Instrumentation & Metrology

Product Descriptions

electronics. The transducer line includes the 902 Piezo, MicroPirani, hot and cold cathodes, and dual gauge devices that cover an extended range of vacuum measurement. Transducers can provide measurement readouts to your lab computer or the 900 controller. The 937B controller allows for the simultaneous readout of six gauges and offers twelve independently adjustable setpoints. Gauge styles for the 937B include piezo, pirani, and hot and cold cathode. For detailed product information, download our VacuGauge catalog at www.ancorp.com.

 

A&N Corporation

Williston, FL

www.ancorp.com

Tel:: 1-352-528-4100

E-mail:  sales@ancorp.com

 

 

Digital Mass Flow Controllers and Vortex Shedding Meters

 

Aalborg® Instruments’ Electronics Division produces hightech Analog and Digital Gas Mass Flow Meters, Controllers, and Vortex Shedding Meters. In addition, the company’s diversified product line includes Paddle Wheel Meters and fixed or adjustable rate Peristaltic Pumps. Input/Output devices, Microprocessor-Driven Command Modules, Proportionating Electromagnetic Valves, Stepping Motor Valves, and Flow Meter accessories are available. Aalborg® ’s laboratories perform NIST Traceable Flow Calibrations and Services for Mass Flow instrumentation. These services are also accessible to other manufacturers with comparable flow products. In keeping with the company’s commitment to provide cutting-edge technology and the highest quality products and services attainable, all products are individually made and calibrated to conform to or exceed customer requirements.

 

 

 

 

Rotameters

 

Aalborg® Instruments’ Variable Area Division manufactures a diversified line of single and interchangeable multiple tube Flow Meters for gases and liquids. Constructed of aluminum, brass, stainless steel, and PTFE for high-purity or corrosive liquids, Rotameters measure a wide range of liquid and gas flow rates from micro-flow (laboratory processes) to high flow (industrial applications). The product line also includes Optical Sensor Switches, Gas Proportioners, Kits, Barstock Valves, and PTFE Needle Valves. Aalborg® ’s laboratories perform NIST Traceable Flow Calibrations and Services for Flow Meter instrumentation. These services are also available for other manufacturers’ comparable products.

 

Aalborg

Orangeburg, NY

www.aalborg.com

Tel: 1-845-770-3000

E-mail:  info@aalborg.com

 

 

Leak Test Instrument Model ME2

 

ATC’s Mass Extraction Technology takes advantage of the Micro-Flow phenomena and gas expansion, which occurs while the test is conducted in a vacuum. ATC’s ME2 demonstrates sensitivity similar to most of the helium mass spectrometry applications, typically starting from 5×10- 7 sccs using air detecting from 0.1 micron. Popular applications include bottles, blisters packs, sterile trays, and injected products. ATC’s Model ME2 also offers material coating integrity testing. Measure the solubility or permeability of various layers and materials to gases and moisture ingress. Cut permeability test time from weeks to minutes.

 

 

Leak Test Instrument Model VE2

 

ATC, Inc.’s Model VE2 is used in vacuum applications from 1×10-5 sccs, utilizing ATC’s patented Mass Extraction technology. Designed to meet increasing demands for a versatile leak detection instrument with shorter cycle time, flexible controls and Ethernet interface which enables remote viewing of system operation and data collection. The unrivaled sensitivity (replaces many tracer gas applications), direct and repeatable measurements with long-term stability in variable ambient conditions are exceptional.

 

 

 

 

Leak Test Instrument Model ME3

 

ATC offers a new generation of vacuum instruments, the ME3, which uses our innovative Mass Extraction technology. The ME3 features in-line high speed Container Closure Integrity testing for pharmaceutical and medical device packaging. It offers a high-speed evacuation circuit for in-line process testing where short test times are required. The ME3 includes an automated vacuum test circuit, uniquely designed for ultra-tight leak testing. It tests for both large leaks and fine leaks, displaying the real time pressure and flow rates. Use the ME3 with ATC’s Leak-Rx© software program for a complete testing solution. Leak-Rx© is a Windows based program developed by ATC, which is a US-FDA 21CFR Part 11 compliant version of our Leak-Tek© software. Leak-Rx© has a protected database and is a user friendly data acquisition program with an analysis and monitoring platform that tracks user actions within the software. Leak-Rx© features account administration, audit trails, file validity, and time stamped records export.

 

Advanced Test Concepts Inc. (ATC, Inc.)

Indianapolis, IN

www.atcinc.net

Tel: 1-317-328-8492

E-mail:  atc@atcinc.net

 

 

VS Series Leak Detector

 

Agilent’s VS Series Leak Detectors combine the simplicity of two-button operation with advanced expert system intelligence, providing powerful capability and enabling a broad range of test methods for specific applications. Robust design innovations allow the VS series to conform to rigorous industrial standards and operate dependably in the most challenging environments. Features include: start and vent pushbuttons permit extremely simple day-to-day operation; intuitive navigation allows easy access to vast system capabilities; programmable test sequences minimize operator error and maximize production efficiency; and high definition touch screen display offers a wide range of languages and units of measure for worldwide usage.

 

 

 

 

XGS-600 Vacuum Gauge Controller

 

Agilent’s XGS-600 makes the complex task of vacuum measurement simple for you. The high-performance, high-capacity rack controller provides cost effective monitoring and control of multiple roughing, high vacuum and ultra high vacuum gauges in a standard half-rack package. The XGS-600 requires from 50 to 75% less rack space than other controllers. For systems and end-uses that require measurement and tracking of pressure, the XGS-600 provides power to, and records signals from multiple vacuum gauges. In addition, the XGS-600 can also communicate pressure readings to other elements of a system to indicate a change in status triggered by set points, or to activate other elements, such as a high-vacuum pumps or valves. Using state-ofthe-art signal processing electronics, the XGS-600 features fast signal response of less than 20 ms while still allowing users to simultaneously operate up to twelve convection type gauges, or up to four hot filament or cold cathode gauges combined with four convection gauges in one unit. A programmable dot matrix LCD displays up to 8 gauges at one time and can be configured to a font viewable from 20 feet. Simple screen organization and navigation make the unit extremely easy to use. No manual is needed for operation.

 

 

FRG-700 Full-range Vacuum Gauge

 

Agilent’s FRG-700 is a full range gauge that combines inverted magnetron and Pirani technologies in a single, compact and economical package to measure process and base pressure from 5 × 10-9 mbar to atmosphere (3.8 × 10-9 Torr to atmosphere). The single, compact unit with one logarithmic analog output signal significantly reduces the complexity of installation, setup and integration. The benefit is reduced cost and reduction in valuable space requirements. The FRG-700 has no filament to burn out, is easy to clean, and has excellent ignition properties. An LED indicator illuminates when high voltage is on. Applications include high vacuum pressure monitoring, base pressure measurement for evaporation and sputtering systems, and general vacuum measurement and control in the medium and high vacuum range.

 

 

Agilent Technologies

Vacuum Products Division

Lexington, MA

www.agilent.com/chem/vacuum

Contact: Walter Stevenson (Steve) Palmer, Manager, Marketing Communications, Americas

Tel: 1-781-860-5426 or toll-free: 1-800-882-7426 Ext. 5426

E-mail:  steve.palmer@agilent.com

 

 

Mass Flow Measurement and Control for Aggressive Gases

 

Alicat Scientific introduces its MS and MCS series of mass flow meters and controllers for aggressive gases, now with compatibility for silane (SiH4 ) and six other aggressive gases. Using 316L stainless steel construction and FFKM elastomers to resist corrosion from gases like ammonia (NH3 ) and nitrogen trifluoride (NF3), the MS and MCS series are available in full-scale ranges from 0-0.5 SCCM to 0-3000 SLPM with turndown ratios of 100:1. Alicat’s innovative laminar flow technology allows real-time gas selection from more than 30 standard gas and gas mix calibrations in its MS and MCS series, which require no warm-up time and feature industry-leading 10-ms meter and 100-ms control speeds and lifetime warranties. Alicat MS and MCS series mass flow instruments offer precision solutions to photovoltaic or semiconductor coating applications that require the use of aggressive gases. See www.alicat.com/msmcs for details.

 

 

Mass Flow Controller for Vacuum Deposition

 

Alicat Scientific’s sub-100 millisecond control speeds are used to prevent costly target poisoning in vacuum deposition processes. Alicat’s MCV series of mass flow controllers for vacuum marries this ultra-fast control speed to an integrated positive shut-off valve, providing a leak-tight shutoff of 1×10-9 atm-scc/s (He) to prevent contamination of the coating process when no gas is flowing. The MCV series is available in full-scale ranges from 0-10 SCCM to 0-20 SLPM and comes standard with Alicat’s industry-leading laminar flow technology with 200:1 turndown ratios, no warmup time and 30 on-board gas and gas mix calibrations. Furthermore, wet back every mass flow product with customer support and a lifetime warranty, an industry first. All of this comes in a device that weighs just 3 pounds and is only 1.5 inches deep, making the Alicat MCV a cost-saving, space-efficient choice for your deposition process. See www.alicat.com/mcv for details.

 

 

 

Ultra-Low Pressure Drop Mass Flow Meters and Controllers

 

Alicat Scientific introduces its new MW and MCW “Whisper” series of mass flow meters and controllers with full-scale pressure drops as low as 3.6 mbar, or 0.052 PSI. The Whisper series combines Alicat’s innovative laminar flow technology with low-drop proportional control valves and high-sensitivity differential pressure sensors for use in systems with very low differential pressure availability. This innovation is accomplished without compromising Alicat’s standard industry-leading 200:1 turndown ratio, 10-ms meter and 100-ms control speeds and real-time gas selection from 30 on-board gas and gas mix calibrations. The MW and MCW series are available in full-scale ranges from 0-0.5 SCCM to 0-500 SLPM, and even the 0-500 SLPM controller at full-scale exhibits a pressure drop of only 47 mbar, or 0.69 PSI. Alicat backs every mass flow product with customer support and a lifetime warranty. For applications in which minimizing pressure drop is essential, the new Alicat Whisper is leading the way. See www.alicat.com/whisper for details.

 

Alicat Scientific Inc.

Tucson, AZ

www.alicatscientific.com

Tel: 1-520-290-6060

E-mail:  info@alicatscientific.com

 

 

IPS-4 Integrated Photometric Spectrophotometer Uses UV & Single /Multiple Wavelength IR

 

Model IPS-4 analyzers from AMETEK Process Instruments are able to measure up to eight components using the most favorable absorptions in both UV and IR spectrums eliminating cross sensitivity concerns. The highly robust unit combines a non-dispersive infrared (NDIR) platform and integrated sampling system with a field-proven UV-Vis platform. The versatile unit additionally offers unparalleled reliability and digital connectivity and is durable enough to be installed outdoors in wash-down, hazardous, and environmentally harsh locations. The Model IPS-4 full spectrum analyzer performs measurements simultaneously in the UV spectrum using diode array detection and in the IR spectrum using single beam multi-wave length technology. The readings are then cross correlated. The UV readings are further verified (Optical Bench Electronic Verification) by evaluating detector response to known change in lamp intensity, while the single beam/ multiple wave length IR technology ratios the signal output of a desired component to a reference to minimize common mode errors. The IPS-4 is engineered to be a fully integrated, turnkey solution that AMETEK will customize to specific end user requirements. Custom features include automatic zero and span, fluid injection, corrosion-resistant materials, filtration, pumps or eductors, and heated sample lines. The unit’s optical system incorporates long lifetime components and is designed for high light throughput and increased reliability. AMETEK Process Instruments is a unit of AMETEK, Inc. For more information, contact Randy Hauer at 1-412-826-2494.

 

 

9000RM Gas Analyzer Can Be Used Alone or Integrated into CEM Systems

 

The AMETEK Model 9000RM is a rugged single or multi-component gas analyzer housed in a single 19-inch, rack-mountable unit that can be integrated into Continuous Emission Monitor (CEM) systems or used alone for a variety of gas monitoring applications. The 9000 RM can be configured to measure most gas species that absorb in the UV (examples NOx , H2 S and SO2 ). The optional low range white cell provides longer path length for measuring lower concentrations. For example, the minimum full scale for SO2 is 25 ppm, with an accuracy of 1% of full scale. Resolution better than 0.02 nm is provided by high intensity, line source lamps. These sources emit at a fixed wavelength, providing great measurement stability, and emit low total power, removing the potential for sample photolysis. The high resolution enables unparalleled linearity over a wide dynamic range (less than 1% deviation over 4 to 5 orders of magnitude) that, in turn, leads to simple, robust data analysis. The simple and robust design of the Model 9000 RM is complemented by its powerful data processing capabilities. All parameters accessible, graphing, logging, trending are available by remote and local access. The user-friendly keyboard and built in display enables programming of such variables as timing and frequency of local zero and span checks and calibration gas values. The Model 9000 RM supports RS-232, Modbus/RS485 and Web Interface/ Ethernet connectivity. Its modular design turns trouble-shooting and repair into simple tasks that can be performed on site in minutes by plant personnel. AMETEK Process Instruments is a unit of AMETEK, Inc., a leading global manufacturer of electronic instruments and electric motors.

 

AMETEK Process Instruments

Pittsburgh, PA

www.ametekpi.com

Tel: 1-412-828-9040

E-mail:  sales.info@ametek.com

 

 

Production Line Thin Film Composition and Thickness Monitor

 

The Axic Precision P-1000 readily analyzes compound thin films utilized in semiconductor, superconductor, magnetic and applications. This fully automatic system provides rapid composition and thickness analysis of films in the production environment. In process development, the Precision P-1000 is utilized to characterize the effect of variables on the film deposition process. Once the process is defined, the Precision P-1000 is utilized as a quality control monitor to insure the composition and thickness of the production films. It utilizes a helium environment spectrometer, thus eliminating the vacuum requirement and greatly improving system reliability. Most analyses are performed using the wavelength dispersive spectrometer (WDS), giving high precision measurements. For some applications, the energy dispersive (EDS) spectrometer is used simultaneously with WDS to optimize analysis time e.g. thick silver films (20,000Å - 30,000Å) on Ti-Ni. The Precision 1000-B® system is employed for the precise rapid measurement of thin films for composition and thickness non-destructively. The system is compact in design, easily operated and convenient in operation.

 

 

 

AXIC Inc.

Santa Clara, CA

www.axic.com

Tel: 1-408-980-0240

E-mail:  nadine@axic.com or info@axic.com

 

 

Fully Tested and Warranted Vacuum Equipment

 

Bid Service LLC has been supplying fully tested and warranted equipment to the semiconductor and scientific community for over 30 years. Our 30-day money back policy has become the standard of the industry. Our reputation for quality and integrity is second to none.

