, controllers, process integration components, valve controllers and many commodity items.

For information about theYTI service program, contact the service department at 860.429.1908 × 11 or email sales@ytionline.com.

 

YTI Cryogenics

 www.yticryogenics.com

 

New Range of Dry Scroll Vacuum Pumps Launched by Edwards

 

Crawley, West Sussex, UK … Edwards, a leader of vacuum and abatement technology, has launched a new range of dry scroll vacuum pumps which gives exceptional performance in scientific, laboratory, research and development applications, and sets a new high standard for dry pumping in the industry. The novel nXDS pump is more reliable and requires less maintenance than alternative pumps, resulting in less downtime and a low cost of ownership. It also has a lower environmental impact, enabling users to reduce their carbon footprint. With exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features, Edwards’ nXDS is the best performing pump in its class. It is an environmentally-friendly oil-free vacuum pump that has no lubricants in the vacuum. As a dry vacuum pump, nXDS has many advantages to oilsealed pumps as there is no need for regular oil changes and users can benefit from low maintenance. The advanced scroll design and tip-seal technology mean the pumps have a longer lifetime compared to other products. The tip seals may last up to five years, which significantly increases time in service and lowers cost of ownership. The pumps are also easy to service which results in minimal downtime and makes them economical to run. Tip seals can be replaced in less than 10 minutes in the field using basic workshop tools. The efficient pumps feature intelligent control functions. Control modes include serial, USB, remote parallel and analogue as well as manual operation with simple up / down buttons. Full serial communications mode provides feedback about the state of the pump, enabling scientists to optimise their process and schedule routine maintenance conveniently. It also assists with preventative maintenance regimes, as the nXDS pumps indicates when service is needed via a light indicator on the control panel. nXDS is incredibly easy to install and run. It is a simple ‘fit and forget’ pump which provides excellent performance for many years. It has low acoustic noise of only 52dB(A) and is extremely quiet in the laboratory - up to 20 times quieter than some comparable pumps. nXDS has a standby mode, which reduces power consumption and users can set speeds ranging from 66% to 100% of full speed. As a result, users can save money associated with energy use, while also improving their carbon footprint. “This new generation of pumps is a major step forward for vacuum pumping in scientific and related markets,” says Ian Olsen, market sector manager (scientific) at Edwards. “The nXDS is based on some of the proven technology of Edwards’ XDS dry scroll pump brought right up to date with much improved performance and increased functionality. Its green credentials and low cost of ownership make it the small dry pump of choice for today’s most advanced technologies, saving users time, energy and money.”

Users can choose from four sizes to best suit their pumping requirements. The nXDS6i, nXDS10i, nXDS15i and nXDS20i have exceptional pumping speeds between 6 m3hr-1 and 20 m3hr-1 combined with class leading ultimate vacuum levels. The 10i and 15i in particular having base vacuums below 10-2 mbar.A gas ballast switch allows for applications involving water vapour to be easily managed.

It delivers excellent performance in applications including beam lines and high energy physics, backing turbo molecular pumps, distillation, extraction and filtration, freeze drying, solvent recovery, rotary and centrifugal evaporators, sputtering, scanning electron microscopes and focused ion beams, general laboratory bench top and clean pumping.

 

Edwards

www.edwardsvacuum.com/nXDS

 

 

YTI Introduces ULTRA SOURCE Large Hearth E-beam Source

 

Yeagle Technology Inc. (YTI) has introduced the ULTRA SOURCE e-beam source for EB-PVD (Electron Beam-PhysicalVapor Deposition) applications. It retains all the advantages of the original Sloan e-beam source including: large hearth capacity, high deposition rates, long filament life, and industrial reliability, but has been re-engineered for improved productivity and uptime.

With theYTI ULTRA SOURCE there is no longer any need to disconnect water fittings when disassembling the source for routine maintenance.All wear surfaces are now stainless steel instead of copper. Water leaks caused from removing the hearth have been eliminated. The YTI ULTRA SOURCE features large, up to 40cc pockets, interchangeable crucibles, a 270º bent beam design for longer filament life and XY sweep capability. For those using original Sloan multi-pocket ebeam sources the new ULTRA SOURCE shares many of the same components including: expendables, magnets, anodes beam formers, filament blocks and other parts.

YTI offers new and rebuilt vacuum systems customized to specific applications and variety of vacuum components, including feedthroughs, vacuum pumps, power supplies, controllers, process integration components, valve controllers and many commodity items. In addition, YTI Cryogenics provides field service for Polycold™ and Telemark™ cryogenic refrigeration systems and stocks a full range of spare parts and replacement charges.

 

For information, contact: 860.429.1908 × 11 or email sales@ytionline.com.

 

Yeagle Technology Inc.

 www.ytionline.com