 

Bid-Service LLC

Freehold, NJ

www.bidservice.com

Tel: 1-732-863-9500

E-mail:  sales@bidservice.com

 

 

Integrated Vacuum Controller

 

The VACUUBRAND® CVC 3000E C3 Integrated Vacuum Controller combines a sophisticated vacuum controller with chemistry solenoid valve and check valve for a stand-alone unit suitable for use with virtually any lab vacuum source or application. The CVC 3000 controller features an integrated corrosion resistant capacitive transducer allowing control from atmosphere to 0.1 mbar/Torr/hPa in your choice of units. Digital and analog displays provide both precise readings and trend indication. Several different control modes are available including the option to program up to ten multi-step routines for degassing, evaporation of solvent mixtures and other compound procedures. A bi-directional RS232 port allows process validation, or remote controlling of all parameters. Integrated check valve helps protect the application from fluctuations in the vacuum source and potential cross-contamination. An optional VACUU*BUS “plug-and-play” external corrosion resistant Pirani transducer can extend the control range to 10-3 mbar/Torr/hPa.

 

 

Vacuum System Provides Electronic Control of Two Applications

 

The VACUUBRAND® PC620 NT integrated vacuum system provides independent electronic control of two vacuum applications simultaneously. Integrated check valves protect each application’s independent vacuum level settings and virtually eliminate potential for cross-contamination. Vacuum is provided by a powerful MD4C NT diaphragm vacuum pump with a flowpath consisting of chemically-resistant fluoropolymers. An ultimate vacuum of 1.5mbar is deep enough to evaporate most common solvents at room temperature; free air capacity is a robust 63 liters/minute. High flowrate at working vacuum levels provides the power required for most large lab applications. Typical maintenance interval is 10,000-15,000 hours—several years in typical operation. Two independent CVC3000 vacuum controllers with integrated vent valves allow programming of set points or storing of up to ten complex pumping programs. A menu-driven interface allows intuitive operation. Solvent recovery glassware and a space-saving stand complete the package.

 

BrandTech® Scientific, Inc.

Essex, CT

www.brandtech.com

Contact: Christian Petrilli, Director of Marketing and Distributor Relation

Tel: 1-860-767-2562 Ext. 121

E-mail:  cpetrilli@brandtech.com

 

 

mini CORI-FLOW™ Mass Flow Meters/Controllers

 

The compact, low flow mini Coriolis Mass Flow Meters/ Controllers are used for both for liquids and gases. Bronkhorst Cori-Tech B.V. realized a compact, cost-effective Coriolis Mass Flow Meter/Controller for accurate measurement and control of very low flow rates. The unique design of the miniature Coriolis sensor has unsurpassed performance, even with changing operating conditions in pressure, temperature, density, conductivity and viscosity. Unlike many other Coriolis flow meters, mini CORI-FLOW™ offers integrated PID control and close-coupled control valves or pumps, thus constituting very compact, cost- and space-saving, precise Coriolis Mass Flow Controllers for low flow liquid and gas regulation. The mini CORI-FLOW™ has stateof-the-art digital technology, offering fieldbus interface options and additional functions such as tantalization and alarms. The instruments can be tuned according to customer requirements using the RS232/fieldbus interface and a number of free to use software tools. The mini CORI-FLOW™ was designed to enable easy exchange of traditional thermal MFCs. mini CORI-FLOW™ flow controllers have the same footprint and also electrically the instruments feature the same options for analog and fieldbus communication. Compared to thermal MFCs, Coriolis based flow controllers are more accurate, faster and offer independence from fluid properties.

 

Bronkhorst USA Inc.

Bethlehem, PA

www.bronkhorstusa.com

Tel: 1-610-866-6750

E-mail:  sales@bronkhorstusa.com

 

 

835 Vacuum Quality Monitor (VQM™ )

 

The 835 VQMTM from the Granville-Phillips® Product Center of Brooks Automation is the next generation in gas analysis. The Series Vacuum Quality Monitor (VQM) System is a gas analysis instrument based on Autoresonant Ion Trap as a Mass Spectrometry (ART MS) technology that provides an 85ms scan for the entire 1 to 145 amu range (or 120ms for 1 to 300 amu) while drawing less than 15 watts of power. The 835 VQM transforms complex measurement data into comprehensive, easily usable information. Other advantages of this technology include simple, single gas calibration, no zero blast, high resolution, and excellent performance at UHV levels. And, because the controller is separate from the sensor, system cost can be greatly reduced by using one controller for multiple sensors by simply moving the cable. The 835 VQM can be used for contamination detection, leak detection, vacuum integrity, process monitoring and more. For operating at process pressures, a differential pumping system is also available.

 

Brooks Automation, Inc.

Granville-Phillips Product Center

Longmont, CO

www.brooks.com/vqm

Tel: 1-303-652-4400 or Toll-Free 1-800-776-6543

E-mail:  vqm@brooks.com

 

 

MultiFlo™ Capable GF40 and GF80 Thermal Mass Flow Controllers and Meters

 

Brooks Instrument introduces the GF40 and GF80 thermal mass flow controllers (MFCs). These MFCs provide outstanding performance, reliability and flexibility in many gas flow measurement and control applications. The Brooks GF40/GF80 offers a highly configurable platform based on modular architecture, enabling drop-in replacement for quick and easy upgrades. These MFCs give users an opportunity to standardize on one MFC over a broad range of applications providing reduced inventory and operational costs. The GF40/GF80 MFCs operate with Brooks’ patented MultiFlo™ technology enables superior actual process gas accuracy. MultiFlo also gives users the ability to reconfigure the MFC for a new gas and range without the time and cost of removing the device from the gas line. The MFCs are also equipped with an independent diagnostic/service port to troubleshoot or change flow conditions without removing the MFC from service. Brooks GF40/GF80 MFCs features fast sub one second settling times and corrosion-resistant Hastalloy sensor tube for long-term stability. The superior valve technology provides minimum leak-by, maximum turndown and fast response that reduces overall gas panel cost and increases throughput. Additionally, the measurement accuracy of every device is verified using traceable primary calibration standards.

 

 

Expanded Digital Communications Capabilities in the 4800 Series Mass Flow Controllers/Meters

 

Brooks Instrument, a world-leading provider of advanced flow measurement, control, and level solutions, enhanced digital communications capabilities on the 4800 Series mass flow meters and mass flow controllers. In addition to the analog and RS232 communications, customers can now choose Profibus or RS485 that is delivered in a small field installable module that mounts directly on top of the 4800 Series device. The 4800 Series with Profibus supports both DPV0 cyclic and DPV1 acyclic data communication. It has a standard 9 pin female D-connector for signal and an M5 connector for power. Baud rates from 9600 up to 12M are supported, which are automatically detected. The 4800 Series with RS485 has a physical layer with proprietary “S-Protocol” based on HART® command set. It has a standard 15 pin male D-connector for signal and power. Baud rates from 1200 to 38.4K are supported with a top accessible rotary switch for baud rate selection

 

Brooks Instrument

Hatfield, PA

www.brooksinstrument.com

Contact: Christine Batycki, Global Mktg Communications Manager

Tel: 1-215-362-3527

E-mail:  Christine.Batycki@BrooksInstrument.com

 

 

 

EVOQ Qube and EVOQ Elite LC-TQ Mass Spectrometer Systems

 

Bruker’s two newest LC-triple quadrupole (LC-TQ) mass spectrometers, the high-performance EVOQ Qube™ and the ultra-high sensitivity EVOQ Elite are setting new standards for analytical performance leadership. The EVOQ LC-TQ systems were introduced last fall incorporating Bruker’s Advance™ Ultra-High Pressure Liquid Chromatography (UHPLC) system. The EVOQ platforms feature several major innovations including Vacuum-Insulated Probe heated electrospray ionization (VIP-HESI) technology. A first for the industry it preserves and ionizes thermally fragile molecules without compromising sensitivity. Active Exhaust atmospheric pressure ionization source has a robust orifice vacuum interface, which significantly enhances the quantitative robustness for difficult samples.The proprietary Interlaced Quadrupole Dual Funnel (IQ-DF™ ) is ‘flat-tuning’ that maximizes the sensitivity of the instrument. Novel PACER™ software enables ‘exception based data review,’ a feature that significantly reduces the error rate for quantitative analysis Bruker’s patented lens-free triple-quad mass filter design is standard on the EVOQs, enhancing MRM performance. Other high-performance TQ features include the novel APCI ion source, fast 14,000 amu/sec scan speed and 25 milliseconds positive/negative ion switching, bringing the benefit of industry-leading TQ performance and analytical power to the user.

 

Bruker Corp.

Madison, WI

www.bruker.com

Tel: 1- 1 608 276 3814

E-mail:  michael.ruf@bruker-axs.com

 

 

NIST Traceable Gas Flow Leak Standards

 

Cincinnati Test Systems (CTS) offers a wide range of calibrated leak standards, vacuum hardware, and custom assemblies for laboratories, universities, research facilities, testing facilities, manufacturers of ultra high purity gas delivery systems, and semi-conductor manufacturers. The calibrated leak standards are all manufactured on site and are calibrated in CTS’s world class A2LA accredited gas flow calibration laboratory. Calibrated leak standards are supplied with N.I.S.T. traceable documentation for calibration in compliance to ISO/IEC 17025. These flow standards are available for most gases ranging from 10-5 to 10-1 atm-cc/s. For helium they are available ranging from 10-10 to 10-1 atm-cc/s. CTS is a leader in the manufacture of leak test instruments as well as fully automated leak detection systems. Known in the industry for qual- ity, performance consistency and accuracy, CTS offers solutions that optimize leak testing sensitivity and signature analysis monitoring as well as analyzing and communicating the data. CTS is a TASI Group company.

 

 

 

Nitrogen Purge System

 

Cincinnati Test Systems (CTS) released its patent pending Nitrogen Purge system that interfaces with the TracerMate CS instrument. Nitrogen Purge utilizes a layer of flowing gas along a tool sealing area to isolate atmospheric gases inside the sealed trace gas accumulation chamber, keeping a controlled background signal. When utilizing this newly designed sealing and background controlling feature repeatable testing may be utilized at test ranges of 1×10-6 scc/sec Helium measurement ranges. The Tracer-Mate CS utilizes specially integrated valves to control this system during the fill, evacuation, and test cycles. Nitrogen Purging Clamshell technology performs much differently than a typical clamshell testing method since the technology displaces the atmosphere inside the Purging Clamshell, lowering the background tracer gas signal by approximately one decade. The Purging Clamshell test fixture completely isolates the area under test from the plant environment and any background tracer gas present. With a typical clamshell test system and a manual “sniffing” operation, fluctuations in the ambient tracer gas background prevent setting the reject setpoint too low and the system may be plagued by false failures as the tracer gas present in ambient region re-enters into then clamshell enclosure. The Purging Clamshell technology facilitates setting the reject set-point lower than the background signal that is measured in the test environment and effectively prevents false failures.

 

 

TracerMate CS Compact Bench-top Instrument

 

The Cincinnati Test Systems (CTS) TracerMate CS - Tracer Gas Evacuate and Charge instrument interfaces with various multi-gas leak detector instruments. The standalone bench-top design is easy to operate and is offered as an optional self-contained test cart, or as a customized solution to integrate easily into a production testing environment with your selected Tracer Gas detector. The TracerMate CS testing modes provide the option to sniff test 20 different part locations. With each test cycle the system supplies the user with gross leak testing capabilities during the evacuation and/or fill cycles reducing trace gas contamination. During any of the 99 different testing cycles the system will conduct either accumulative leak testing or singular sniff testing with Accept or Reject signals accordingly. The CS unit is the only instrument available that integrates seamlessly with different trace gas systems and supplies control of CTS’s patented Nitrogen Purge low level leak testing with repeatable Gage R&R capabilities. The CS also has the option for integration into a CTS supplied Helium Reclaim system for long term cost savings. The system utilizes two RS232 serial interface terminals and an Ethernet Telnet connection.

 

Cincinnati Test Systems, Inc.

Harrison, OH

www.cincinnati-test.com

Te: 1-513-367-6699

E-mail:  sales@cincinnati-test.com

 

 

Terranova Model 809 Diaphragm Gauge Controller

 

The Duniway Terranova 809 controls/displays a wide range of diaphragm gauge tubes, including the Terranova 809 Si Diaphragm Gauge and the MKS 722A series Baratron Capacitance Diaphragm Gauges. It provides inexpensive, accurate, gas-species independent pressure measurement for a single diaphragm gauge tube. Accurate, gas-species-independent pressure readings can be provided over a range of more than 3 decades below Diaphragm Gauge Full Scale ratings of 100mTorr, 1 Torr, 10 Torr, 100 Torr and 1000 Torr. It has a 1/8 DIN package, universal power supply (80 to 250VAC, 50/60 Hz). It operates with standard, unheated diaphragm tubes and has a process control set point. The 4-digit pressure displays 0000 to 1000 with a user-set decimal point. The analog output is linear, 10.0 volts full scale. The controller includes a power cord but the sensor tube not included,

 

 

 

Terranova® Model 906A Convection Vacuum Gauge Controller

 

The Duniway Terranova® Model 906A Convection Vacuum Gauge Controller covers 10-4 Torr to 1000 Torr using standard convection tubes. It is low cost with two process control set points and RS-232 serial input/ outputs and a calibrated logarithmic analog output. It has a universal power supply and is CE compliant and UL Listed. It uses standard convection sensors: the HPS/MKS Model 317 CEP or GP-275 Convectron® . The unit has a choice of sensor response curves and covers 0.1 mTorr to 1000 Torr.

 

 

 

New Terranova® Model 934 Ionization & Low Vacuum Gauge Controller

 

The Duniway Stockroom Model 934-UHV incorporates all the functions needed for measurement and control of vacuum in a wide variety of systems. The 934 is lower in cost than other controllers because most of the features needed are built in. With other controllers, these functions are added-cost modules. The wide range of the 934-UHV makes it ideal for processes requiring higher-pressure operation. Enhanced sensitivity of the 934-UHV electrometer allows measurement with only 1 mA emission; other controllers require as high as 10 mA for measurement to UHV. The lower emission of the 934-UHV reduces outgassing in the gauge and insures true pressure measurement at UHV. Automatic filament control for the ion gauge, process control set points, dual low-vacuum gauge controls, serial interface, analog output and degas features clearly place this unit ahead of the others in the industry. The 934-UHV offers high performance at a reasonable price.

 

Duniway Stockroom Corp.

Mountain View, CA

www.duniway.com

Tel: 1-650-969-8811

E-mail:  info@duniway.com

 

 

Model 590 Thin Film Optical Monitor for Real Time Monitoring of Thin Film Coatings

 

The Dyn-Optics Model 590 Optical Monitor has a solid, field-proven design, earning a reputation as being bullet proof and the workhorse of the coating industry. By continuously measuring the reflectance and/or transmission of each coating optically, the 590 Optical Monitor provides a more accurate measurement of each layer as its being deposited than with conventional crystal monitoring. With improvements in coating tolerances as much as an order of magnitude optical monitoring is essential for advanced multi-layer coating designs. An optional PC interface (USB or RS-232) allows remote control of the 590 as well as an End of Layer termination signal to communicate with the coating system process controller. The 590 features extended operation into the UV and IR spectrum. Dyn-Optics offers a full line of accessories to compliment the optical monitor including vacuum windows, gimbal mounts, and chip changers. In additional to our standard line, our engineers are available to support custom and OEM requirements.

 

 

Dyn-Optics

Sparta, NJ

www.dyn-optics.com

Tel: 1-973-944-3996

E-mail:  sales@dyn-optics.com

 

 

Microelectronics Thin Film Analysis Services

 

Evans Analytical Group® provides thin film analysis services that cover a range of possible scenarios which strongly influence the choice of technique. Film thickness can range from a few Å (10-10m), through the µm range (10-6 m) up to mm (10-3 m). Measurement sensitivity varies between techniques, from the at% range down to parts-per-billion. The lateral analytical area could be unlimited in size or could be very restricted. Films can generally be analyzed in two ways: vertically, from the top down or bottom up; or horizontally as a cross-section. Top-down analysis at the surface provides roughness, morphology, and surface composition and contaminant information. Subsequent sputtering can uncover additional information, such as thickness, composition, and dopant and contaminant levels. Cross-sectional analyses can reveal thickness, grain size, and crystallinity.

 

Evans Analytical Group® (EAG)

Santa Clara, CA 95051

www.eaglabs.com

Tel: 1-408-454-4600

E-mail:  sales@eaglabs.com

 

 

APG100 Active Pirani Vacuum Gauge

 

The Edwards APG100 Active Pirani Vacuum Gauge features include compact size for easy installation, a linear output, and a replaceable sensor tube. The new gauges are compatible with all Edwards TIC instrument controllers and other active gauge controllers and displays. They are also CSA, C/US approved as well as fully RoHS compliant due to their lead-free construction. Edwards APG100 series Active Pirani vacuum gauges are available in 2 models. The APG100-XM is the standard model and measures to 10-3 mbar. The APG100-XLC is a corrosion resistant version with measurement to 10-4 mbar. Features and benefits include cable connections and gauge adjustment conveniently located, thereby minimizing the space envelope required for access; the sensor tube can be baked to 150°C; the adjustable set-point is for simple process control and interlocking and remote calibration is possible. It is CSA, C/US approved.

 

 

 

WRG Active Wide Range Gauge

 

The Edwards Wide Range Gauge (WRG) family offers the capability of single port pressure measurement in the range atmosphere to 10-9 mbar with a linear output. It is a compact solution, halving the space and connectivity hardware requirement, which can be all important in many applications. The WRG has many novel features, including a newly patented striker, pushbutton calibration and set point controls and comprehensive diagnostics. The WRG is a cost-effective vac- uum management solution when used either with an Edwards controller or directly integrated into the system controls. This gauge is particularly suited to monitoring the pressure on systems that are rapidly pumped down from atmosphere pressure to high vacuum levels. For applications that require extended pressure monitoring in the 10-2 to 10-4 mbar range Edwards recommends using separate Active Pirani (APG100) and Active Inverted Magnetron (AIMX) gauges.

 

 

 

TIC Instrument Controller

 

Edwards’ TIC product range is a series of vacuum instrument controllers providing compact control with a large, clear graphical display, an intuitive user interface and serial communications. The supplied Windows™ based PC program provides full remote setup, control and data logging functions via the RS232 interface. The range includes three-head and sixhead versions. All versions support and automatically recognise Edwards Active vacuum gauges. Features and benefits include automatically recognizing and controling active gauges; six user configurable relay set-points; display of relay status; one 0-10 V buffered analog output for each gauge channel; a Windows™ based PC program and a web-based product support page. It has direct pressure readout of common gases (N2 , He, Ar, CO2 , Kr and Ne) without conversion factors. The user-configurable display options include: option to display one, three, or six channels simultaneously; the ability to select gauge order when cycling through; and the display assigns a four character alphanumeric name for each gauge (e.g RV1, LL2, CHBR). To enable complete integration into PC and PLC controlled processes,, all TIC variants include RS232 and RS485 interfaces and display units in mbar, Torr, Pa or Volts. The range includes three-head and sixhead versions. All versions support and automatically recognize Edwards Active vacuum gauges.

 

Edwards

Sanborn, NY

www.edwardsvacuum.com

Tel: 1-800-848-9800

E-mail:  info@edwardsvacuum.com

 

 

XT Series Residual Gas Analyzer Combines RGA, Pirani and Ion Gauge Capabilities

 

Extorr XT series is a line of high quality residual gas analyzers that integrate the RGA, ion gauge and the Pirani gauge functions onto a single vacuum probe. All three gauges are monitored at all times so that the vacuum system status is always available from atmospheric pressure to ultra high vacuum. When used in the default automated mode, the system will turn the filament, RF and multiplier supplies on and off, as the vacuum requires, without user intervention. The probe is always protected and the available data is automatically recorded. The Extorr system just needs to be attached to a vacuum system. The user is no longer required to throw switches or push buttons.

 

 

Extorr Inc.

Kensington, PA

www.extorr.com

Contact: Lutz Kurzweg

Tel: 1-724-337-3000

E-mail:  info@extorr.com

 

 

VeraSpec™ HRQ High-Resolution Quadrupole Mass Spectrometer Gas Analysis System

 

Extrel introduces a new member to the VeraSpec™ family of research grade mass spectrometer systems, the VeraSpec™ HRQ high-resolution quadrupole mass spectrometer. The HRQ system is built around the Extrel MAX-60 quadrupole mass spectrometer, designed for precision mass analysis of low molecular weight species while delivering exceptional transmission characteristics. The VeraSpec™ HRQ consists of a 19 mm tri-filter quadrupole with a precision machined rod set featuring RF-only pre- and post-filter stages, stabilizing rods, and high power RF generators. This set-up delivers excellent transmission, resolution and abundance sensitivity characteristics at low masses. The VeraSpec™ HRQ high-resolution quadrupole mass spectrometer system is a complete turn-key gas analysis system including UHV chamber, vacuum pumps, and rack with provision for connection to the customer sample and calibration gasses. Typical applications include geochronology isotopic ratio measurements and helium-deuterium gas purity analysis, where the system’s peak resolution of m/?m = 3000 is able to resolve adjacent mass peaks separated by only a few hundredths of an amu.

 

Extrel CMS LLC

Pittsburgh, PA

www.extrel.com

Tel: 1-412-963-7530

E-mail:  info@extrel.com

 

 

6MHz & 5MHz Quality Crystals® in Gold, Longer Life Gold® or Stress Relieving Alloy® Coatings

 

Fil-Tech manufactures Quality Crystals® in 6MHz and 5MHz styles with Gold, Longer Life Gold® , Stress Relieving Alloy® , and Advanced Adhesion Alloy™ coatings. Gold offers low contact resistance and high chemical stability. Longer Life Gold offers low contact resistance and stress relieving qualities of alloy. Fil-Tech’s also offers SQM-180 and SQM-200 Rate/Thickness Monitors for thin film deposition processes and other quartz crystal microbalance applications. Fil-Tech supplies sensor head hardware including single and dual feedthroughs, single and dual sensor heads, and sputter heads. Fil-Tech supplies all styles ionization, thermocouple, nude and convection gauge tubes for vacuum applications. Twin filament tungsten ion gauge tubes are generally used for ion implantation requirements, broad range tubes are used for sputtering applications and burnout resistant thoria coated iridium filaments are used for general vacuum requirements. Thermocouple tubes are used for measuring mechanical pump vacuums in the range of 1000 to 1 micron. Convection tubes are used to measure vacuum from atmosphere to 10-3 with high accuracy. Fil-Tech also supplies UHV and Bayard Alpert nude gauges and replacement filaments. Fil-Tech supplies electron beam gun replacement parts, ion source parts, 704 oils, and Alcatel and Varian leak detector filaments. Call 1-800-743-1743 or visit www.filtech.com for cross reference and pricing information.

 

Fil-Tech, Inc.

Boston, MA

www.filtech.com

Contact: G. Paul Becker

Tel: 1-617-227-1133 or toll free 1-800-743-1743

E-mail:  paul@filtech.com

 

 

F50 Automated Thin-Film Thickness Mapping System

 

Filmetrics’ F50 measures thin-film thickness and n and k are mapped quickly and easily based upon our advanced spectral reflectance system. The motorized R-T stage moves automatically to selected measurement points and provides thickness measurements in seconds. Choose one of the dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points. The entire desktop system is set up in minutes and easily used by anyone with basic computer skills.

 

 

 

F40 Thickness and Optical Constants Measurement System

 

Filmetrics’ F40 converts your microscope into a Thin Film Thickness Measuring Tool. Film thicknesses are measured quickly and easily with this Filmetrics advanced spectrometry systems. Spectral analysis of reflections from the top and bottom of the thin film provides thickness in seconds. For measurements on patterned surfaces and other applications that require a spot size as small as 10 µm, just add the model F40 to the microscope. For common microscopes, the F40 is a simple bolt-on attachment, complete with a c-mount and a CCD camera.

 

 

 

 

 

F30 In-situ Deposition and Etch Monitor

 

The Filmetrics F30 in-situ monitor measures deposition rate, layer thickness, optical constants (n and k) and uniformity of semiconductors and dielectric layers in real-time. Applications include MBE, MOCVD, and optical coatings. Smooth and translucent, or lightly absorbing films may be evaluated. The F30 is fully contained outside the process chamber—special lens mounts are available for restricted-access applications. For growing layers, the F30 continuously monitors sample reflectance at one or more wavelengths. The deposited layers optical properties produce unique time-dependant interference oscillations in the reflectivity signal. Analysis of these oscillations allow for determination of the layers deposition rate and optical constants. Up to three measurement locations can be measured with a single F30 system.

 

Filmetrics, Inc.

San Diego, CA

www.filmetrics.com

Tel: 1-858-573-9300

E-mail:  info@filmetrics.com

 

 

Speedflo™ Advanced Reactive Sputter Gas Controller Plasma Emission Monitor

 

Speedflo™ by Gencoa is a flexible and powerful tool to get the best from your reactive deposition and plasma process investment. It is a sensor and feedback system that monitors process outputs and actuates automatically the process inputs to increase rates or to maintain product quality and stability. Speedflo incor- porates a pseudo–derivative feedback (pdf+) algorithm to push the operating window of such processes which combines with a highly developed software interface that includes many ‘expert’ functions to allow different ways of configuring the process control and combating difficult control situations. When combined with Gencoa multi-zone gas delivery bars, dynamic adjustment of uniformity is enabled to very high precision. Gencoa can provide a range of sensor types and process control solutions based upon the Speedflo system for high rate oxide and nitride layers. The system can also be used for condition monitoring and control for all reactive and semi-reactive processes to maintain layer properties over the long term and prevent process drifts. On-site process implementation and optimization based upon many years of experience on a wide range of processes and machine platforms is available worldwide or remotely via connection to the controllers via the internet.

 

 

Gencoa Ltd.

Liverpool, UK

www.gencoa.com

Contact: Dermot Monaghan

Tel: +44 (0)151 486 4466

E-mail:  dermot.monaghan@gencoa.com

 

 

Model 21-070 Mini Gas Leak Detector

 

GOW-MAC® Instrument Company’s Model 21-070 Mini Gas Leak Detector is a simple to use detector, engineered for easy, one hand operation of detecting leaks in GC systems or any pressurized gas system in laboratory or industrial locations. The instrument can be operated with little or not training. Simply turn the instrument on, zero, and point the instrument’s thin pencil-tip probe at the area of interest. The probe is designed to reach difficult and confined locations to pinpoint the exact problem location. An LED display visually indicates leaks. An audible alarm also signals a leak. No messy soap solutions. No system contamination. Response time is less than 1 seconds for all gases. Helium leaks of 1 × 10-5 cc/sec are easily detected, as are other gases such as refrigerant leaks of 1.1 × 10-4 cc/sec. The Model 21-070 features microprocessor control with computer interfacing (optional), selectable sensitivity settings, as well as flash memory for saving various settings, i.e., alarm mode, alarm setpoint, alarm volume, peak hold delay, LED brightness, sensitivity, and pump speed. The 21-070 Mini Gas Leak Detector weighs only 1.05 lbs (476 grams) and has a rechargeable Ni-Cd battery. A charger is also included. GOW-MAC Instrument Co. is a leading manufacturer of high performance gas analysis analytical instruments engineered for anyone involved with the detection, analysis, production, or supply of gases within the global industrial, medical and specialty gases industries.

 

 

Thermal Conductivity Binary Gas Analyzers

 

GOW-MAC® Thermal Conductivity Gas Analyzers are used to measure and monitor binary gas streams. Our analyzers can also monitor one component in a more complex gas mixture when the background gases have the same ratio to each other, or have similar thermal conductivity values. These gas analyzers find use in measuring the composition of binary mixtures and gas purity in many industrial applications on a continuous (50 Series) or intermittent (20 Series) basis. Typical applications include gas manufacturing facilities: monitoring pressure swing adsorption (PSA) systems; gas distributors: testing welding mixes; gas blending equipment; air liquification plants: monitoring purity of Ar, O2 , H2 , N2 , He, CO2 , or Ne; steel mills: CO2 in off-gas from gas generators; chemical plants: H2 purity, monitoring purging operations, contamination control; petroleum refineries: H2 purity in C1 to C6 hydrocarbons; heat treating: H2 in N2 and other annealing gases; power generation plants: H2 cooling gas in turbine generator housings; CO2 in turbine generator housing; checking H2 purity; ammonia plants; and refrigeration facilities.

 

 

 

Total Hydrocarbon Analyzers

 

The GOW-MAC Total Hydrocarbon Gas Analyzers are designed to continuously measure concentrations of hydrocarbons and CO and CO2 in gas streams. The instruments provide long term stability and accurate performance in gas manufacturing facilities and laboratory applications. The Series 23-550 and 23-750 analyzers incorporate flow systems that can be used for ambient air analysis where low levels of hydrocarbons are monitored on a continuous basis. The analyzers can be used for other analyses such as engine exhaust monitoring, stack gas emissions and environmental studies. Samples can be introduced by pump or by pressurized tanks. The analyzers can be either bench or rack mounted. Standard and corrosive resistant analyzers are also available. Balanced pneumatics and electronic stability allow for resolution of 0.1 ppm (23-550) total hydrocarbons over normal temperature ranges using zero grade H2 as fuel (0.03 ppm on the 23-750). Electronic stability at maximum sensitivity is ± 1% of full scale throughout an ambient temperature range of 25 °C ± 10 °C. The analyzers are engineered to operate on either zero grade H2 , a 40/60% H2/N2 or a 40/60% H2/He fuel mix. GOW-MAC’s Total Hydrocarbon Analyzers offer unique features, including: triple ranges from 0.03 ppm to 19,999 ppm CH4 in N2 using hydrogen as fuel; units meet EPA certification for linearity; an electronic flame-out circuit to continuously monitor the flame (eliminating flame out sensor burnout); digital readout; and terminals for permanent recording of data. Both analyzers are offered with an optional sample stream, calibration, and zero selection system.

 

GOW-MAC Instrument Company

Bethlehem, PA 18017

www.gow-mac.com

Tel: 1-610-954-9000

E-mail:  sales@gow-mac.com

 

 

Vision 2000-P RGA: Residual Gas Analyser for PVD

 

Henniker Scientific Ltd.’s application specific residual gas analysers for PVD. provide automated GO/NO-GO status based on ppb level detection of contaminants. Field proven routines will alarm on, and suggest causes for, common residual gas problems in PVD processes. The Vision 2000-P is an application specific residual gas analyser for PVD. It represents a different concept in PVD monitoring, requiring minimum operator interaction or knowledge of residual gas analysers. The Vision 1000-P consists of smart-head residual gas analyser technology with a closed ion source and close-coupled inlet. This state-of-art residual gas analyser technology is integrated with Process Eye Professional™ Control Platform, a recipe based, user-configurable software program. The technology advances incorporated in the Vision 1000-P residual gas analyser provides users with simple, effective, process monitoring operation including; ppb level detection of contaminant gases during PVD processes, faster PM recovery through vacuum analysis, constant baseline vacuum troubleshooting, single push button operation to start recipes.

 

Henniker Scientific Ltd.

Warrington, Cheshire, England

www.henniker-scientific.com

Tel: +44 (0) 1925 800 035

E-mail:  info@henniker-scientific.com

 

 

New Foundation SIMS System Family Trio

 

Secondary ion mass spectrometry(SIMS) is a versatile, highly-sensitive technique for surface analysis and surface depth profiling of diverse materials. Hiden Analytical expands their primary system options to offer the choice of three initial equipment levels to suit a broad spread of budget capacities. All systems offer full UHV operation and expandability to the top-level specification. The dual-mode MAXIM mass spectrometer features operation both in the secondary ion mode and in the secondary neutral(SNMS) quantification mode. The Foundation SIMS System includes the IG20 fine-focus(50 micron) oxygen/argon ion gun, multiple sample holder and primary ion beam monitor. An uplifted version ñ the SIMS Workstation ñ is configured for higher throughput rates with the addition of a sample load lock and sample manipulator, together with charge-neutralising electron flood gun and system bakout facility. The SIMS Workstation Plus has the most comprehensive specification with the addition of the IG5C Caesium ion gun for electronegative species, having a spot size of just 20 micron. The MASsoft Professional SIMS PC data system provides automated measurement of positive and negative ions and of neutral species. It enables full control of the mass spectrometer and ion gun operating parameters and ion beam raster, with acquired data presented in real time.

 

 

Gas Composition in Vacua

 

Hiden Analytical offers an extensive range of quadrupole residual gas analysers for diverse vacuum applications through the pressure range from millibar through to extreme high vacuum(XHV). The catalogue items are supplemented by a custom-engineering design service for experiment-specific requirements including in-vacuum cooling and heating, probe insertion distance and remote in-vacuum mounting. Typical mass ranges of 1:50amu to 1:300amu accommodate most gaseous and vapour species, with alternative mass ranges to 1000amu offered for specialised applications. Analogue and pulse ion counting detectors are selectable to optimise performance for widest dynamic range of 10 decades, fastest measurement rate to 500 samples per second and highest sensitivity to 5x10E-16 millibar. Ion source options are configured for general analysis, for molecular beam applications or for minimal degas rates for UHV/XHV applications. The single-stage mass filters are used for many general applications, with the 3F-series triple-stage mass filter being used for the most demanding applications requiring maximum performance in terms of both mass resolution and abundance sensitivity. All operating parameters are software integrated giving full control of mass resolution, ionisation current and ionisation energies, with the soft ionisation feature being used for simplification of complex molecular fragmentation spectra.

 

 

Advancing Pulsed Plasma Characterization

 

The performance of the Hiden family of plasma diagnostic tools is further advanced by integration of on-board timers for real-time pulsed plasma measurement, the fast gating fully controllable within the MASsoft operating program. Two timers provide ‘gate open/close’ and ‘gate increment’ periodicity with sub-microsecond gating resolution to just 100 nanoseconds, phasing data acquisition precisely with each individual plasma pulse. Enabled instruments include the Hiden ESPion Langmuir-style probe for measurement of plasma ion and electron densities and energies, and the Hiden PSM and EQP quadrupole mass spectrometers for characterisation of both positive and negative plasma ion species together with their abundance and their ion energies. All are supported by a comprehensive range of accessories with differential pumping options for processes operating up to 5 bar. The ESPion probe is available in versions for operation in both RF and DC plasma, at elevated temperatures and in diverse lengths in excess of 1000mm. Compatible bellows-sealed ‘Z’-drives have up to 900mm translation. The EQP and compact PSM plasma monitors share similar software, the EQP system featuring a high-definition sector-field energy filter and energy range ±1000eV. The integral electron bombardment ion source is used for neutrals/radicals measurement and for studies of electronegative species by electron attachment.

 

Hiden Analytical Inc.

Livonia, MI

www.hidenanalytical.com

Contact: Mark Buckley, Vice President

Tel: 1-734-542-6666

E-mail:  info@hiden.co.uk

 

 

Micropole™ Residual Gas Analyzer

 

The HORIBA Instruments’ Micropole™ Residual Gas Analyzer is one of the smallest complete mass spectrometer systems available. The compact size is achieved by the patented design of miniature array of quadrupole mass filters. The array offers similar or greater sensitivity than conventional mass spectrometers but in a fraction of the volume. The system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is reduced. The sensors are factory pre-tuned and calibrated against transfer standards that allow direct interchangeability of the sensor by the user without the need for technical expertise to calibrate. It is possible to take data without a PC when you use the Monitor Controller with 3.5” LCD. Up to eight Micropole systems can be networked and controlled using RS-485 or Ethernet communication. The extremely compact size and lightweight is 1/20th size when compared to conventional residual gas analyzers makes it easy to integrate to your system. A mini array of 9 quadrupoles gives excellent sensitivity at a fraction of the volume of traditional quadrupoles. It can be used at up to 0.9Pa (7mTorr, 9 × 10- 3 mbar) and in many applications the need for expensive vacuum pumping is reduced or eliminated.

 

 

Smart SE Powerful and Cost Effective Spectroscopic Ellipsometer

 

The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few Angstroms to 20µm, optical constants (n, k), and thin film structure properties (such as roughness, optical graded and anisotropic layers, etc). The spectral range from 450 to 1000nm is measured in a few seconds and ellipsometric data are analyzed using the DeltaPsi2 software platform. The software integrates two levels of software to fulfill both routine analysis with predefined recipes and advanced analysis with state-of-the art ellipsometric modeling. The Smart SE ellipsometer is a cost effective thin film R&D tool with no compromise on features, and delivers research grade performance at an economical price. It provides an integrated vision system for accurate spot positioning, seven automated micro spots with size ranging down to a few tens of microns for measurement of small features, and the ability to measure the complete 16-element Mueller matrix in just a few seconds for the study of complex samples. The flexible design of the Smart SE enables full automation of the sample stage and goniometer as well as in-situ use on process chambers. It matches any application or budget for a wide variety of application areas including microelectronic, photovoltaic, display, optical coatings, surface treatments and organic compounds.

 

 

LEM In-Situ Etch/Deposition Rate Monitor and Endpoint Detector

 

HORIBA’s LEM interferometer is used for in-situ etch rate monitoring and end point detection. The LEM builds on the earlier previous SOFIE DigiLem. With its compact design and enhanced image quality, the LEM can be mounted on any process chamber with a direct top view of the wafer. It provides a real-time digital CCD image of the sample surface, making its 30 mm laser beam positioning simple and accurate. Based on inter- ferometry technique, the LEM provides in-situ etch/deposition rate monitoring for endpoint detection in a wide range of applications. Depending on the configuration selected, the LEM can provide a simple analog signal output for analysis with an external software, or can be delivered with our state-of-the-art APC software, SIGMA-P© , for accurate etch/deposition rate, trench depth and process statistical calculations. By simply using a TTL trigger and the optional pattern recognition software, the LEM can be interfaced to any process chamber for an operator-free process monitoring and endpoint detection.

 

HORIBA Instruments Inc.

Edison, NJ

www.horiba.com/us/en/semiconductor/

Tel: 1-732-494-8660

E-mail:  info.sci@horiba.com

 

 

FlexRax® 4000 Multi-Gauge Vacuum Measurement Controller

 

The InstruTech® FlexRax provides the user the ability to display pressure measurements from up to 10 different vacuum gauges simultaneously. The FlexRax can operate up to four ionization gauges simultaneously. It will operate two classic size Bayard-Alpert (B-A) glass or nude Ionization gauges and two InstruTech™ IGM400 Hornet™ miniature ionization gauges. The FlexRax can also operate up to four convection gauges. Additionally, the FlexRax can accept and display up to two analog input signals from other devices such as capacitance diaphragm gauges. The FlexRax easy to read LCD with backlighting provides a sharp contrast with wide viewing angle. The instruments provides numerous process control signals and is capable of providing up to 8 analog outputs, 16 setpoint relays and RS485/RS232 serial communications.

 

 

 

CVM201 “Super Bee™ ” Convection Vacuum Gauge with OLED Display

 

The InstruTech® series CVM201 Super Bee™ vacuum gauge module with on-board electronics/controller is based on the convection vacuum gauge principle, and measures pressures from 1000 to 10-4 Torr. The CVM201 Super Bee is now offered with a bright, sharp and clear digital OLED graphical display. The OLED display offers a very easy and intuitive user-friendly interface for readout of pressure, and for setup, calibration, and operation of the device. The Super Bee is powered by 11 to 30 VDC and provides a linear, non-linear or log-linear analog output, as well as RS232 and RS485 serial communications. Two process setpoint relays are included for controlling vacuum system pump down and venting. The Super Bee module is also a drop-in plug-compatible replacement for the Granville-Phillips® Mini-Convectron® gauge modules. Granville-Phillips® and Mini-Convectron® are registered trademarks of Brooks Automation, Inc.

 

 

 

VGC301 Convection Vacuum Gauge Controller with OLED display

 

The InstruTech® VGC301 vacuum gauge controller is a convenient and inexpensive readout and power supply instrument for use with InstruTech’s CVG101 Worker Bee™ convection vacuum gauge. When used with the CVG101 convection gauge, the VGC301 can measure pressures from 1000 to 10-4 Torr. This space saving 1/8-DIN housing can be used as a bench top or mounted in a cutout in an instrument panel. The VGC301 is now offered with a bright, sharp and clear digital OLED graphical display. The OLED display offers a very easy and intuitive user-friendly interface for readout of pressure, and for setup, calibration, and operation of the device. The VGC301 is powered by 11 to 30 VDC and provides a linear, non-linear or log-linear analog output, as well as RS232 and RS485 serial communications. Two process setpoint relays are included for controlling vacuum system pump down and venting.

 

 

InstruTech® , Inc.

Longmont, CO

www.instrutechinc.com

Tel: 1-303-651-0551

E-mail:  info@instrutechinc.com

 

 

Transpector XPR3L Gas Analysis System

 

Solar Cell and LCD process yield optimization is mde possible by monitoring gas pressures, detecting contaminants, and locating leaks. Monitoring process gases and base vacuum conditions is affordable and efficient with the Inficon Transpector® XPR3L Gas Analysis System RGA. PVD process monitoring with the XPR3L provides real-time data on process gas pressures, gas ratios, contamination levels, impurities, and leaks. This information can be used to maximize both process yield and product quality. Background monitoring with the XPR3L can make preventive maintenance programs more efficient and effective by quickly detecting and diagnosing leaks and contaminants. Some key features include economical dual-purpose functionality, process monitoring and base vacuum assurance, by operating from UHV up to 10mTorr (20mTorr optional); affordable cost-effective process monitor that enables implementation in scaleable production designs; improves process yield, reduces scrap and improves product quality through continuous automatic monitoring of process gas pressures, ratios and possible contaminants or impurities; speeds up PM recovery and increases productivity by verifying base vacuum conditions, locating leaks and identifying contaminants with high sensitivity and low minimum detectable partial pressure; operates across a 1 to 100 amu mass range, protecting your investment and reducing risk by having the ability to detect a broad range of materials, contaminants or byproducts and it is compatible with the FabGuard monitoring and analysis system to provide reliable advanced diagnostics and process control.

 

 

Ecotec E3000 Multi-Gas Leak Detector

 

The INFICON Ecotec E3000 Multi-gas Leak Detector brings levels of productivity to demanding fab environments. Easy to use, the Ecotec E3000 is more immune to careless sniffing operation and can minimize operator error, so the accuracy and reliability of the testing operation is improved. It can detect leaks at a great distance from the leak location, and the sniffer tip can be moved faster without missing leaks. This high-performance, gas specific leak detector provides sniffer leak checking of both helium and process gases to sensitivities greater than 5e-7 atm x cc/s. At pressurized gas cylinders or gas lines, equivalent inboard leak rates greater than 1e-9 atm x cc/s can be checked.

 

 

 

 

UL5000 Helium Leak Detector

 

The INFICON UL5000 Helium Leak Detector has INFICON proprietary software algorithms I-CAL and Hydro-S in a field-proven vacuum design for testing flexibility, high sensitivity and extremely fast response leak testing results in the low minimum sensitivity ranges. Designed for high efficiency and speed in the OEM and fab environment for testing components, subassemblies, large chambers or semiconductor tools. The UL5000 pumps down quickly and provides fast, accurate, repeatable results down to the 10-12 atm cc/s leak rate range.

 

INFICON

East Syracuse, NY

www.inficon.com

Tel: 1-315-434-1100

E-mail:  reachus@inficon.com

 

 

M-2000® Spectroscopic Ellipsometer

 

The M-2000® line of spectroscopic ellipsometers from J. A. Woollam Co., Inc. is engineered to meet the diverse demands of thin film characterization. An advanced optical design, wide spectral range, and fast data acquisition make it an extremely powerful and versatile tool. The primary application of ellipsometry is to characterize film thickness and optical constants. The M-2000 excels for both. It measures films from sub-nanometer thickness up to tens of microns and the optical properties from transparent to absorbing materials. It is a flexible instrument and can characterize any type of thin film: dielectrics, organics, semiconductors, metals, and more. Wide spectral range and variable angle allow the M-2000 to diagnose many multi-layered structures. The M-2000® delivers both speed and accuracy. Our patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. The M-2000 is the first ellipsometer to truly excel at everything from in-situ monitoring and process control to large-area uniformity mapping and general-purpose thin film characterization.

 

 

 

alpha-SE® Spectroscopic Ellipsometer

 

For routine measurements of thin film thickness and refractive index, the J.A. Woollam alpha-SE® is a great solution. Designed for ease-of-use: simply mount a sample, choose the model that matches your film, and press measure. You have results within seconds. Why an alpha-SE? It’s easy-to-use with push button operation and advanced software that takes care of the work for you. Its powerful and proven spectroscopic ellipsometer technology gives you both thickness and index with much higher certainty than other techniques. A flexible spectroscopic ellipsometer, it works with your materials – dielectrics, semiconductors, organics, and more. Now you have the power of spectroscopic ellipsometry at a reasonable price. It’s fast and handles hundreds of wavelengths simultaneously, collected in seconds with immediate results. Applications include qualifying dielectric films with fast measurement speed and push-button operation, the alpha-SE® is ideal for qualifying thin films. Single-layer dielectrics on silicon or glass substrates can be measured in seconds. Log results for easy-touse comparisons in both graphical and tabular formats. It also measures self-assembled monolayer phase information of a spectroscopic ellipsometry measurement is highly sensitive to very thin films (<10nm). Self-assembled monolayers can be assessed and quickly compared using the alpha-SE.

 

J. A. Woollam Co.

Lincoln, NE

www.jawoollam.com

Tel: 1-402-477-7501

E-mail:  sales@jawoollam.com

 

 

Mass Spectrometers

 

Mass Spectrometry (MS) is one of the fastest-growing areas in analytical instrumentation. JEOL magnetic sector and timeof-flight mass spectrometers have very high stability, sensitivity, and resolution. These instruments are used in both quantitative and qualitative analysis, including high-resolution accurate mass measurements for the determination of elemental compositions. The use of mass spectrometry in support of synthetic, organic, and pharmaceutical chemistry is well established. However, mass spectrometry is also used in materials science, environmental research, and forensic chemistry. It has also evolved into one of the core methods used in biotechnology. JEOL manufactures a wide range of magnetic sector mass spectrometers ranging from small bench top double-focusing magnetic sector mass spectrometers to larger tandem and hybrid mass spectrometers. JEOL also offers the new cost-effective high-performance AccuTOF™ APITOF LC/MS system for qualitative and quantitative analysis.

 

JEOL USA Inc.

Peabody, MA

www.jeol.com

Tel: 1-978-536-5900

E-mail:  salesinfo@jeol.com

 

 

Field Analysis Vacuum Meter

 

The new Field Analysis Vacuum Meter is the latest, feature-packed, battery powered pressure measurement package from KJLC® . A rugged case, powerful magnet for hands-free operation, and 70-hour battery life make it a truly field worthy device, while also offering features typically reserved for permanently mounted controllers. These features include: a good/bad sensor indicator, self-test mode, audible set points, graph-tracking display for monitoring pump down, 11 selectable pressure units, and the ability to calibrate in the field.

 

 

 

 

 

Hot Filament Ion Gauge Tubes

 

Kurt J. Lesker Company stocks a comprehensive selection of replacement ion gauge tubes in tubulated envelope and nude designs that match both our controllers and those sold by competitors. We have tubes: in Pyrex, Nonex, and 7052 glasses; a range of envelope sizes; single or dual tungsten and thoriated iridium filaments; terminated in glass or metal tubes; or with various CF or KF flanges. We can cross reference almost any standard ion gauge tube and can provide custom or modified ion gauge tubes when required.

 

 

 

KJLC™ Convectron® Equivalent Series

 

The Kurt J. Lesker Company Convectron Equivalent series of pressure transducers and sensors are direct “drop in” replacements for the Granville-Phillips Convectron gauges. All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers.

 

 

 

 

KJLC™ DV-6M Equivalent Thermocouple Sensors

 

The Kurt J. Lesker Company KJL-6000 thermocouple tube is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company has a 30-day money-back guarantee on this product, with no questions asked.

 

 

 

 

Kurt J. Lesker Company

Jefferson Hills, PA

www.lesker.com

Contact: Aaron Bryan

Tel: 1-800-245-1656 or 1-412-387-9200

E-mail:  pressure@lesker.com

 

 

Aleris™ 8330 Film Low-Cost High-Throughput Production Metrology Tool

 

KLA-Tencor Corporation™ introduced the latest addition to the Aleris family of film metrology tools. The Aleris 8330 is a reliable, production worthy, low cost of ownership metrology solution for measuring thickness, refractive index and stress of non-critical films at the 32nm node and beyond, complementing the existing Aleris 8350 system, which is designed to measure critical* films. The cost-effective Aleris 8330 and the high sensitivity Aleris 8350 form a comprehensive metrology solution for a broad range of film layers, helping fabs identify process issues and maintain high yield during production. The Aleris 8330 includes several features designed for cost-effective films process control: Patented Broadband Spectroscopic Ellipsometry (PBSE), white light reflectometry (WLR) and optional ultraviolet reflectometry (UVR) optics technologies built on an established platform are designed to produce the precision, stability and matching performance required for production monitoring of films; up to 1.85x throughput increase compared to KLA-Tencor’s previous generation film metrology tool provides low cost-of-ownership film process control; recipe import from the previous generation platforms (ASET-F5x and SpectraFx™) and remote recipe management ease tool integration into production; recipe sharing among different Aleris tools facilitates a flexible process control strategy within a fab, covering both high-end and low-end film applications; optional StressMapper provides advanced stress measurement capability, helping chipmakers identify process issues that can lead to cracked or delaminated films or cause overlay errors; and reliable, extendible architecture protects fabs’ capital investments. *Critical films, such as ultra-thin diffusion layers, typically have the smallest dimensions and narrowest process tolerances.

 

KLA-Tencor

Milpitas, CA

www.kla-tencor.com

Tel: 1-408-875-8733

E-mail:  info@kla-tencor.com

 

Deposition Control & Measurement—e-Vap™ Programmable Modules

 

MeiVac Inc. acquired the e-Vap™ product line in 2012. Mei-Vac provides a complete line of thin film components including; controls for e-beam, thermal and sputter vacuum deposition. Our programmable sweep controller provides excellent control of your e-beam process. Simple to use yet extremely powerful you can maximize virtually any process. Prevent tunneling on dielectric materials, broaden the beam profile for smooth evaporation of low melting point metals or build your own pattern for preconditioning your melt from economical pellets or granules. Combine the sweep control with our programmable source control, crucible indexer or rate controller to automate your entire e-beam process. All MeiVac thin film controls work with MeiVac e-Vap™ , Re-Vap™ and MAK sputtering sources as well as most industry standard sources. Check with our experts for your application. Controllers are easy to rack mount and include mounting ears for standard enclosures. MeiVac also offer power supplies, e-beam sources, sputtering sources, resistive sources, substrate heaters, throttle valves plus a complete line of spare parts and accessories.

 

MeiVac Inc.

San Jose, CA

www.meivac.com

Te: 1-408-362-1000

E-mail:  support@meivac.com

 

 

Spectra™ Products Vision 2000-C™ and 2000-E™ Process Monitors

 

MKS Instruments’ Process Monitor products are innovative, in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including CVD, PVD and Etch for process gas analysis. The MKS Spectra™ Products Vision 2000-C™ and Vision 2000-E™ are designed to track levels of various gas species during etch processes and the chamber clean, passivation sequences, and deposition steps for various CVD processes including Titanium nitride (from TDMAT), Tantalum oxide (from tantalum precursor), Copper (from CupraSelect® ), HDP of low-k dielectric films, Atomic Layer Deposition, Atomic Layer Epitaxy and MOCVD. MKS’Vision 2000-C™ and Vision 2000-E™ incorporate “smart head” RGA technology from Microvision 2 with a closed ion source and close-coupled inlet. This state-of-the-art RGA technology is integrated with Process Eye™ Professional control platform, a recipe-based, user-configurable software program. The combination of closed ion source and automated inlet allows seamless monitoring of the complete CVD or Etch process cycle, from base vacuum to process pressures of up to 700 Torr.

 

 

627C and 628C e-Baratron® Heated Ethernet-Enabled Absolute Capacitance Manometers

 

Even for users who do not use Ethernet networking, the Types 627C and 628C also have external LEDs to give a fast intuitive guide to the device’s status. The 627C and 628C models, based on MKS’ standard capacitance sensor, and the E27C and E28C models, equipped with MKS’ patented Etch sensor that greatly reduces manometer drift in processes with condensable byproducts, are ideally suited for high-accuracy semiconductor, flat panel display, and industrial applications that require a heated manometer for repeatable vacuum and pressure measurement.

 

 

 

 

 

972B DualMag™ Cold Cathode/MicroPirani™ Vacuum Transducer

 

The MKS Instruments 972B DualMag transducer offers a measurement range from 1×10-8 Torr to atmospheric pressure and it combines cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically monitors and controls the cold cathode sensor, ensuring optimal ignition pressure. The MicroPirani MEMS sensor technology is capable of measuring pressures 1-2 decades lower than traditional pirani gauges, enabling cold cathode activation at lower pressures which improves reliability and extends service intervals. Utilizing RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement readings, the 972B is designed for general purpose pressure measurement and control as a standalone unit or for use with the 937B Digital Combination Vacuum Gauge Controller. In addition, the 972 has up to three mechanical relays which can be used for process control and an analog voltage output that can be interfaced to external analog equipment for pressure readout or control. The 972B DualMag transducer’s wide measurement range, flexible communications capabilities and robust design make an ideal vacuum transducer for many different vacuum applications within the semiconductor, analytical and coating industries.

 

MKS Instruments, Inc.

Andover, MA

www.mksinst.com

Contact: MKS Applications Engineering

Tel: 1-800-227-8766 (USA) or 1-978-645-5500 (worldwide)

E-mail:  mks@mksinst.com

 

 

Layer Thickness Measurement Package

 

The m·u·t GmbH’s Layer Thickness Measurement Package consists of the TRISTAN® spectrometer, a special reading head and our Software. The system is able to measure transparent layers with a thickness of 0.1 µm to 20 µm under the pre-condition where the base material is transparent or intense reflective. Then it is also able to detect up to three different layers on one sample. The reading head can be adapted to special customer needs (e.g. shape, handling, etc.). A special table for desktop measurements of layer thicknesses is available.

 

 

 

m·u·t GmbH

Wedel, Germany

www.mut-group.com

Tel.: +49-0-4103-9308-0

E-mail:  info@mut-gmbh.de

 

 

GT-430 Thermistor Digital Display Gauge with Trend Sensing™ technology

 

The Myers Vacuum GT-430 Thermistor Type Gauge with Trend sensing™ provides vacuum leak detection with solvents for the entire operating range of the gauge (atmosphere to 1 ×10-3 Torr). Trend sensing™ is a unique feature of the gauge that provides real time display of the direction and speed of vacuum pressure change. This monitoring of pump down cycles provides the operator with data to quickly determine if there is a problem and a tool to assist with troubleshooting. Features of the GT 430 include display of pressure from atmosphere to 1 × 10-3 Torr, two adjustable independent relay outputs, RS 232 serial interface, and Analogue output for remote display, monitoring or recording of the pressure reading. It uses the GT 034 thermistor sensor with encapsulated resistor bead (proven more rugged than a standard thermocouple sensor) making it ideal for applications measuring in harsh environments.

 

 

GTC-390 Thermocouple Vacuum Gauge

 

The Myers Vacuum GTC-390 Thermocouple Vacuum Gauge is a dual station controller housed in a DIN-style case. It is usable for panel mount or standalone. The two 40-segment bar graphs display both stations pressure simultaneously, providing a comparison of the sensor readings. Operating range is 1 mTorr to 5000 mTorr. Each station has an isolated relay with front panel adjustable trip points and status display, useful for controlling other devises or interlocking. It uses the industry standard GTC-036 Thermocouple sensor.

 

 

 

GTC-395 Thermocouple Vacuum Gauge

 

The Myers Vacuum GTC-395 Thermocouple Vacuum Gauge is a single station microprocessor controller, with easy to read display, housed in a DIN-style case. It is usable as panel mount or standalone. It uses the industry standard GTC-036 Thermocouple sensor. It reads pressure from 1 mTorr to 3000 mTorr with an atm atmosphere indication. The gauge features two independent relays, with front panel status indicators, adjustable within the full measurement range. Each relay has two trip points, one for when vacuum is decreasing and one for when vacuum is increasing. This eliminates any relay chatter that may occur when the pressure is cross over. Other features include RS 232 serial interface, and analogue output for remote display, monitoring or recording of the pressure reading.

 

Myers Vacuum Repair Services, Inc.

Kittanning, PA

www.myers-vacuum.com

Tel: 1-724-545-8331

E-mail:  dmyers@myers-vacuum.com

 

 

1500 Series Analyzer Accurately Measures Thickness of Diamond-Like Coatings (DLC)

 

n&k Technology, Inc. has a software module that adds the capability to the n&k 1500-D Analyzer of characterizing DLC on perpendicular recording media. The software package enables the 1500-D user to effectively characterize the latest magnetic media that are substantially more complex than older generation media and allow much higher recording densities. The data storage industry is rapidly moving to significantly higher recording densities in response to competition from FLASH memory and an increased penetration of the consumer market with such products as game boxes, DVR, in-car navigation, and various music and video players. Combined with the n&k 1500-D Analyzer that is used to characterize the latest giant magnetoresistive (GMR) heads for next generation disk drive metrology.

 

 

 

 

Olympian Metrology System

 

The n&k Technology, Inc. Olympian utilizes n&k’s patented optical design that generates optimized reflectance data (optimized signal-to-noise) covering DUV-Vis-IR wavelengths from 190 nm to 15,000 nm to determine the optical properties (n and k), and thicknesses of ultra-thick and thin films, plus depths, CDs and profiles of complex 2-D and 3-D structures. This fully-automated system has a very low COO and can be configured for various size wafers (12", 8", 6") to expand the semiconductor applications of n&k’s UV-Vis-NIR system (the n&k 5000-CD) to include ultra-thick films such as Epi-Si and very thick photoresists and polymers (>1000nm), as well as complex 2-D and 3-D structures with ultra-high aspect ratios. On the software end, a valid physical model combines the Forouhi-Bloomer Dispersion Equation for n and k and Rigorous Coupled Wave Analysis (RCWA) to analyze raw reflectance data. The Forouhi-Bloomer (FB) model describes the Refractive Index, n, and the Extinc- tion Coefficient, k as functions of wavelength l, and was derived based on first principles quantum mechanics.

 

n&k Technology, Inc.

San Jose, CA

www.nandk.com

Tel: 1-408-513-3800

E-mail:  inforequest@nandk.com

 

 

Atlas® II Advanced Metrology System

 

The Nanometrics Atlas II metrology system accommodates both 200- or 300-mm wafer metrology. The system incorporates a dual-arm robot, high-precision stage and high-speed focus system. The Atlas also features robust pattern recognition, improved thickness reproducibility and superior SR (135 WPH for five-site measurement) and SE (90 WPH for five-site measurement) throughput. The N2000 software interface and advanced automation are compliant with standards adopted by SEMI and other organizations. The NanoNet feature, a network component of Nanometrics’ N2000 Analysis Platform software provides system-to-system matching and seamless recipe transferability. The Nanometrics Atlas system can be configured with any combination of the following metrology modules: spectroscopic reflectometer (SR); spectroscopic ellipsometer (SE); optical critical dimension (OCD); diffraction based overlay (DBO) and wafer stress/bow. n&k Analyzer solutions are distinguished by an excellent signalto-noise ratio over the entire deep-UV to near-IR (190 to 1,000 nm) wavelength range. This is a result of our patented all-reflective optics design and is essential for many applications. Metrology tools with a limited wavelength range, or increased noise suffer in terms of capabilities and measurement stability.

 

Nanometrics Inc.

Milpitas, CA

www.nanometrics.com

Tel: 1-408-435-9600

E-mail:  sales@nanometrics.com

 

 

Deposition Monitors

 

Nor-Cal Products’ deposition monitors measure film thickness or rate using crystals as the sensor device. Independent channels monitor different films or average different sensors together to provide a more uniform deposition measurement. The CM-2 model will monitor one or two sensor inputs, while the CM-6 will monitor up to six sensor inputs. These monitors are Class 1 Equipment CE approved. Included are a RS-232 cable and Windows software. This software will allow you to change the monitor’s parameters, save process readings in Excel formatted files, and operate the monitor remotely. Mounting brackets are included and rack-mount extenders are available on request. Nor-Cal also provides crystal sensors, feedthroughs, cables, oscillators and replacement crystals to round out the product offering. Our complete product line includes vacuum chambers, isolation and pressure control valves and other components for the thin film deposition market.

 

 

Crystal Sensors and Feedthroughs

 

Nor-Cal Products offers the thin film coating market crystal sensors and feedthroughs, along with vacuum chambers, isolation and pressure control valves and other components. Sensors are either single, with, or without, water cooling or dual with a pneumatically actuated shutter and water cooling. Single sensors are also available with an integrated 2.75 CF feedthrough flange or separate feedthroughs are available with 1 inch bolt, 1.33 CF or 2.75 CF flanges sizes. Nor-Cal also provides deposition monitors for up to six sensors to round out the product offering.

 

 

 

Capacitance Diaphragm Gauge with Vacuum Pressure Measurements

 

Nor-Cal Capacitance Diaphragm Gauges complement the Intellisys™ throttle valves and adaptive pressure controllers with vacuum pressure measurements of superior accuracy and repeatability. Cost effective unheated miniature gauges using analog circuitry meet many monitoring and control applications in the 10 to 1000 Torr range. In addition, for critical process control and exacting accuracy and stability requirements, Nor-Cal is pleased to be able to offer a line of digitally enabled ceramic-based sensor capacitance diaphragm gauges. These gauges are available in full scale ranges from 100 mTorr to 1000 Torr in unheated as well as self regulated temperatures of 45°C, 100°C and 160°C. Nor-Cal’s CDGs are 100% electrically and mechanically compatible with competitive gauges for easy replacement installations. The gauges are also CE, SEMI, UL and RoHS compliant.

 

 

 

Nor-Cal Products, Inc.

Yreka, CA

www.n-c.com

Tel: 1-800-824-4166

E-mail:  ncsales@n-c.com

 

 

PHOENIX L500i Leak Detector

 

The PHOENIX L500i leak detector by Oerlikon Leybold Vacuum is the new benchmark in helium leak detection. PHOENIX L500i offers advanced features, unmatched performance and a state of the art user interface. This robust and reliable mobile leak detector offers the fastest starting, cycle and clean-up times as well as 78 m3/hr pumping speed for evacuation and a 50 l/sec helium pumping speed. An iPad® user interface includes easyto-read touch-screen with 9.7" color display. The robust metal seals and electro-pneumatic valves offer more stable background readings. Leak testing from atmosphere with < 1 second response time and leaks are detectable down to 5 × 10-12 mbar × l/sec. Easy data access with W-LAN makes integration into your network possible. It has an I/O interface for external control, USB ports enable easy data export in CSV format and a large ISO-K 63 test port. Applications include production and quality control in Automotive, Electrical, Research & Development and numerous other areas.

 

Oerlikon Leybold Vacuum USA

Export, PA 15632

www.oerlikon.com/leyboldvacuum

Contact: Antonio Mantilla

Tel: 1-724-325-6531

E-mail:  antonio.mantilla@oerlikon.com

 

 

Epsilon 3 and Epsilon 3 XL EDXRF Instruments

 

Epsilon 3 instruments from PANalytical combine the latest excitation and detection technology with state-of-the-art analysis software. They are reliable, deceptively simple, benchtop energy dispersive X-ray fluorescence (EDXRF) spectrometers that offer analytical performance that can match, and in some cases surpass, that of larger, more powerful spectrometers. Selective excitation and careful matching of the X-ray tube output to the capabilities of the detection system underlie system performance. Available in Epsilon 3 and Epsilon 3 XL versions, both instruments feature a high-performance ceramic tube and the latest in silicon drift detector technology. They deliver accurate, precise and extremely reliable analysis across the full range of elements, from fluorine (F) to uranium (U). Advanced spectrum processing and state-ofthe-art correction and quantification algorithms ensure accuracy and precision.

 

The result: cost-effective instruments with outstanding analytical performance; truly a viable and capable alternative for many applications. Market leading analytical performance (including light elements), full data traceability and a variety of software options for state-of-the-art standardless analysis, rapid identification fingerprinting or regulatory compliance characterize the range and make Epsilon 3 ideal for routine applications in cement production, mining, mineral beneficiation, petroleum, polymers and related industries. Epsilon 3 can handle solid, pressed and loose powder, liquid and filter samples weighing from a few grams to larger bulk samples. Everything about the sample preparation and measurement process has been designed to be as easy as possible. When compared to other analytical techniques, XRF requires little or no sample preparation. You can also measure large or irregular shaped objects in complete safety as Epsilon 3 has no open source high-energy X-rays.

 

 

2830 ZT Wafer Analyzer Advanced Wavelength Dispersive XRF Analysis

 

The PANalytical 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) Wafer Analyzer offers the ultimate capability for measuring film thickness and composition. Designed specifically for the semiconductor and data storage industry, the analyzer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm. The 4 kW SSTmAX X-ray tube features groundbreaking ZETA technology that eliminates the effects of X-ray tube aging. ‘New tube’ performance is maintained throughout the tube’s lifetime. Together with high sensitivity, ZETA Technology ensures that rapid analysis and short measurement times are maintained across the lifetime of the tube. ZETA technology strongly reduces the need for drift correction and recalibration that increases productivity and uptime of the instrument. Key features for maximizing sensitivity and stability of 2830 ZT for light elements include a 4 kW output SST-mAX, operating at a high current of 160 mA; dedicated high-performance channels for light elements in the range from boron to magnesium; and dry (oil-free) pumps maintaining a clean, sub-Pascal vacuum within the measurement chamber. The 2830 ZT is supplied with PANalytical’s advanced SuperQ software, which includes FP Multi. The intuitive user interface ensures that even inexperienced operators can carry out fully automated fundamental parameter analysis of multi-layers.

 

PANalytical Inc., a Spectris Company

Westborough MA

www.panalytical.com

Tel: 1-508-647-1100

 

 

Portable Gas Leak Detector

 

The PerkinElmer compact handheld electronic gas leak detector detects gas leaks in your Gas Chromatography systems. Leaks in your system waste gas and can cause detector noise, baseline instability, and shorter column life. This portable unit detects minute leaks of any gas with thermal conductivity different from reference air. The reference gas inlet draws in ambient air for comparison to air drawn into the sample probe. A leak is detected by both LED bar graph display and an audible alarm. Detectable gases include helium, nitrogen, argon, carbon dioxide, and hydrogen. The battery is a rechargeable Ni-MH internal battery pack (6 hours normal operation) and it has an universal power adapter set (US, UK, European, Australian plugs included). The operating temperature range is 32 to 120°F (0-48°C), humidity range is 0-97%. The warranty is one year. Certifications include CE, Japan Compliance and WEEE, RoHS. The device has sleek ergonomic, hand-held design, rugged side grips for added durability, automatic shut-off capabilities, convenient carrying and storage case, optimized sample flow path, a universal power adaptor set, and a LED readout and audible alarm.

 

PerkinElmer, Inc., Instruments Headquarters

www.panalytical.com

Shelton, CT

Tel: 1-203-925-4600

E-mail:  stephanie.wasco@perkinelmer.com

 

 

ASM 340Fast, Reliable Leak Detection

 

The Pfeiffer Vacuum ASM 340 leak detector offers full flexibility for detecting both helium or hydrogen gases and for use in either vacuum or sniffing modes of operation. It is an easy-touse, high performance and durable leak detector, providing short cycle times and high throughput. It is capable of locating leaks starting at 100 mbar. The ASM 340 is available with a conventional vacuum pumping system or an oil-free version. Wireless remote control enables operation from a distance of up to 330 feet. It can be used in serial production as well as for maintenance tasks in applications from industrial, coatings and analytical to R&D.

 

 

 

PrismaPlus™ The RGA with Sensitivity, Stability and Intelligent Operation

 

For use in qualitative and quantitative gas analysis and leak detection, the combination of high sensitivity, stability and intelligent operation is the added “Plus” in the Pfeiffer Vacuum’s PrismaPlus mass spectrometer. The RGA is based on Pfeiffer Vacuum’s over 40 years of proven results in the field of mass spectrometry. It delivers precise and stable results in three mass ranges up to 300 amu and a detection limit of 1×10-14 mbar. With available Faraday and electron multiplier detectors, even low-level contamination can be quickly identified. In addition to displaying scan data and selectable partial pressures, direct attachment of a pressure gauge enables the PrismaPlus to also accurately monitor total pressure. The Quadera® software is easy to operate, while offering an easy-to-read platform for capturing and visualizing all measured data and parameter records. Custom routines may be created via a Visual Studio™ macro-programming module.

 

 

ActiveLine CMR/CCR Vacuum Gauges

 

Pfeiffer Vacuum’s ActiveLine CMR/CCR capacitive transmitters offer compact and rugged vacuum measurement from 10-5 to 1100 mbar. The CMR/CCR vacuum gauges feature a ceramic sensor, which prevents memory effect, provides greater resistance to corrosive gases, excellent temperature compensation and better wear properties. These transmitters operate independently of the type of gas that is being employed. The output signal, which ranges from 0 to 10 volts, features an integral error signal, ensuring secure and reliable measurement. The robust ceramic diaphragm design is less sensitive to process induced effects and can withstand millions of atmosphere cycles and bursts. Innovative signal processing produces an optimized measurement limit down to the smallest possible measured value of 10-5 mbar with high stability of the measured values. The CMR gauges can be operated with any Pfeiffer Vacuum ActiveLine controller and can be used as drop-in replacement for older gauges.

 

 

 

Pfeiffer Vacuum

Nashua, NH

www.pfeiffer-vacuum.com

Tel: 1-603-578-6500

E-mail:  contact@pfeiffer-vacuum.com

 

 

TMS-100 TopMap Metro.Lab for Large-Area Flatness, Parallelism & Step Height with 20 nm Resolution

 

The Polytec TMS-100 TopMap Metro.Lab is a telecentric inspection system that is ideal for the measurement of surface parameters such as flatness, parallelity or step height. The large vertical scan range of up to 70 mm allows surfaces to be measured that are separated by large steps or are deeply recessed, such as in drill holes. Fast, precise measurement of large areas make these interferometers the optimum tool for quality control, be it spot tests or in-line measurements.

Thickness measurement: The chromatic confocal sensor’s highly innovative measuring principle allows thickness measurements of transparent materials with extremely high accuracy. The large height range of 70 mm allows measurements of flatness, parallelism and step height to be made on larger objects under test with 20 nm resolution. An excellent price/performance ratio makes the Metro.Lab attractive for companies with limited budgets, lower throughput requirements or fewer measurement applications. The instrument is designed for metrology lab precision and can even replace many tactile measurements or sit sideby-side with them while not negatively impacting a budget. As is the case with all TopMap systems, the open software architecture allows routine tasks or customized user interfaces to be easily programmed. It is a non-contact topography-measuring interferometer for measurements on surfaces near steep edges (e.g. drill holes) with its telecentric optics. It can handle large or small objects under test due to large 70 mm z-dynamic range with its fast measurement over large field of view and enhanced 80 mm × 80 mm field of view using simplified stitching (optional). Its new TopSens Optical Sensors allow precise Surface Profile and Layer Thickness measurements. These new sensors allow fast and efficient characterization of surfaces, the determination of micro/nano-topography and optical surface roughness, and the thickness measurement of transparent samples. The measuring heads have no moving parts and are therefore robust and maintenance free. The TopSens sensor systems measure any surface and any material, whether reflective, polished, rough, opaque or transparent.

 

Polytec, Inc.

Irvine, CA

www.polytec.com/us

Tel: 1-949-943-3033

E-mail:  info@polytec.com

 

 

MetaPULSE System for Advanced Packaging Metrology Applications

 

Dynamic growth in advanced packaging arena drives need for critical process characterization technologies. The Rudolph Technologies MetaPULSE G System provides thin film metrology capability that is critical in the development and control of advanced wafer level packaging processes that use metal structures, such as redirect layers (RDL) and under bump metallization (UBM) to route signals from the chip to the package. In addition to providing the fast and accurate measurements of thickness, density and roughness, its small spot size and ability to measure structures directly on product wafers allow users to see pattern dependent variations that are not detectable with monitor wafers. The MetaPULSE G System delivers superior performance on all metal films, and is optimized for thin single and multilayer applications that are critical in advanced logic, memory and 3D packaging processes. Unlike optical and x-ray techniques, PULSE™ Technology can be used in active die without special test pads. Its 10x10 micron spot size assures measurement capability on product wafers in 30x30 micron or smaller test sites.

 

 

 

Rudolph Technologies, Inc.

Flanders, NJ

www.rudolphtech.com

Contact: Virginia Becker

Tel: 1-952-259-1647

E-mail:  virginia.becker@rudolphtech.com

 

 

SGVacuus Optical Monitor

 

Scalar Technologies Ltd, a developer and manufacturer of non-contact, thin film thickness measurement instrumentation and systems, introduced theSG Vacuus, the newest addition to the Scalar family of products.SG Vacuus is an in situ broadband optical monitoring system that provides precise measurement and control capabilities for single and multilayer vacuum deposited coating applications.

 

Scalar Technologies Limited

Livingston, West Lothian, UK

www.scalartechnologies.com

Tel: +44 1506 414 806

E-mail:  enquiries@scalartechnologies.com

 

 

FilmTek™ 3000SE Affordable Optical Film Metrology System

 

The Scientific Computing International FilmTek™ 3000SE is an affordable optical film metrology system that combines spectroscopic ellipsometry with both normal angle spectroscopic reflectometry and normal angle spectroscopic transmission measurement to make it ideally suited for measuring the thickness and optical constants of films from 1 angstrom up to tens of microns in thickness on any substrate; whether reflective or transparent. FilmTek 3000SE utilizes SCI’s material modeling software to provide an accurate and high resolution tool for the simultaneous measurement of film thickness, index of refraction (versus wavelength), extinction coefficient (versus wavelength), energy band gap, transmission properties, color coordinates, properties versus depth, constituents and void fraction, and multilayers. Like the other FilmTek systems supplied by SCI, FilmTek 3000SE is offered in a variety of options including fully robotic cassette-to-cassette wafer handling.

 

 

 

FilmTek 2000 Fiber-Optic Spectrophotometer with Revolutionary Material Modeling Software

 

Scientific Computing International’s FilmTek 2000 is a breakthrough in thin film metrology technology. FilmTek 2000 combines a fiber-optic spectrophotometer with revolutionary material modeling software to provide an affordable and reliable tool for the simultaneous measurement of film thickness, index of refraction (vs. wavelength), extinction coefficient (vs. wavelength), roughness, and energy bandgap. FilmTek 2000 provides unmatched accuracy, ease of use, and analytical power in a fully integrated package. It is available in manual and auto-stage formats for substrates at any size including large flat panel displays and solar panels. If requested, transmission capability can also be added to FilmTek 2000. This spectrophotometer is available as an in-line film thickness monitor.

 

 

Autoloader Option for FilmTek™ Thin-Film Metrology Systems

 

Scientific Computing International (SCI), a supplier of high-resolution thin-film metrology instruments, has introduced a wafer autoloader option available for table-top FilmTek™ metrology models. The autoloader is a cost effective option to increase instrument throughput and automation while avoiding the price and complexity of a fully automated, stand-alone system. With a small footprint, the Film-Tek autoloader has a load/unload cycle time on the order of a few seconds and dramatically increases wafer throughput for economical tabletop instruments. The FilmTek autoloader option is available for 4 to 8-inch wafer sizes and is compatible with all tabletop FilmTek instruments.

 

 

 

 

Scientific Computing International

Carlsbad, CA

www.sci-soft.com

Contact: Kambiz Farnaam, Ph.D., V.P. of Marketing

Tel: 1-510-301-6128

E-mail:  kambiz@sci-soft.com

 

 

GCMS-TQ8030 Triple Quadrupole Mass Spectrometer Achieves Ultra-Fast Analysis

 

The number of chemical substances that can harm the environment continues to increase. Chemists need to measure these contaminants quickly and accurately, but sample pretreatment and interference from complex matrices can be problematic. Shimadzu Scientific Instruments’ new GCMS-TQ8030 triple quadrupole gas chromatograph mass spectrometer offers a solution to these challenges along with the speed, accuracy and ease-of-operation that scientists want. With Shimadzu’s high-efficiency proprietary ion source, the GCMSTQ8030 achieves the highest sensitivity specification in its class for multiple reaction monitoring (MRM) measurements by GC/ MS/MS, as well as for scan and SIM measurements by GC/MS. The instrument’s high-sensitivity analysis allows a wide variety of measurement modes, including MRM, scan, combination scan/MRM, neutral loss scan and others The GCMS-TQ8030 features Shimadzu’s UFsweeper® technology, which minimizes collision cell length and provides high-CID efficiency and high ion transport speed. UFsweeper accelerates ions out of the collision cell by forming a pseudo-potential surface, preventing any drop in signal intensity or cross talk, even at ultra-fast measurement speeds. The system comes equipped with Advanced Scanning Speed Protocol (ASSP™ ), an internal protocol that optimizes ion transmission parameters during the scan acquisition process.

 

 

AXIMA Resonance™ Mass Spectrometer

 

Shimadzu Scientific Instruments’ AXIMA Resonance™ mass spectrometer is for the structural characterization and sequencing of biomolecules. The AXIMA Resonance ensures confident, high-quality results with high mass resolution and mass accuracy across MS and MSn analyses, variable energy CID control on the fly, high-resolution precursor ion selection up to 1000 FWHM, and highly efficient trapping functionality.

 

 

Multi-Dimensional Gas Chromatography System for Structure and Quality Control Analysis

 

Shimadzu Scientific Instruments’ Multi-Dimensional Gas Chromatography system (MDGC) expands the capabilities of chemists who perform target compound analyses in complex sample matrices, including natural product extracts, food and flavor components, and biological extracts. Traditionally, a single-column approach to these analyses has proven to be problematic because the complex nature of the matrices makes the separation of the target analytes from matrix interference extremely difficult. This multidimensional heart-cutting system, incorporating a “multi-Deans switch,” greatly increases separation power by combining two capillary columns of different selectivity for a more efficient separation of the target analytes from a complex sample matrix. The improved separation of the analytes from the matrix interferences allows more positive identification and improved quantitative analysis of the target analytes. The key hardware component of the MDGC system is a capillary-optimized pressure-switching device (“multi-Deans switch”) that directs flow from the first column directly to a monitor detector or to the second column and detector. This device has no moving parts, but is based on the use of an advanced electronic flow controller to balance the pressure on both sides of the transfer line between columns. Multiple heart-cuts can be made from the first column without shifting the retention times of compounds eluting after the cuts, greatly simplifying method development. A fully integrated software package, which can be used with either GCsolution or GCMSsolution software, simplifies the method development and operation of the system.

 

Shimadzu Scientific Instruments, Inc.

Columbia, MD

www.ssi.shimadzu.com

Contact: Kevin McLaughlin, Mktg Communications Coordinator

Tel: 1-800-477-1227

E-mail:  kgmclaughlin@shimadzu.com

 

 

SmartTrak® 140 Ultra-Low Pressure Drop MFC with Lowest Pressure Drop

 

Sierra Instruments, a leader in flow instrumentation, announced the release of their new SmartTrak® 140 Ultra-Low P mass flow controller for high performance mass flow control applications where minimal pressure drop is a key consideration for cost savings and efficiency. The SmartTrak 140 controls gas mass flow up to 500 slpm (nlpm) with an ultra-low P of 4.5 psid (310mBard), considerably lower than other mass flow controllers on the market that typically offer ?P values of 25 psid (1700 mBard). SmartTrak 140 offers an accuracy of ± 1.0% of full scale, repeatability of ± 0.2% of full scale, flow range up to 500 slpm (nlpm), 316 stainless steel construction, and control valve with large flow coefficient (C ) v for precise control at low ?P. The 140 is a hybrid of two innovative Sierra technologies, our award winning SmartTrak® 100, with its industry leading LFE (Laminar Flow Element), sensor and digital electronics, was combined with our SideTrak® 840 low ?P valve which has a very large flow coefficient (C ). By v combining these two technologies, we provide a controller that boasts the lowest pressure drop in the industry at a relatively economical price. The 140 also offers Sierra’s patented Dial-A-Gas® Technology allowing users to set zero, span, and full scale for 10 different gases independently in the field. In addition, a handheld or instrument-mounted user display/interface called the Pilot Module makes field-adjustments and re-configuration easy.

 

Sierra Instruments Inc.

Monterey, CA

www.sierrainstruments.com

Contact: Maryadine Washington, Mktg Communications Manager

Tel: 1-800-866-0200 Ext. 108

E-mail:  m_washington@sierrainstruments.com

 

 

STC-2002 Expandable Thin Film Deposition Controller

 

The STC-2002 Thin Film Controllers from Sycon Instruments are versatile and expandable to meet thin film deposition control requirements from the simple to the most complex. Whether depositing a single layer or a complex multi-layer film with simultaneous control of two materials, the STC-2002 meets your needs. It has the highest accuracy and best control achievable from a quartz crystal deposition monitor. The STC-2002 employs an advanced measurement technique, which allows high accuracy reading to be made 10 times a second. The high-resolution measurements, at a fast update, allow precise control of the deposition source to achieve the quality of films desired. It has a High Resolution/High Speed measurement Engine for precise deposition control. It provides 10 measurements per second with a 0.01Å/s rate resolution. Its RS232/RS485 interface provides serial communications. A large format numeric and graphic display includes a touch panel user interface. The controller is expandable up to 8 source/sensors. The multiprocessor design maintains performance. It is an expandable I/O with up to 32 inputs or outputs for use with programmable logic. Weighted averaging of up to 8 sensors is used for precise large area deposition. Four user-defined front panel buttons and user definable indicators are provided for use with I/O programs. Resolution is 0.03 Hz @ 10 measurements/s. The Crystal Sensor is industry standard 6 MHz. Thickness display is 0.000 to 999.9 kÅ and rate display is 0.00 to 999 Å/s. Inputs are 8 each 5 to 30 VAC-DC or contact closure, opto isolated. Outputs are 8 Form C relays 24 volts, 1 A with source outputs of ± 2.5, 5, 10 volts@10 mA.

 

 

STC-2000A Deposition Rate Controller

 

The STC-2000A from Sycon Instruments has advanced electronics, LCD display, storage for 50 film programs, 9 process recipes and programmable input/output structure give the user versatility and performance. The STC-2000A uses the time-proven 6 MHz oscillating quartz crystals as the sensor device. The STC-2000A microprocessor technology enables the direct solution of the complex mathematical equation associated with the frequency shift versus mass loading characteristics of the quartz crystal sensor. Its computational power allows the measurement of the material accumulated on the sensor crystal to be accurately converted to film thickness using the exact equation; inaccuracies due to approximations and limited ranges of material constants do not contribute to thickness and rate errors. An innovative frequency measurement system allows the STC-2000A to acquire and display 10 measurements per second with 0.0088 Å/measurement rate resolution on each of the sensor input channels. The standard STC-2000A is equipped with 8 relays, 8 optocoupled inputs, a RS-232 computer interface, and high-resolution analog control and recorder outputs. A rack mount for half-rack mounting is also standard. Features include: multi sequence multi-film process control; a high resolution/high speed measurement engine; 10 measurements per second at 0.0088 Å/s rate resolution; RS232 (optional RS485) interface for serial communications; easy to read LCD display with touch panel interface; versatile I/O programming; and industry standard 6 MHz crystals. The high thickness resolution is 0.013 Angstrom per measurement (for aluminum). The High Rate Resolution is 0.0088 Angstrom per measurement rate. The high accuracy is ± 0.5% thickness + 1 count.

 

 

 

 

STM-100/MF Thin Film Deposition Thickness/Rate Monitor

 

The Model STM-100/MF Thickness/Rate Monitor from Sycon Instruments, Inc. is a precision mass and film thickness measurement instrument for thin film deposition processes and other quartz crystal microbalance applications. The STM-100/ MF has proven very tough and reliable. Easy to setup and use, the STM-100/MF has a history that makes it the one to have for deposition monitoring. Features include Multi-Film Program Storage and with a high resolution and high-speed measurement engine. It has 1 Å thickness resolution with 0.1 Å/s rate resolution. It can make 4 measurements per second and has a multiple function high readability back-lit LCD. Analog output of rate or thickness is ±0 to 10V with 12-bit resolution. It has a low maintenance sensor design and an industry standard 6 MHz sensing crystal. The unit has a RS-232 Interface and a LabVIEW™ front panel interface. In Multi Mode Operation includes Thickness/ Rate Monitor, Negative Thickness Monitor and Sensor Frequency Monitor. Its high speed makes four measurements per second. Resolution is 0.1Å per second. High Accuracy is ±0.5% thickness ±1 count and the measurement range is 500 kÅ aluminum equivalent. Relay Outputs are four 1.5 amp SPST N.O. contacts with Shutter Control, Thickness Set point, Timer Set point and Crystal Failure. Remote inputs include four TTL compatible inputs with Open Shutter, Close Shutter, Zero Thickness and Zero Time functions. Setpoints monitor End Thickness of 0.000 to 9999 kÅ and setpoint thickness of 0.000 to 9999 kÅ.

 

Sycon Instruments Inc.

East Syracuse, NY

www.sycon.com

Tel: 1-315-463-5297

E-mail:  www.sycon.com

 

 

Digital Vacuum Controller (DAVC)

 

Teledyne Hastings Instruments (THI) introduced the DAVCDigital Active Vacuum Controller. The DAVC is a digital readout version of THI’s AVC vacuum gauge. In addition to the analog output (0-1 VDC), pressure measurements can be accessed by an RS232 serial port using Torr, mbar or Pa. A precision A/D converter along with the microprocessor measures the thermocouple vacuum gauge tube’s signal output, converts the measurement to a pressure reading employing the gauge tube’s well-defined output/pressure function, and transmits the result. The DAVC is for use with Hastings’ most popular DV-6 and DV-4 series thermocouple gauge tubes.

 

 

 

 

 

Digital CVT Vacuum Gauge

 

Teledyne Hastings Instruments’ (THI) new Digital CVT vacuum gauge controller is a digital readout version of the successful VT/CVT-Series. A reputation has been built on exceptional stability, accuracy, and reliability under the most demanding conditions. The Digital CVT’s are available for two of THI’s most popular gauge tube families: the DV-6 (1 to 999 mTorr) and the DV-4 (0.02 to 20 Torr). The Digital CVT’s feature long life and minimal maintenance. Tubes are interchangeable without calibration adjustments. The Digital CVT is a fully automatic, continuous-reading instrument for vacuum applications, operating in the standard ranges of the VT meters, including two user selectable control limits. The control points are durable 10 amp single pole double throw relays that can be configured normally open or normally closed. The Digital CVT also includes a (0 to 1 volt) non-linear analog output signal and a digital RS232 port as standard.

 

Teledyne Hastings Instruments (THI), a business unit of Teledyne Instruments

Hampton, VA

www.teledyne-hi.com

Tel: 1-757-723-6531

E-mail:  hastings_instruments@teledyne.com

 

 

Model 880 Thin Film Deposition Controller

 

Telemark’s Model 880 Deposition Controller is based on a multi-microprocessor design, which provides the best combination of resolution and update speed available on the market today. The 880 comes standard with 1 Programmable Input card and 1 Programmable Output Card. There are 2 additional I/O slots that could house either additional Input Cards (8 programmable, optocoupled inputs, each electrically isolated) or Output Cards (8 programmable output SPDT relays1.0 Amp @24VDC Max. each). The sensor-head/source-control module provides two channels each for crystal frequency measurements and two source outputs that are ±2.5, 5 or 10 VDC @ 10 mA, plus 4 user programmable front panel function keys. The 880 features 3 large LED displays that continuously display Power, Rate & Thickness measurements. Thickness display is 0.000 to 999.9 kÅ and the rate display is 0.0 to 999 Å/s. The communication interface is RS232C standard. The 880 is capable of storing 99 material films/process parameters of 9 sequence recipes, 99 steps per recipe. Power requirements are 90 to 264VAC at 50-60 Hz. The unit is full width rack mount, 3.5" H, 8.5/8" D.

 

 

In-Situ Spectroscopic Optical Monitoring/Control and DES System

 

The Telemark NVision optical monitoring system is designed for applications in the Optical Coating, Web Coating and Large Area Flat substrate markets. It provides full spectrum, real-time analysis and control of reflectance and transmittance during thin-film deposition in dedicated systems for large area flatweb coating and optical coating. Regardless of the process application, the NVision Optical Monitor will allow monitoring of coatings and/or plasma to reduce cost while increasing the performance of the coating process. Customer specific statistical analysis of a run, a group of runs or even years of data is possible from data stored in the system’s data base.

 

Telemark

Battle Ground, WA

www.telemark.com

Tel: 1- 360-723-5360

E-mail:  sales@telemark.com

 

 

CC-10 Wide Range Vacuum Gauge (760 to 1 × 10-9 Torr)

 

Televac’s The CC-10 is a self-contained compact gauge and controller designed to replace multiple conventional vacuum gauges by incorporating the latest sensor technology to permit seamless measurement of twelve decades of pressure. This gauge uses dual sensor technology. Rough vacuum, from atmospheric pressure to 10-2 Torr is measured using a crystal sensor, while pressure from 10-2 Torr to 1 × 10-9 Torr is measured with a double inverted magnetron cold cathode sensor. All operating parameters are easily addressed and checked from the membrane panel on the front of the electronics module. A blue-green segmented LED provides pressure indication. Discrete LEDs indicate status for each of the three set point relays. The CC-10 offers the user the choice of both analog and digital communication as a standard feature.

 

 

 

MM200 Multi Channel Vacuum Instrument, Flexible to Meet All Vacuum Measurement Needs

 

Televac’s MM200 Multi-Channel Vacuum Instrument offers a wide range of options for vacuum measurement and control. Configurations include combinations of ionization, thermocouple, convection, diaphragm and set-point relay switches allowing measurement range of 7600 Torr to 1 × 10-11 Torr. Features of this instrument include: selectable units (Torr, micron, psi, mBar or Pascal), system leak up rate, large bright LED display, easy to use panel, RS232 or 485 communications and 0-10V outputs are available.

 

Televac, A Fredericks Company

Huntingdon Valley, PA

www.televac.com

Tel: 1-215-947-2500

E-mail:  vacuum@televac.com

 

 

High Speed Compact Ellipsometer

 

The ULVAC UNECS-2000/UNECS-3000 Spectroscopic Ellipsometers measure thin film thickness and optical constants faster and more efficiently than conventional mechanically controlled rotating optical devices. The compact UNECS design with built-in light source and controller is simple and inexpensive to operate and maintain. The emitter and sensor heads are small with builtin light source and controller. UNECS comes with the computer control and analysis software. Using parallel measurement, the thickness of up to six individual film layers are measured simultaneously. Measurements at 20 ms/point permit fast inspection of samples. The UNECS-2000 motor stage can handle samples up to 200 mm in diameter. The UNECS-3000 features an automatic mapping function to measure thickness distribution across a 300 mm substrate.

 

 

 

Gas Analysis – Low Cost RGA to Quadrupole Mass Spectrometry

 

ULVAC offers three compact quadrupole mass spectrometers – the low cost Qulee BGM, Qulee CGM for high pressures and Qulee HGM for the highest sensitivity. All feature ease-of-operation and an integrated display and control eliminates the need for a PC. One-touch control displays the partial pressure in Torr, mbar, or Pascal of He, H2 O, N2 , O2 , O2/N2 ratio and user selected gases. The ULVAC Qulee BGM Quadrupole mass spectrometer offers cost effective leak detection, RGA and process gas monitoring. The Qulee BGM, with a maximum operating pressure of 15 mTorr, can eliminate the need for differential pumping, while still offering a minimum detectable partial pressure is 1 ×10-12 Torr. Featuring the highest sensitivity and largest mass range of the series, the HGM units have measurable mass ranges of 1 to 200/300 amu, with a minimum partial pressure measurement detection range of an amazing 10-15 Torr.

 

 

Extreme High Vacuum Gauge

 

The ULVAC AxTRAN is an extremely high vacuum gauge (XHV) that uses an energy analyzer to completely separate the ion source and ion collector. This structure permits Ax-TRAN to separate and measure noise current generated inside/outside the gauge, and gas ion current dependent on the pressure generated in the ion source. It enables highly quantifiable pressure measurements in a wide pressure range (7.5 × 10-5 to 3.7 × 10-13 Torr). The Ax-TRAN can be used for pressure measurements for high-energy accelerators, ultra-high and extreme high vacuum systems. Features include two independent set points, an easy-to-read 3-digit mantissa LED display and a wide pressure measuring range.

 

 

 

ULVAC Technologies

Methuen, MA

www.ulvac.com

Tel: 1-978-686-7550

E-mail:  sales@ulvac.com

 

 

MD-490S Portable Leak Detector

 

VIC’s MD-490S Leak Detector is a portable helium sniffer leak detectors. With a response time less than 0.5 seconds, sensitivity of 10-8 atm-cc/sec, and the ability to compensate for background variation, VIC’s MD-490S portable leak detector is an affordable mass spectrometer features a dry, maintenance-free pump, continuous operator feedback, and comes complete with standard probe (includes built-in calibrated leak and automatic calibration sequence traceable to N.I.S.T. with certificate of calibration that meets ISO 9000 quality standards) that some manufactures sell as an extra-cost option. The MD-490S even has a remote display and vibrating probe for noisy work environments.

 

 

MS-60 Portable Dual Sector Mass Spectrometer Helium Leak Detector

 

The MS-60 series quickly and accurately detects leaks for a broad range of applications and is the most advanced portable helium leak detector in the industry, offering highest sensitivity and fastest test-time. The MS series utilizes VIC’s own state-of-theart dual magnetic sector helium mass spectrometer for error-free operation in a complete range of industrial, dry, and clean room models. The Touch-Screen GUI allows for greater system control and monitoring during system startup and operation. Displays include system status, accept/reject status, system health, setup, calibration and other diagnostic functions. The standard 7 cfm direct drive foreline/ roughing pump permits faster cycle times with an optional 10.6 cfm available. Internal or external calibration is included for flexibility. It has Digital Input/Digital Output, is fully automatic with a dual magnetic sector high-resolution mass spectrometer with three modes of operation.

 

 

Vacuum Instrument Corporation

Ronkonkoma, NY

www.vicleakdetection.com

Tel: 1-631-737-0900

E-mail:  sales@VicLeakDetection.com

 

 

Pirani Gauge 0.01 to 100 mTorr (10-5 Torr)

 

The Vacuum Research Pirani Gauge offers the precision and high resolution of digital electronics at the same price as analog instruments. Our extremely rugged sensor is constructed with a solid, inert, noble metal that maintains calibration over long periods. Because no gold is used, these gauges are compatible with both mercury and oil pumps. The low 125°C operating temperatures in our Pirani type gauge tube (half that of thermopile gauges), enhances stability as does a unique temperature compensation network. Gauge tubes are matched so they can be replaced without recalibration, and they can withstand working pressures to 300 PSI, tested to 1200 PSI. The Dual Set Point Controller operates two control relays. Set point values are adjusted from the front panel and displayed on the meter. Push-to-set switches simplify display of the set point pressures. Relays have 3 Amp contacts, form C, and have screw terminal connectors on the rear of the instruments. Both the indicator and the controller instruments are available in either 1/4 DIN or 2.75 inch diameter standard enclosures. The 2.75 inch diameter standard enclosure fits the same panel cut out as Hastings, Varian, Televac and other analog meters. Mounting hardware is included.

 

 

Active Pirani Sensor & Gauge in One Compact Package

 

The Vacuum Research 1 to 2,000 mTorr Active Pirani Gauge offers sensor and gauge in one compact package. Calibration in mTorr is standard, but there is no charge for calibration in microns, mbar, or Pa ranges. A 3 ½ digit LCD is available and all models provide both 0 - 10 VDC and 4-20 mA linear outputs for your PLC or data system. The standard gauge has a 1/8 NPT male thread and can fit into quick connects sized for 1/8 inch pipe (0.405 in. dia.) NW, VCR and mini-Conflat connections are available.

 

 

 

 

Diaphragm Manometer 50 milliTorr to 1000 Torr

 

The Vacuum Research Diaphragm Manometers are compact vacuum measurement and control instruments that are unaffected by gas composition. The diaphragm is 316L stainless steel and can measure liquid or gas under vacuum. Response time is less than 1 second for full scale and instruments are available with a variety of flanges including VCR and CF, NPT or NW styles. All models of the Diaphragm Manometer provide simultaneous linear outputs of 0 - 10 VDC and 4-20 mA. To improve the resolution of your PLC or data system the 4-20 mA signal can be changed in the field to have spans of either 0 to 1, 0 to 5, 0 to 10, 0 to 50 or 0 to 1000 Torr. 4 mA is always “zero” pressure but by moving a pin jumper on the circuit board 20 mA can be 1, 5, 10, 50 or 1000 Torr.

 

Vacuum Research Corp.

Pittsburgh, PA

www.vacuumresearch.com

Tel: 1-800-426-9340 or 1-412-261-7630

E-mail:  VRC@vacuumresearch.com

 

 

Vacuumulation™ Battery Leak Test System

 

VTI’s patent-pending Vacuumulation™ method is a hybrid-technique between traditional hard vacuum mass spectrometer leak detection and atmospheric accumulation leak detection. A unit under test is placed in a vacuum chamber and a vacuum of 10 to 100 Torr is achieved. The Leak Test System then “vacuumulates” the tracer gas to be measured by the leak detector. The system can lower the cost of a traditional hard vacuum mass spectrometer leak detection system by 20-25% and can provide a 10 to 100 times shorter TAKT time than traditional atmospheric accumulation leak detection. An example of VTI’s proprietary Vacuumulation Leak Test System is shown. The system is shown leak testing batteries that are Charged-in-Chamber (CIC) with 2 psia helium to a leak rate of 1 × 10-4 atm-cc/s helium. The CIC process is critical to the success of this testing as the unit under test cannot withstand larger differential pressures. Unlike standard hard vacuum leak test chambers, this leak detection system is evacuated only to a vacuum of approximately 10 Torr. Helium is then accumulated inside the system to allow sufficient signal to detect the 1 × 10-4 atm-cc/s leak from the test part. The two-chamber system shown above delivers one tested part per minute. This type of leak detection system is best suited for testing units with leak rate specifications of 1 × 10-4 atm-cc/s of helium or greater, relatively small volume, and relatively long TAKT times. Accumulation Leak Testing methods have been traditionally used on very small products, but the use of Vacuumulation has allowed the size of the product to increase. Bar codes are used for cycle initiation, unit identification, and tracking of test results.

 

 

NIST-traceable, Precision and General Purpose Calibrated Leaks

 

VTI can build a NIST-traceable calibrated leak directly into one of your parts to make a “test part” for a product that you are leak testing by helium, pressure decay or other methods. This test part is then periodically put through your regular production test cycle to calibrate the actual leak rate being detected…and to verify that the test system totally, from the inlet gas pressure to the final pass/fail signal, is performing valid tests. As the builder of high-reliability Leak Testing Systems for manufacturing plants, VTI knows the importance of the 100% assurance of testing validity that can only be achieved by using these “Calibrated Test Parts”. We have built these A2LA-accredited, custom leak standards into test parts of many different products. Accu-Flow™ General Purpose Helium Calibrated Leaks are feature very high quality design and stainless steel construction at affordable prices. Low cost standards are available for calibrating all makes of leak detectors and systems including Alcatel, Inficon, Varian and Veeco, as well as VTI. Certified NIST-traceable, A2LA-accredited calibrations are included. Three types of leak elements are available: conventional glass-permeation (GPP Model), unbreakable Teflon-permeation (GPPT Model), or crimped stainless steel capillary elements (GPC Model). Accu-Flow™ High-Precision Helium Calibrated Leaks. The CLP Model High-Precision Glass-Permeation Helium Leaks are used as transfer standards for calibrating leak detectors, mass spectrometers/RGA’s, and other helium leaks. This bakeable, UHV-compatible model features all-stainless steel, welded construction and all-metal valves. In critical manufacturing and research applications, these precision leaks offer the ultimate in performance and accuracy. NIST-traceable leak rates as small as 10-12 atm-cc/sec. are available

 

Vacuum Technology Inc.

Oak Ridge, TN

www.vacuumtechnology.com

Contact: Danielle P. Westcott, Sales and Marketing Coordinator

Tel: 1-865-481-3342

E-mail:  sales@vacuumtechnology.com